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Class Information
Number: 216/96
Name: Etching a substrate: processes > Nongaseous phase etching of substrate > Etching inorganic substrate
Description: Process wherein at least one of layers of the substrate contains inorganic material.

Sub-classes under this class:

Class Number Class Name Patents
216/100 Substrate contains elemental metal, alloy thereof, or metal compound 617
216/99 Substrate contains silicon or silicon compound 754
216/97 Substrate is glass 367

Patents under this class:
1 2 3 4 5 6

Patent Number Title Of Patent Date Issued
6861122 Ceramic member with fine protrusions on surface and method of producing the same Mar. 1, 2005
6861007 Method for removing organic material from a substrate and for oxidizing oxidizable material thereon Mar. 1, 2005
6858092 Device and process for liquid treatment of wafer-shaped articles Feb. 22, 2005
6858538 Methods and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies Feb. 22, 2005
6852472 Polysilicon hard mask etch defect particle removal Feb. 8, 2005
6843928 Method for removing metal cladding from airfoil substrate Jan. 18, 2005
6837944 Cleaning and drying method and apparatus Jan. 4, 2005
6821794 Flexible snapshot in endpoint detection Nov. 23, 2004
6818031 Polishing composition Nov. 16, 2004
6818142 Potassium hydrogen peroxymonosulfate solutions Nov. 16, 2004
6805949 Method for enhancing adhesion of metal particles to ceramic models Oct. 19, 2004
6797326 Method of making polycrystalline diamond with working surfaces depleted of catalyzing material Sep. 28, 2004
6787056 Planarization method using anisotropic wet etching Sep. 7, 2004
6776918 Titanium composite material Aug. 17, 2004
6758985 Method of removing a ceramic coating Jul. 6, 2004
6749766 Etched metal oxide film Jun. 15, 2004
6720266 Methods and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies Apr. 13, 2004
6666987 Liquid etchant and method for roughening copper surface Dec. 23, 2003
6656241 Silica-based slurry Dec. 2, 2003
6652659 Low species buffered rinsing fluids and method Nov. 25, 2003
6649078 Thin film capillary process and apparatus Nov. 18, 2003
6648933 Powder composition and method for polishing stone Nov. 18, 2003
6638365 Method for obtaining clean silicon surfaces for semiconductor manufacturing Oct. 28, 2003
6638895 Method for fabricating high aspect ratio structures in perovskite material Oct. 28, 2003
6620216 Polishing composition Sep. 16, 2003
6565765 Method for manufacturing a sensor having a membrane May. 20, 2003
6537839 Nitride semiconductor light emitting device and manufacturing method thereof Mar. 25, 2003
6530381 Process for the wet-chemical surface treatment of a semiconductor wafer Mar. 11, 2003
6492273 Methods and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies Dec. 10, 2002
6488729 Polishing composition and method Dec. 3, 2002
6464842 Control of solid state dimensional features Oct. 15, 2002
6464893 Process for preparation of thin metallic foils and organic thin-film-metal structures Oct. 15, 2002
6454953 Solid electrolytic capacitor and method for producing the same Sep. 24, 2002
6454820 Polishing composition Sep. 24, 2002
6451451 Mask, and method and apparatus for making it Sep. 17, 2002
6444140 Micro-etch solution for producing metal surface topography Sep. 3, 2002
6444083 Corrosion resistant component of semiconductor processing equipment and method of manufacturing thereof Sep. 3, 2002
6436612 Method for forming a protection device with slope laterals Aug. 20, 2002
6413437 Fine featured photo-resist artwork design for chemical milling Jul. 2, 2002
6358564 Process for refinish coating of porcelain and ceramic substrates Mar. 19, 2002
6352647 Mask, and method and apparatus for making it Mar. 5, 2002
6348159 Method and apparatus for etching coated substrates Feb. 19, 2002
6337029 Method and composition for etching glass ceramic and porcelain surfaces Jan. 8, 2002
6322712 Buffer layer in flat panel display Nov. 27, 2001
6319419 Method of manufacturing member for thin-film formation apparatus and the member for the apparatus Nov. 20, 2001
6245250 Process vessel Jun. 12, 2001
6238743 Method of removing a thermal barrier coating May. 29, 2001
6217787 Method of removing and/or applying conductive material Apr. 17, 2001
6214250 Multilayer, temperature resistant, composite label Apr. 10, 2001
6184153 Semiconductor material produced by improved etch process which protects metal Feb. 6, 2001

1 2 3 4 5 6

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