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Class Information
Number: 216/96
Name: Etching a substrate: processes > Nongaseous phase etching of substrate > Etching inorganic substrate
Description: Process wherein at least one of layers of the substrate contains inorganic material.










Sub-classes under this class:

Class Number Class Name Patents
216/100 Substrate contains elemental metal, alloy thereof, or metal compound 617
216/99 Substrate contains silicon or silicon compound 754
216/97 Substrate is glass 367


Patents under this class:
1 2 3 4 5 6

Patent Number Title Of Patent Date Issued
8691019 Process for cleaning a compound semiconductor wafer Apr. 8, 2014
8685260 Conductive polymer electrodes Apr. 1, 2014
8685273 Etching agent for type II InAs/GaInSb superlattice epitaxial materials Apr. 1, 2014
8658049 Method for manufacturing a touch panel Feb. 25, 2014
8658053 Etching composition for metal material and method for manufacturing semiconductor device by using same Feb. 25, 2014
8647526 Two component etching Feb. 11, 2014
8641998 Procedure for obtaining graphene oxide nano-platelets and derivates and graphene oxide non-platelets thus obtained Feb. 4, 2014
8637409 Etching method, method for manufacturing semiconductor device, and etching device Jan. 28, 2014
8632836 Nanosurface Jan. 21, 2014
8632691 Interface treatment method for germanium-based device Jan. 21, 2014
8628674 Method for trimming a structure obtained by the assembly of two plates Jan. 14, 2014
8623231 Method for etching an ultra thin film Jan. 7, 2014
8613864 Methods of forming semiconductor constructions Dec. 24, 2013
8585910 Process of making a microtube and microfluidic devices formed therewith Nov. 19, 2013
8580135 Die and method of manufacturing same Nov. 12, 2013
8580134 Nanotextured cobalt-chromium alloy articles having high wettability and method of producing same Nov. 12, 2013
8580127 Method of manufacturing RFID based thermal bubble type accelerometer Nov. 12, 2013
8580133 Methods of controlling the etching of silicon nitride relative to silicon dioxide Nov. 12, 2013
8562855 Silicon etching liquid and etching method Oct. 22, 2013
8563440 Method for chemically treating a substrate Oct. 22, 2013
8557137 Polishing composition for nickel phosphorous memory disks Oct. 15, 2013
8535507 Electrochemical drilling system and process for improving electrical porosity of etched anode foil Sep. 17, 2013
8535544 Structure and method to form nanopore Sep. 17, 2013
8518279 Method and system for providing a laser cavity for an energy assisted magnetic recording head Aug. 27, 2013
8513125 Manufacturing a microelectronic device comprising silicon and germanium nanowires integrated on a same substrate Aug. 20, 2013
8512587 Highly selective doped oxide etchant Aug. 20, 2013
8512578 Multi-step release method for electrochemically fabricated structures Aug. 20, 2013
8506767 Thin-film shape memory alloy device and method Aug. 13, 2013
8501029 Micromachined titanium for high pressure microfluidic applications Aug. 6, 2013
8497215 Edge deletion of thin-layer solar modules by etching Jul. 30, 2013
8491809 Process for production of aluminum wheel Jul. 23, 2013
8465662 Composition for wet etching of silicon dioxide Jun. 18, 2013
8454851 Manufacturing method of the flexible display device Jun. 4, 2013
8449784 Method for securing a sheath to a blade May. 28, 2013
8440573 Method and apparatus for pattern collapse free wet processing of semiconductor devices May. 14, 2013
8435900 Method for manufacturing a transistor May. 7, 2013
8414785 Methods for fabrication of microfluidic systems on printed circuit boards Apr. 9, 2013
8394289 Composition for etching treatment of resin molded article Mar. 12, 2013
8383523 Method for texturing silicon wafers, treatment liquid therefor, and use Feb. 26, 2013
8372299 Substrate treating apparatus and substrate treating method Feb. 12, 2013
8361332 Method of forming micro-lenses Jan. 29, 2013
8349739 Conformal etch material and process Jan. 8, 2013
8343873 Method for producing a semiconductor wafer Jan. 1, 2013
8338301 Slurry-free chemical mechanical planarization (CMP) of engineered germanium-on-silicon wafers Dec. 25, 2012
8333801 Method of Forming a Drug-Eluting Medical Device Dec. 18, 2012
8333897 Methods for laser cutting and processing tubing to make medical devices Dec. 18, 2012
8324113 Silicon processing method and silicon substrate with etching mask Dec. 4, 2012
8318606 Dielectric etching Nov. 27, 2012
8313635 Bare aluminum baffles for resist stripping chambers Nov. 20, 2012
8303830 Micro and NANO scale surface textured titanium-containing articles and methods of producing same Nov. 6, 2012

1 2 3 4 5 6










 
 
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