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Browse by Category: Main > Electrical & Energy
Class Information
Number: 219/121.43
Name: Electric heating > Metal heating (e.g., resistance heating) > By arc > Using plasma > Cutting > Etching > With chamber
Description: Subject matter wherein eroding or abrading of the workpiece is accomplished in an enclosure.










Patents under this class:
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Patent Number Title Of Patent Date Issued
8680424 Microwave plasma processing device Mar. 25, 2014
8674255 Apparatus and method for controlling etch uniformity Mar. 18, 2014
8664560 Method and apparatus for abatement of reaction products from a vacuum processing chamber Mar. 4, 2014
8664561 System and method for selectively controlling ion composition of ion sources Mar. 4, 2014
8629370 Assembly for delivering RF power and DC voltage to a plasma processing chamber Jan. 14, 2014
8618436 Apparatus and method of oxidation utilizing a gliding electric arc Dec. 31, 2013
8610024 Apparatus and method for producing a lunar agglutinate simulant Dec. 17, 2013
8592712 Mounting table structure and plasma film forming apparatus Nov. 26, 2013
8563619 Methods and arrangements for plasma processing system with tunable capacitance Oct. 22, 2013
8552334 Adjustable gap capacitively coupled RF plasma reactor including lateral bellows and non-contact particle seal Oct. 8, 2013
8513563 Plasma processing apparatus and plasma processing method Aug. 20, 2013
8492674 Methods and apparatus for ex situ seasoning of electronic device manufacturing process components Jul. 23, 2013
8450635 Method and apparatus for inducing DC voltage on wafer-facing electrode May. 28, 2013
8426763 Rapid thermal processing systems and methods for treating microelectronic substrates Apr. 23, 2013
8399794 Atmospheric pressure plasma, generating method, plasma processing method and component mounting method using same, and device using these methods Mar. 19, 2013
8394233 Electrode orientation and parallelism adjustment mechanism for plasma processing systems Mar. 12, 2013
8373086 Plasma processing apparatus and method for plasma processing Feb. 12, 2013
8367965 Electrode design for plasma processing chamber Feb. 5, 2013
8357873 Plasma whirl reactor apparatus and methods of use Jan. 22, 2013
8328981 Method for heating a focus ring in a plasma apparatus by high frequency power while no plasma being generated Dec. 11, 2012
8324523 Plasma whirl reactor apparatus and methods of use Dec. 4, 2012
8324525 Method of plasma load impedance tuning for engineered transients by synchronized modulation of a source power or bias power RF generator Dec. 4, 2012
8319141 Cooling block forming electrode Nov. 27, 2012
8299391 Field enhanced inductively coupled plasma (Fe-ICP) reactor Oct. 30, 2012
8299390 Apparatus and method for controlling plasma density profile Oct. 30, 2012
8283593 Wire cleaning guide Oct. 9, 2012
8263897 Induction device Sep. 11, 2012
8257548 Electrode orientation and parallelism adjustment mechanism for plasma processing systems Sep. 4, 2012
8242405 Microwave plasma processing apparatus and method for producing cooling jacket Aug. 14, 2012
8217299 Arc recovery without over-voltage for plasma chamber power supplies using a shunt switch Jul. 10, 2012
8207470 Apparatus for generating remote plasma Jun. 26, 2012
8173928 Processing device May. 8, 2012
8164033 Stage, substrate processing apparatus, plasma processing apparatus, control method for stage, control method for plasma processing apparatus, and storage media Apr. 24, 2012
8153926 Etching method and system Apr. 10, 2012
8142521 Large scale MOCVD system for thin film photovoltaic devices Mar. 27, 2012
8138444 Plasma processing apparatus Mar. 20, 2012
8138445 Plasma processing apparatus and plasma processing method Mar. 20, 2012
8124906 Method and apparatus for processing metal bearing gases Feb. 28, 2012
8124907 Load lock chamber with decoupled slit valve door seal compartment Feb. 28, 2012
8093529 Control method of a temperature of a sample Jan. 10, 2012
8084720 High rate method for stable temperature control of a substrate Dec. 27, 2011
8084705 Quartz guard ring centering features Dec. 27, 2011
8080760 Apparatuses for adjusting electrode gap in capacitively-coupled RF plasma reactor Dec. 20, 2011
8063337 Mass spectrometry injection system and apparatus Nov. 22, 2011
8058585 Plasma processing method, plasma processing apparatus and storage medium Nov. 15, 2011
8053700 Applicators and cooling systems for a plasma device Nov. 8, 2011
8049144 Plasma arc coating system Nov. 1, 2011
8039772 Microwave resonance plasma generating apparatus and plasma processing system having the same Oct. 18, 2011
8035056 Plasma generation apparatus Oct. 11, 2011
8026497 Methods and apparatus for generating ultraviolet light Sep. 27, 2011

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