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Class Information
Number: 216/96
Name: Etching a substrate: processes > Nongaseous phase etching of substrate > Etching inorganic substrate
Description: Process wherein at least one of layers of the substrate contains inorganic material.

Sub-classes under this class:

Class Number Class Name Patents
216/100 Substrate contains elemental metal, alloy thereof, or metal compound 617
216/99 Substrate contains silicon or silicon compound 754
216/97 Substrate is glass 367

Patents under this class:
1 2 3 4 5 6

Patent Number Title Of Patent Date Issued
6177358 Photo-stimulated etching of CaF2 Jan. 23, 2001
6114044 Method of drying passivated micromachines by dewetting from a liquid-based process Sep. 5, 2000
6100203 Methods of employing aqueous cleaning compositions in manufacturing microelectronic devices Aug. 8, 2000
6093331 Backside silicon removal for face down chip analysis Jul. 25, 2000
6074570 Method of marking using encapsulated etchant Jun. 13, 2000
6048406 Benign method for etching silicon dioxide Apr. 11, 2000
6042739 Etchant and method for etching chalcogenide glass and optical member having smooth surface Mar. 28, 2000
6030514 Method of reducing sputtering burn-in time, minimizing sputtered particulate, and target assembly therefor Feb. 29, 2000
6022485 Method for controlled removal of material from a solid surface Feb. 8, 2000
6010637 Method and apparatus for preparing a sample for optical analysis and method of controlling the apparatus Jan. 4, 2000
5980765 Method of manufacturing composite ceramics balls for ball-point pens Nov. 9, 1999
5904545 Apparatus for fabricating self-assembling microstructures May. 18, 1999
5901032 Method of producing aluminum foil for electrolytic capacitors and product thereof May. 4, 1999
5883012 Method of etching a trench into a semiconductor substrate Mar. 16, 1999
5846444 Surface treatment of glass Dec. 8, 1998
5833871 Method of finishing the surface of a floating type magnetic head Nov. 10, 1998
5821170 Method for etching an insulating material Oct. 13, 1998
5804314 Silicon microstructures and process for their fabrication Sep. 8, 1998
5795494 Semiconductor substrate cleaning method and semiconductor device fabrication method Aug. 18, 1998
5766499 Method of making a circuitized substrate Jun. 16, 1998
5756403 Method of preferentially etching a semiconductor substrate with respect to epitaxial layers May. 26, 1998
5753134 Method for producing a layer with reduced mechanical stresses May. 19, 1998
5746931 Method and apparatus for chemical-mechanical polishing of diamond May. 5, 1998
5715133 Method of producing aluminum foil for electrolytic capacitors and product thereof Feb. 3, 1998
5683592 Surgical cutting tool Nov. 4, 1997
5681484 Etching to form cross-over, non-intersecting channel networks for use in partitioned microelectronic and fluidic device arrays for clinical diagnostics and chemical synthesis Oct. 28, 1997
5681426 Diamond-like carbon wet etchant stop for formation of magnetic transducers Oct. 28, 1997
5670062 Method for producing tapered lines Sep. 23, 1997
5665252 Method of shaping a polycrystalline diamond body Sep. 9, 1997
5643474 Thermal barrier coating removal on flat and contoured surfaces Jul. 1, 1997
5641381 Preferentially etched epitaxial liftoff of InP material Jun. 24, 1997
5637236 Method for producing a wall, roadway, sidewalk or floor of cementitious material Jun. 10, 1997
5603848 Method for etching through a substrate to an attached coating Feb. 18, 1997
5558905 Method of making a pyroelectric film sensing device Sep. 24, 1996
5536360 Method for etching boron nitride Jul. 16, 1996
5520298 Method of decorating concrete May. 28, 1996
5512131 Formation of microstamped patterns on surfaces and derivative articles Apr. 30, 1996
5509555 Method for producing an article by pressureless reactive infiltration Apr. 23, 1996
5486263 Etching a diamond body with a molten or partially molten metal Jan. 23, 1996
5328550 Thinning a diamond body by means of molten rare-earth-containing alloys Jul. 12, 1994
4941942 Method of manufacturing a mask support of sic for x-ray lithography masks Jul. 17, 1990
4936649 Damage evaluation system and method using optical fibers Jun. 26, 1990
4538347 Method for making a varistor package Sep. 3, 1985
4530734 Low energy ion etching Jul. 23, 1985
4416724 Method for producing insulator surfaces Nov. 22, 1983
4376673 Method for etching dental porcelain Mar. 15, 1983
4276186 Cleaning composition and use thereof Jun. 30, 1981
4163769 High thermal conductivity substrate Aug. 7, 1979
4118270 Micro lens formation at optical fiber ends Oct. 3, 1978
4097618 Method of transferring a surface relief pattern from a poly(1-methyl-1-cyclopropene sulfone) layer to a non-metallic inorganic layer Jun. 27, 1978

1 2 3 4 5 6

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