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Class Information
Number: 219/121.15
Name: Electric heating > Metal heating (e.g., resistance heating) > By arc > Using electron beam > Deposition (e.g., sputtering)
Description: Subject matter wherein an electron beam impinges on a workpiece to evaporate material therefrom.










Patents under this class:
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Patent Number Title Of Patent Date Issued
8452073 Closed-loop process control for electron beam freeform fabrication and deposition processes May. 28, 2013
7674997 Spinner for fiberizing glass and method Mar. 9, 2010
7168935 Solid freeform fabrication apparatus and methods Jan. 30, 2007
7025863 Vacuum system with separable work piece support Apr. 11, 2006
6608277 Automated brachytherapy seed production system Aug. 19, 2003
6476340 Electron beam gun with grounded shield to prevent arc-down and gas bleed to protect the filament Nov. 5, 2002
6471781 Method of depositing titanium nitride thin film and CVD deposition apparatus Oct. 29, 2002
6444086 Device for vacuum coating slide bearings Sep. 3, 2002
6403916 System and automated method for producing welded end closures in thin-walled metal tubes Jun. 11, 2002
6384367 Electron beam vaporizer for vacuum coating systems May. 7, 2002
6364956 Programmable flux gradient apparatus for co-deposition of materials onto a substrate Apr. 2, 2002
5869801 Device for manual electron beam processing of materials in space Feb. 9, 1999
5861599 Rod-fed electron beam evaporation system Jan. 19, 1999
5846330 Gas injection disc assembly for CVD applications Dec. 8, 1998
5780803 Process for the stabilization of plasma generation by means of electron beam vaporizer Jul. 14, 1998
5635087 Apparatus for plasma-assisted high rate electron beam vaporization Jun. 3, 1997
5552675 High temperature reaction apparatus Sep. 3, 1996
5503725 Method and device for treatment of products in gas-discharge plasma Apr. 2, 1996
5473627 UHV rotating fluid delivery system Dec. 5, 1995
5418348 Electron beam source assembly May. 23, 1995
5346554 Apparatus for forming a thin film Sep. 13, 1994
5306447 Method and apparatus for direct use of low pressure vapor from liquid or solid precursors for selected area laser deposition Apr. 26, 1994
5277938 Method for controlling evaporation for vapor deposition Jan. 11, 1994
5170032 Radiation manufacturing apparatus and amendment Dec. 8, 1992
5132506 Vacuum evaporation apparatus and method for making vacuum evaporated sheet Jul. 21, 1992
5122389 Vacuum evaporation method and apparatus Jun. 16, 1992
5120925 Methods for device transplantation Jun. 9, 1992
5103766 Vacuum arc vapor deposition device having electrode switching means Apr. 14, 1992
5064989 Surface shaping and finishing apparatus and method Nov. 12, 1991
5041712 Method for the control of an evaporation process Aug. 20, 1991
5039836 Radiation manufacturing apparatus and method Aug. 13, 1991
5034590 Electron gun arrangement for use in the electron beam evaporation process Jul. 23, 1991
5012064 Electron beam evaporation source Apr. 30, 1991
5008897 Water cooled crucible Apr. 16, 1991
5001403 Method and apparatus for centering an electron beam Mar. 19, 1991
4983806 Method and device for cooling electron beam gun Jan. 8, 1991
4958059 Electronic bombardment evaporator equipped with means to recover backscattered electrons Sep. 18, 1990
4944245 Crucible cover for coating installation with an electron beam source Jul. 31, 1990
4866239 Vapor source assembly with crucible Sep. 12, 1989
4853514 Beam apparatus and method Aug. 1, 1989
4820900 Vacuum plasma spray system with sealed manipulator Apr. 11, 1989
4820898 Ion beam apparatus for finishing patterns Apr. 11, 1989
4778974 Electron beam line evaporator Oct. 18, 1988
4724796 Vaporization arrangement with a rectangular vaporization crucible and several electron guns Feb. 16, 1988
4632059 Evaporator device for the evaporation of several materials Dec. 30, 1986
4620081 Self-contained hot-hollow cathode gun source assembly Oct. 28, 1986
4561382 Vacuum vapor deposition gun assembly Dec. 31, 1985
4516525 Electron gun equipment for vacuum deposition May. 14, 1985
4386578 High velocity metallic mass increment vacuum deposit gun Jun. 7, 1983
4281030 Implantation of vaporized material on melted substrates Jul. 28, 1981

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