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Class Information
Number: 216/96
Name: Etching a substrate: processes > Nongaseous phase etching of substrate > Etching inorganic substrate
Description: Process wherein at least one of layers of the substrate contains inorganic material.

Sub-classes under this class:

Class Number Class Name Patents
216/100 Substrate contains elemental metal, alloy thereof, or metal compound 617
216/99 Substrate contains silicon or silicon compound 754
216/97 Substrate is glass 367

Patents under this class:
1 2 3 4 5 6

Patent Number Title Of Patent Date Issued
8257606 Ceramic body and process for the preparation thereof Sep. 4, 2012
8246847 Separating method for conductive ceramics sintered body Aug. 21, 2012
8236190 Recast removal method Aug. 7, 2012
8231796 Method and system for providing a magnetic recording transducer having side shields Jul. 31, 2012
8226841 Polishing composition for nickel-phosphorous memory disks Jul. 24, 2012
8221640 Method of dissolving the solids formed in a nuclear plant Jul. 17, 2012
8202443 Method of manufacturing a capacitor Jun. 19, 2012
8177988 Method for manufacturing liquid discharge head May. 15, 2012
8147704 Wide area stamp for antireflective surface Apr. 3, 2012
8148246 Method for separating semiconductor layer from substrate Apr. 3, 2012
8143172 Printable etching media for silicon dioxide and silicon nitride layers Mar. 27, 2012
8048322 Method for manufacturing thermal interface material having carbon nanotubes Nov. 1, 2011
8048331 Etching composition and etching process Nov. 1, 2011
8043517 Method of forming openings in substrates and inkjet printheads fabricated thereby Oct. 25, 2011
8038894 Method of selectively stripping an engine-run ceramic coating Oct. 18, 2011
8029686 Method of fabricating an ink jet nozzle with a heater element Oct. 4, 2011
8021491 Method for selectively removing coatings from metal substrates Sep. 20, 2011
7988876 Method for reducing and homogenizing the thickness of a semiconductor layer which lies on the surface of an electrically insulating material Aug. 2, 2011
7981258 Thin-film shape memory alloy device and method Jul. 19, 2011
7981286 Substrate processing apparatus and method of removing particles Jul. 19, 2011
7972570 Distributor nozzle for a two-phase charge in fixed-bed reactors Jul. 5, 2011
7972653 Method for removing amorphous carbon coatings with oxidizing molten salts and coated member regeneration method Jul. 5, 2011
7964106 Method for fabricating a packaging substrate Jun. 21, 2011
7955440 Method for cleaning silicon wafer and apparatus for cleaning the silicon wafer Jun. 7, 2011
7923118 Etching tape and method of fabricating array substrate for liquid crystal display using the same Apr. 12, 2011
7887736 Superhydrophobic polymer fabrication Feb. 15, 2011
7883628 Method of reducing the surface roughness of a semiconductor wafer Feb. 8, 2011
7875200 Method for a repair process Jan. 25, 2011
7851372 Composition for removing an insulation material, method of removing an insulation layer and method of recycling a substrate using the same Dec. 14, 2010
7820099 Hot rolled steel sheet excellent in chemical convertibility and method of production of the same Oct. 26, 2010
7785669 Method for making high-density carbon nanotube array Aug. 31, 2010
7776228 Catalyst-aided chemical processing method Aug. 17, 2010
7754114 Methods for manufacturing optical fiber probe and for processing micromaterial Jul. 13, 2010
7727411 Manufacturing method of substrate for ink jet head and manufacturing method of ink jet recording head Jun. 1, 2010
7722779 Method and etchant for removing glass-coating from metal wires May. 25, 2010
7704402 Optical element manufacturing method, optical element, Nipkow disk, confocal optical system and 3-D measurement device Apr. 27, 2010
7691280 Ink jet printing of etchants and modifiers Apr. 6, 2010
7666238 Polishing composition Feb. 23, 2010
7666320 Manufacturing method of printed wiring board as well as copper-clad laminate and treatment solutions used therefor Feb. 23, 2010
7628932 Wet etch suitable for creating square cuts in si Dec. 8, 2009
7629257 Combined etching and doping substances Dec. 8, 2009
7581645 Method for manufacturing carbon nanotubes with desired length Sep. 1, 2009
7582219 Method of fabricating reflective mirror by wet-etch using improved mask pattern and reflective mirror fabricated using the same Sep. 1, 2009
7578889 Methodology for cleaning of surface metal contamination from electrode assemblies Aug. 25, 2009
7553345 Polishing composition Jun. 30, 2009
7553428 Method of fabricating spacers and method of installing spacers in flat panel device Jun. 30, 2009
7540968 Micro movable device and method of making the same using wet etching Jun. 2, 2009
7531047 Method of removing residue from a substrate after a DRIE process May. 12, 2009
7524346 Compositions of chemical mechanical planarization slurries contacting noble-metal-featured substrates Apr. 28, 2009
7521001 Surface treatment of concrete Apr. 21, 2009

1 2 3 4 5 6

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