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Class Information
Number: 216/99
Name: Etching a substrate: processes > Nongaseous phase etching of substrate > Etching inorganic substrate > Substrate contains silicon or silicon compound
Description: Process wherein the substrate contains silicon in either elemental form or combined form.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7591959 |
Etchants and etchant systems with plural etch selectivities |
Sep. 22, 2009 |
| 7591958 |
Thin glass chip for an electronic component and manufacturing method |
Sep. 22, 2009 |
| 7581645 |
Method for manufacturing carbon nanotubes with desired length |
Sep. 1, 2009 |
| 7582219 |
Method of fabricating reflective mirror by wet-etch using improved mask pattern and reflective mirror fabricated using the same |
Sep. 1, 2009 |
| 7582221 |
Wafer manufacturing method, polishing apparatus, and wafer |
Sep. 1, 2009 |
| 7578889 |
Methodology for cleaning of surface metal contamination from electrode assemblies |
Aug. 25, 2009 |
| 7578943 |
Liquid discharge head and producing method therefor |
Aug. 25, 2009 |
| 7572661 |
Method for manufacturing a micromechanical sensor element |
Aug. 11, 2009 |
| 7569412 |
Method for manufacturing a diaphragm sensor |
Aug. 4, 2009 |
| 7569491 |
Method for enlarging a nano-structure |
Aug. 4, 2009 |
| 7560036 |
System and method for drug delivery and microfluidic applications using microneedles |
Jul. 14, 2009 |
| 7540968 |
Micro movable device and method of making the same using wet etching |
Jun. 2, 2009 |
| 7524767 |
Method for manufacturing a micro-electro-mechanical structure |
Apr. 28, 2009 |
| 7524430 |
Fluid ejection device structures and methods therefor |
Apr. 28, 2009 |
| 7501072 |
Etching solution comprising hydrofluoric acid |
Mar. 10, 2009 |
| 7479232 |
Method for producing a semiconductor component and a semiconductor component produced according to the method |
Jan. 20, 2009 |
| 7479461 |
Method of etching silicon anisotropically |
Jan. 20, 2009 |
| 7468323 |
Method of forming high aspect ratio structures |
Dec. 23, 2008 |
| 7456113 |
Cleaning method and solution for cleaning a wafer in a single wafer process |
Nov. 25, 2008 |
| 7442319 |
Poly etch without separate oxide decap |
Oct. 28, 2008 |
| 7442317 |
Method of forming a nozzle rim |
Oct. 28, 2008 |
| 7439183 |
Method of manufacturing a semiconductor device, and a semiconductor substrate |
Oct. 21, 2008 |
| 7416984 |
Method of producing a MEMS device |
Aug. 26, 2008 |
| 7416674 |
Method for fabricating micro optical elements using CMP |
Aug. 26, 2008 |
| 7405165 |
Dual-tank etch method for oxide thickness control |
Jul. 29, 2008 |
| 7399430 |
Method for manufacturing phosphor, phosphor and plasma display panel |
Jul. 15, 2008 |
| 7396483 |
Uniform chemical etching method |
Jul. 8, 2008 |
| 7396484 |
Methods of fabricating complex blade geometries from silicon wafers and strengthening blade geometries |
Jul. 8, 2008 |
| 7390745 |
Pattern enhancement by crystallographic etching |
Jun. 24, 2008 |
| 7387742 |
Silicon blades for surgical and non-surgical use |
Jun. 17, 2008 |
| 7384486 |
Chamber cleaning method |
Jun. 10, 2008 |
| 7381340 |
Ink jet printhead that incorporates an etch stop layer |
Jun. 3, 2008 |
| 7365012 |
Etching method, a method of forming a trench isolation structure, a semiconductor substrate and a semiconductor apparatus |
Apr. 29, 2008 |
| 7362488 |
Tiltable-body apparatus, and method of fabricating the same |
Apr. 22, 2008 |
| 7354523 |
Methods for sidewall etching and etching during filling of a trench |
Apr. 8, 2008 |
| 7344652 |
Plasma etching method |
Mar. 18, 2008 |
| 7338610 |
Etching method for manufacturing semiconductor device |
Mar. 4, 2008 |
| 7322104 |
Method for producing an ink jet head |
Jan. 29, 2008 |
| 7316981 |
Method of removing silicon from a substrate |
Jan. 8, 2008 |
| 7306637 |
Anionic abrasive particles treated with positively charged polyelectrolytes for CMP |
Dec. 11, 2007 |
| 7306744 |
Method of manufacturing a nozzle plate |
Dec. 11, 2007 |
| 7300598 |
Substrate processing method and apparatus |
Nov. 27, 2007 |
| 7294279 |
Method for releasing a micromechanical structure |
Nov. 13, 2007 |
| 7279424 |
Method for fabricating thin film magnetic heads using CMP with polishing stop layer |
Oct. 9, 2007 |
| 7277214 |
Tiltable-body apparatus, and method of fabricating the same |
Oct. 2, 2007 |
| 7270763 |
Anisotropic wet etching of silicon |
Sep. 18, 2007 |
| 7255800 |
Wet etching process |
Aug. 14, 2007 |
| 7255801 |
Deep submicron CMOS compatible suspending inductor |
Aug. 14, 2007 |
| 7247248 |
Method of forming atomic force microscope tips |
Jul. 24, 2007 |
| 7247247 |
Selective etching method |
Jul. 24, 2007 |
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