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Class Information
Number: 219/121.41
Name: Electric heating > Metal heating (e.g., resistance heating) > By arc > Using plasma > Cutting > Etching > Methods
Description: Subject matter relating to the process of eroding and abrading a workpiece with a plasma torch.










Patents under this class:
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Patent Number Title Of Patent Date Issued
8680424 Microwave plasma processing device Mar. 25, 2014
8629370 Assembly for delivering RF power and DC voltage to a plasma processing chamber Jan. 14, 2014
8604398 Microwave purification process Dec. 10, 2013
8558134 Plasma processing apparatus and plasma processing method Oct. 15, 2013
8497447 Production installation and method for joining parts Jul. 30, 2013
8395081 Method and monitoring device for welding by means of a positioning device Mar. 12, 2013
8373086 Plasma processing apparatus and method for plasma processing Feb. 12, 2013
8328981 Method for heating a focus ring in a plasma apparatus by high frequency power while no plasma being generated Dec. 11, 2012
8153926 Etching method and system Apr. 10, 2012
8124906 Method and apparatus for processing metal bearing gases Feb. 28, 2012
8124907 Load lock chamber with decoupled slit valve door seal compartment Feb. 28, 2012
8093529 Control method of a temperature of a sample Jan. 10, 2012
8039772 Microwave resonance plasma generating apparatus and plasma processing system having the same Oct. 18, 2011
8035055 Electrode for a contact start plasma arc torch and contact start plasma arc torch employing such electrodes Oct. 11, 2011
8008596 Plasma processing apparatus and electrode used therein Aug. 30, 2011
7964818 Method and apparatus for photomask etching Jun. 21, 2011
7939778 Plasma processing chamber with guard ring for upper electrode assembly May. 10, 2011
7922925 Method and device for removing layers in some areas of glass plates Apr. 12, 2011
7812278 Method for testing plasma reactor multi-frequency impedance match networks Oct. 12, 2010
7804040 Physical vapor deposition plasma reactor with arcing suppression Sep. 28, 2010
7750574 Method of generating discharge plasma Jul. 6, 2010
7728253 Nano-particle trap using a microplasma Jun. 1, 2010
7728252 Etching method and system Jun. 1, 2010
7718932 Electrostatic chuck having radial temperature control capability May. 18, 2010
7714248 Microwave plasma generator May. 11, 2010
7683289 Apparatus and method for controlling plasma density profile Mar. 23, 2010
7638727 Plasma-assisted heat treatment Dec. 29, 2009
7625494 Plasma etching method and plasma etching unit Dec. 1, 2009
7608798 Plasma catalyst Oct. 27, 2009
7592564 Plasma generation and processing with multiple radiation sources Sep. 22, 2009
7586099 Vacuum plasma generator Sep. 8, 2009
7582845 Microwave plasma processing device and plasma processing gas supply member Sep. 1, 2009
7569790 Method and apparatus for processing metal bearing gases Aug. 4, 2009
7560657 Plasma-assisted processing in a manufacturing line Jul. 14, 2009
7554053 Corrugated plasma trap arrangement for creating a highly efficient downstream microwave plasma system Jun. 30, 2009
7541558 Inductively-coupled toroidal plasma source Jun. 2, 2009
7485827 Plasma generator Feb. 3, 2009
7482550 Quartz guard ring Jan. 27, 2009
7468494 Reaction enhancing gas feed for injecting gas into a plasma chamber Dec. 23, 2008
7399943 Apparatus for metal plasma vapor deposition and re-sputter with source and bias power frequencies applied through the workpiece Jul. 15, 2008
7372059 Plasma-based EUV light source May. 13, 2008
7355143 Circuit board production method and its apparatus Apr. 8, 2008
7326872 Multi-frequency dynamic dummy load and method for testing plasma reactor multi-frequency impedance match networks Feb. 5, 2008
7313262 Apparatus for visualization of process chamber conditions Dec. 25, 2007
7312415 Plasma method with high input power Dec. 25, 2007
7304263 Systems and methods utilizing an aperture with a reactive atom plasma torch Dec. 4, 2007
7227097 Plasma generation and processing with multiple radiation sources Jun. 5, 2007
7223945 Substrate heating method, substrate heating system, and applying developing system May. 29, 2007
7199327 Method and system for arc suppression in a plasma processing system Apr. 3, 2007
7193173 Reducing plasma ignition pressure Mar. 20, 2007

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