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Class Information
Number: 219/121.41
Name: Electric heating > Metal heating (e.g., resistance heating) > By arc > Using plasma > Cutting > Etching > Methods
Description: Subject matter relating to the process of eroding and abrading a workpiece with a plasma torch.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7625494 |
Plasma etching method and plasma etching unit |
Dec. 1, 2009 |
| 7608798 |
Plasma catalyst |
Oct. 27, 2009 |
| 7592564 |
Plasma generation and processing with multiple radiation sources |
Sep. 22, 2009 |
| 7586099 |
Vacuum plasma generator |
Sep. 8, 2009 |
| 7582845 |
Microwave plasma processing device and plasma processing gas supply member |
Sep. 1, 2009 |
| 7569790 |
Method and apparatus for processing metal bearing gases |
Aug. 4, 2009 |
| 7560657 |
Plasma-assisted processing in a manufacturing line |
Jul. 14, 2009 |
| 7554053 |
Corrugated plasma trap arrangement for creating a highly efficient downstream microwave plasma system |
Jun. 30, 2009 |
| 7541558 |
Inductively-coupled toroidal plasma source |
Jun. 2, 2009 |
| 7485827 |
Plasma generator |
Feb. 3, 2009 |
| 7482550 |
Quartz guard ring |
Jan. 27, 2009 |
| 7468494 |
Reaction enhancing gas feed for injecting gas into a plasma chamber |
Dec. 23, 2008 |
| 7399943 |
Apparatus for metal plasma vapor deposition and re-sputter with source and bias power frequencies applied through the workpiece |
Jul. 15, 2008 |
| 7372059 |
Plasma-based EUV light source |
May. 13, 2008 |
| 7355143 |
Circuit board production method and its apparatus |
Apr. 8, 2008 |
| 7326872 |
Multi-frequency dynamic dummy load and method for testing plasma reactor multi-frequency impedance match networks |
Feb. 5, 2008 |
| 7312415 |
Plasma method with high input power |
Dec. 25, 2007 |
| 7313262 |
Apparatus for visualization of process chamber conditions |
Dec. 25, 2007 |
| 7304263 |
Systems and methods utilizing an aperture with a reactive atom plasma torch |
Dec. 4, 2007 |
| 7227097 |
Plasma generation and processing with multiple radiation sources |
Jun. 5, 2007 |
| 7223945 |
Substrate heating method, substrate heating system, and applying developing system |
May. 29, 2007 |
| 7199327 |
Method and system for arc suppression in a plasma processing system |
Apr. 3, 2007 |
| 7193173 |
Reducing plasma ignition pressure |
Mar. 20, 2007 |
| 7183514 |
Helix coupled remote plasma source |
Feb. 27, 2007 |
| 7183715 |
Method for operating a semiconductor processing apparatus |
Feb. 27, 2007 |
| 7176402 |
Method and apparatus for processing electronic parts |
Feb. 13, 2007 |
| 7176403 |
Method and apparatus for the compensation of edge ring wear in a plasma processing chamber |
Feb. 13, 2007 |
| 7166816 |
Inductively-coupled torodial plasma source |
Jan. 23, 2007 |
| 7141755 |
Accelerated weathering test method |
Nov. 28, 2006 |
| 7141756 |
Microwave plasma processing apparatus, plasma ignition method, plasma forming method, and plasma processing method |
Nov. 28, 2006 |
| 7141757 |
Plasma reactor with overhead RF source power electrode having a resonance that is virtually pressure independent |
Nov. 28, 2006 |
| 7132621 |
Plasma catalyst |
Nov. 7, 2006 |
| 7084369 |
Harmonic multiplexer |
Aug. 1, 2006 |
| 7019253 |
Electrically controlled plasma uniformity in a high density plasma source |
Mar. 28, 2006 |
| 7015415 |
Higher power density downstream plasma |
Mar. 21, 2006 |
| 7015414 |
Method and apparatus for determining plasma impedance |
Mar. 21, 2006 |
| 7015413 |
Plasma generation system having a refractor |
Mar. 21, 2006 |
| 6924455 |
Integrated plasma chamber and inductively-coupled toroidal plasma source |
Aug. 2, 2005 |
| 6919525 |
Thermal management components |
Jul. 19, 2005 |
| 6914208 |
Method for semiconductor wafer etching |
Jul. 5, 2005 |
| 6894298 |
Arrangement for generating extreme ultraviolet (EUV) radiation based on a gas discharge |
May. 17, 2005 |
| 6891123 |
Plasma ignition method and apparatus |
May. 10, 2005 |
| 6878898 |
Method for improving ash rate uniformity in photoresist ashing process equipment |
Apr. 12, 2005 |
| 6855908 |
Glass substrate and leveling thereof |
Feb. 15, 2005 |
| 6838635 |
Plasma reactor with overhead RF electrode tuned to the plasma |
Jan. 4, 2005 |
| 6831258 |
Heating device, method for evaluating heating device and pattern forming method |
Dec. 14, 2004 |
| 6825437 |
Apparatus enabling particle detection utilizing wide view lens |
Nov. 30, 2004 |
| 6800830 |
Chemistry for boron diffusion barrier layer and method of application in semiconductor device fabrication |
Oct. 5, 2004 |
| 6797913 |
Treatment of fluorocarbon feedstocks |
Sep. 28, 2004 |
| 6768079 |
Susceptor with built-in plasma generation electrode and manufacturing method therefor |
Jul. 27, 2004 |
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