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Class Information
Number: 216/99
Name: Etching a substrate: processes > Nongaseous phase etching of substrate > Etching inorganic substrate > Substrate contains silicon or silicon compound
Description: Process wherein the substrate contains silicon in either elemental form or combined form.










Patents under this class:
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Patent Number Title Of Patent Date Issued
8703005 Methods for removing dielectric materials Apr. 22, 2014
8685269 Laser processing method Apr. 1, 2014
8673164 Simple method to fabricate nano-porous diamond membranes Mar. 18, 2014
8673168 Method for producing silicon fine particles and method for controlling particle diameter of silicon fine particles Mar. 18, 2014
8673788 Method of forming a layer on a semiconductor substrate having a plurality of trenches Mar. 18, 2014
8673167 Laser processing method Mar. 18, 2014
8664022 Submount for light emitting diode and method for fabricating the same Mar. 4, 2014
8663487 Method for manufacturing crystal oscillator Mar. 4, 2014
8658544 Method for texturing silicon surfaces and wafers thereof Feb. 25, 2014
8656936 Barrier structure and nozzle device for use in tools used to process microelectronic workpieces with one or more treatment fluids Feb. 25, 2014
8652345 Method of forming a patterned substrate Feb. 18, 2014
8647526 Two component etching Feb. 11, 2014
8637409 Etching method, method for manufacturing semiconductor device, and etching device Jan. 28, 2014
8632691 Interface treatment method for germanium-based device Jan. 21, 2014
8628674 Method for trimming a structure obtained by the assembly of two plates Jan. 14, 2014
8609221 Alternating self-assembling morphologies of diblock copolymers controlled by variations in surfaces Dec. 17, 2013
8585918 Method of etching a silicon-based material Nov. 19, 2013
8585910 Process of making a microtube and microfluidic devices formed therewith Nov. 19, 2013
8580158 Methods of removing silicon dioxide Nov. 12, 2013
8580696 Systems and methods for detecting watermark formations on semiconductor wafers Nov. 12, 2013
8562855 Silicon etching liquid and etching method Oct. 22, 2013
8563440 Method for chemically treating a substrate Oct. 22, 2013
8540891 Etching pastes for silicon surfaces and layers Sep. 24, 2013
8535544 Structure and method to form nanopore Sep. 17, 2013
8523426 One-piece regulating member and method of manufacturing the same Sep. 3, 2013
8524103 Method for manufacturing susceptor Sep. 3, 2013
8518279 Method and system for providing a laser cavity for an energy assisted magnetic recording head Aug. 27, 2013
8518275 Graphoepitaxial self-assembly of arrays of downward facing half-cylinders Aug. 27, 2013
8512587 Highly selective doped oxide etchant Aug. 20, 2013
8512588 Method of fabricating a scalable nanoporous membrane filter Aug. 20, 2013
8513125 Manufacturing a microelectronic device comprising silicon and germanium nanowires integrated on a same substrate Aug. 20, 2013
8506832 Wafer dividing apparatus and methods Aug. 13, 2013
8497215 Edge deletion of thin-layer solar modules by etching Jul. 30, 2013
8491809 Process for production of aluminum wheel Jul. 23, 2013
8486282 Acid chemistries and methodologies for texturing transparent conductive oxide materials Jul. 16, 2013
8475666 Method for making toughening agent materials Jul. 2, 2013
8466067 Post-planarization densification Jun. 18, 2013
8465662 Composition for wet etching of silicon dioxide Jun. 18, 2013
8461057 Process for the rough-etching of silicon solar cells Jun. 11, 2013
8460561 Crystal oscillator piece and method for manufacturing the same Jun. 11, 2013
8455268 Gate replacement with top oxide regrowth for the top oxide improvement Jun. 4, 2013
8454844 Microneedle structure and production method therefor Jun. 4, 2013
8440573 Method and apparatus for pattern collapse free wet processing of semiconductor devices May. 14, 2013
8435900 Method for manufacturing a transistor May. 7, 2013
8415254 Method for removing dummy poly in a gate last process Apr. 9, 2013
8409449 Registered structure formation via the application of directed thermal energy to diblock copolymer films Apr. 2, 2013
8404124 Alternating self-assembling morphologies of diblock copolymers controlled by variations in surfaces Mar. 26, 2013
8398867 Video rate-enabling probes for atomic force microscopy Mar. 19, 2013
8366954 Solution for increasing wafer sheet resistance and/or photovoltaic cell power density level Feb. 5, 2013
8349739 Conformal etch material and process Jan. 8, 2013

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