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Class Information
Number: 219/121.43
Name: Electric heating > Metal heating (e.g., resistance heating) > By arc > Using plasma > Cutting > Etching > With chamber
Description: Subject matter wherein eroding or abrading of the workpiece is accomplished in an enclosure.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7625494 |
Plasma etching method and plasma etching unit |
Dec. 1, 2009 |
| 7622693 |
Plasma whirl reactor apparatus and methods of use |
Nov. 24, 2009 |
| 7619178 |
Directly connected magnetron powered self starting plasma plume igniter |
Nov. 17, 2009 |
| 7619179 |
Electrode for generating plasma and plasma processing apparatus using same |
Nov. 17, 2009 |
| 7608796 |
Plasma generating electrode and plasma reactor |
Oct. 27, 2009 |
| 7595462 |
Plasma processing method and plasma processing apparatus |
Sep. 29, 2009 |
| 7592564 |
Plasma generation and processing with multiple radiation sources |
Sep. 22, 2009 |
| 7586099 |
Vacuum plasma generator |
Sep. 8, 2009 |
| 7582845 |
Microwave plasma processing device and plasma processing gas supply member |
Sep. 1, 2009 |
| 7569791 |
Inductively-driven plasma light source |
Aug. 4, 2009 |
| 7569790 |
Method and apparatus for processing metal bearing gases |
Aug. 4, 2009 |
| 7560657 |
Plasma-assisted processing in a manufacturing line |
Jul. 14, 2009 |
| 7557328 |
High rate method for stable temperature control of a substrate |
Jul. 7, 2009 |
| 7554054 |
High-frequency heating device, semiconductor manufacturing device, and light source device |
Jun. 30, 2009 |
| 7547860 |
Microwave plasma processing apparatus for semiconductor element production |
Jun. 16, 2009 |
| 7541558 |
Inductively-coupled toroidal plasma source |
Jun. 2, 2009 |
| 7511246 |
Induction device for generating a plasma |
Mar. 31, 2009 |
| 7507934 |
Plasma generation electrode, plasma reactor, and exhaust gas cleaning apparatus |
Mar. 24, 2009 |
| 7501600 |
Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel |
Mar. 10, 2009 |
| 7501605 |
Method of tuning thermal conductivity of electrostatic chuck support assembly |
Mar. 10, 2009 |
| 7491908 |
Plasma processing device and ashing method |
Feb. 17, 2009 |
| 7485827 |
Plasma generator |
Feb. 3, 2009 |
| 7482550 |
Quartz guard ring |
Jan. 27, 2009 |
| 7468494 |
Reaction enhancing gas feed for injecting gas into a plasma chamber |
Dec. 23, 2008 |
| 7435926 |
Methods and array for creating a mathematical model of a plasma processing system |
Oct. 14, 2008 |
| 7432470 |
Surface cleaning and sterilization |
Oct. 7, 2008 |
| 7432468 |
Plasma processing apparatus and plasma processing method |
Oct. 7, 2008 |
| 7432467 |
Plasma processing apparatus |
Oct. 7, 2008 |
| 7411148 |
Plasma generation apparatus |
Aug. 12, 2008 |
| 7404879 |
Ionized physical vapor deposition apparatus using helical self-resonant coil |
Jul. 29, 2008 |
| 7399944 |
Method and arrangement for controlling a glow discharge plasma under atmospheric conditions |
Jul. 15, 2008 |
| 7399943 |
Apparatus for metal plasma vapor deposition and re-sputter with source and bias power frequencies applied through the workpiece |
Jul. 15, 2008 |
| 7371991 |
Iron beam irradiation device and insulating spacer for the device |
May. 13, 2008 |
| 7355143 |
Circuit board production method and its apparatus |
Apr. 8, 2008 |
| 7345260 |
Heater and method of manufacturing the same |
Mar. 18, 2008 |
| 7334477 |
Apparatus and methods for the detection of an arc in a plasma processing system |
Feb. 26, 2008 |
| 7335851 |
Gap measurement apparatus |
Feb. 26, 2008 |
| 7326872 |
Multi-frequency dynamic dummy load and method for testing plasma reactor multi-frequency impedance match networks |
Feb. 5, 2008 |
| 7323655 |
Inductively coupled plasma reactor for producing nano-powder |
Jan. 29, 2008 |
| 7312415 |
Plasma method with high input power |
Dec. 25, 2007 |
| 7309842 |
Shielded monolithic microplasma source for prevention of continuous thin film formation |
Dec. 18, 2007 |
| 7304264 |
Micro thermal chamber having proximity control temperature management for devices under test |
Dec. 4, 2007 |
| 7297894 |
Method for multi-step temperature control of a substrate |
Nov. 20, 2007 |
| 7273995 |
Plasma generator |
Sep. 25, 2007 |
| 7271363 |
Portable microwave plasma systems including a supply line for gas and microwaves |
Sep. 18, 2007 |
| 7262384 |
Reaction vessel and method for synthesizing nanoparticles using cyclonic gas flow |
Aug. 28, 2007 |
| 7230202 |
Plasma processing apparatus, electrode unit, feeder member and radio frequency feeder rod |
Jun. 12, 2007 |
| 7227097 |
Plasma generation and processing with multiple radiation sources |
Jun. 5, 2007 |
| 7220937 |
Plasma reactor with overhead RF source power electrode with low loss, low arcing tendency and low contamination |
May. 22, 2007 |
| 7199327 |
Method and system for arc suppression in a plasma processing system |
Apr. 3, 2007 |
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