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Class Information
Number: 216/96
Name: Etching a substrate: processes > Nongaseous phase etching of substrate > Etching inorganic substrate
Description: Process wherein at least one of layers of the substrate contains inorganic material.

Sub-classes under this class:

Class Number Class Name Patents
216/100 Substrate contains elemental metal, alloy thereof, or metal compound 617
216/99 Substrate contains silicon or silicon compound 754
216/97 Substrate is glass 367

Patents under this class:
1 2 3 4 5 6

Patent Number Title Of Patent Date Issued
7513986 Method and device for locally removing coating from parts Apr. 7, 2009
7497960 Method for manufacturing a filter Mar. 3, 2009
7491341 Method of making tapered capillary tips with constant inner diameters Feb. 17, 2009
7482052 Method for processing by laser, apparatus for processing by laser, and three-dimensional structure Jan. 27, 2009
7442323 Potassium monopersulfate solutions Oct. 28, 2008
7429337 Method for removing at least one area of a layer of a component consisting of metal or a metal compound Sep. 30, 2008
7422696 Multicomponent nanorods Sep. 9, 2008
7416681 Etching solution for multiple layer of copper and molybdenum and etching method using the same Aug. 26, 2008
7399430 Method for manufacturing phosphor, phosphor and plasma display panel Jul. 15, 2008
7396477 Method for manufacturing a thermal interface material Jul. 8, 2008
7384486 Chamber cleaning method Jun. 10, 2008
7368065 Implants with textured surface and methods for producing the same May. 6, 2008
7344998 Wafer recovering method, wafer, and fabrication method Mar. 18, 2008
7341681 Method of manufacturing optical fiber probe and for finishing micro material Mar. 11, 2008
7329365 Etchant composition for indium oxide layer and etching method using the same Feb. 12, 2008
7309449 Substrate processing method Dec. 18, 2007
7303600 Unexpanded perlite ore polishing composition and methods Dec. 4, 2007
7291283 Combined wet etching method for stacked films and wet etching system used for same Nov. 6, 2007
7279765 Transparent electrode made from indium-zinc-oxide and etchant for etching the same Oct. 9, 2007
7276367 Method of etching islands of cells in a grid pattern Oct. 2, 2007
7261827 Method of processing end portions of optical fibers and optical fibers having their end portions processed Aug. 28, 2007
7238295 Regeneration process of etching solution, etching process, and etching system Jul. 3, 2007
7226513 Silicon wafer cleaning method Jun. 5, 2007
7192489 Method for polymer residue removal following metal etching Mar. 20, 2007
7192885 Method for texturing surfaces of silicon wafers Mar. 20, 2007
7169315 Method of producing an aluminium surface with a high total reflectance Jan. 30, 2007
7163897 Method for assaying elements in a substrate for optics, electronics, or optoelectronics Jan. 16, 2007
7157015 Method of manufacturing a substrate with concave portions, a substrate with concave portions, a substrate with concave portions for microlenses, a microlens substrate, a transmission screen an Jan. 2, 2007
7141179 Monitoring semiconductor wafer defects below one nanometer Nov. 28, 2006
7138066 Gear surface treatment procedure Nov. 21, 2006
7138069 Method of surface-finishing stainless steel after descaling Nov. 21, 2006
7128843 Process for fabricating monolithic membrane substrate structures with well-controlled air gaps Oct. 31, 2006
7115193 Sputtering target producing very few particles, backing plate or apparatus within sputtering device and roughening method by electric discharge machining Oct. 3, 2006
7112530 Method of forming contact hole Sep. 26, 2006
7108813 Gas/ion species selective membrane supported by multi-stage nano-hole array metal structure Sep. 19, 2006
7097783 Method for inspecting a titanium-based component Aug. 29, 2006
7083741 Process and device for the wet-chemical treatment of silicon Aug. 1, 2006
7084072 Method of manufacturing semiconductor device Aug. 1, 2006
7056447 Semiconductor processing methods Jun. 6, 2006
7030033 Method for manufacturing circuit devices Apr. 18, 2006
7026255 Method and device for photo-electrochemically etching a semiconductor sample, especially gallium nitride Apr. 11, 2006
7022244 Method and apparatus for generation of fine particles Apr. 4, 2006
7022251 Methods for forming a conductor on a dielectric Apr. 4, 2006
7018556 Method to etch chrome deposited on calcium fluoride object Mar. 28, 2006
7014784 Methods and apparatus for printing conductive thickfilms over thickfilm dielectrics Mar. 21, 2006
6955586 CMP composition and process Oct. 18, 2005
6949470 Method for manufacturing circuit devices Sep. 27, 2005
6918938 Polishing composition Jul. 19, 2005
6902626 Method for roughening copper surface Jun. 7, 2005
6861098 Polycrystalline diamond partially depleted of catalyzing material Mar. 1, 2005

1 2 3 4 5 6

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