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Class Information
Number: 216/96
Name: Etching a substrate: processes > Nongaseous phase etching of substrate > Etching inorganic substrate
Description: Process wherein at least one of layers of the substrate contains inorganic material.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7581645 |
Method for manufacturing carbon nanotubes with desired length |
Sep. 1, 2009 |
| 7582219 |
Method of fabricating reflective mirror by wet-etch using improved mask pattern and reflective mirror fabricated using the same |
Sep. 1, 2009 |
| 7578889 |
Methodology for cleaning of surface metal contamination from electrode assemblies |
Aug. 25, 2009 |
| 7553345 |
Polishing composition |
Jun. 30, 2009 |
| 7553428 |
Method of fabricating spacers and method of installing spacers in flat panel device |
Jun. 30, 2009 |
| 7540968 |
Micro movable device and method of making the same using wet etching |
Jun. 2, 2009 |
| 7531047 |
Method of removing residue from a substrate after a DRIE process |
May. 12, 2009 |
| 7524346 |
Compositions of chemical mechanical planarization slurries contacting noble-metal-featured substrates |
Apr. 28, 2009 |
| 7521001 |
Surface treatment of concrete |
Apr. 21, 2009 |
| 7513986 |
Method and device for locally removing coating from parts |
Apr. 7, 2009 |
| 7497960 |
Method for manufacturing a filter |
Mar. 3, 2009 |
| 7491341 |
Method of making tapered capillary tips with constant inner diameters |
Feb. 17, 2009 |
| 7482052 |
Method for processing by laser, apparatus for processing by laser, and three-dimensional structure |
Jan. 27, 2009 |
| 7442323 |
Potassium monopersulfate solutions |
Oct. 28, 2008 |
| 7429337 |
Method for removing at least one area of a layer of a component consisting of metal or a metal compound |
Sep. 30, 2008 |
| 7422696 |
Multicomponent nanorods |
Sep. 9, 2008 |
| 7416681 |
Etching solution for multiple layer of copper and molybdenum and etching method using the same |
Aug. 26, 2008 |
| 7399430 |
Method for manufacturing phosphor, phosphor and plasma display panel |
Jul. 15, 2008 |
| 7396477 |
Method for manufacturing a thermal interface material |
Jul. 8, 2008 |
| 7384486 |
Chamber cleaning method |
Jun. 10, 2008 |
| 7368065 |
Implants with textured surface and methods for producing the same |
May. 6, 2008 |
| 7344998 |
Wafer recovering method, wafer, and fabrication method |
Mar. 18, 2008 |
| 7341681 |
Method of manufacturing optical fiber probe and for finishing micro material |
Mar. 11, 2008 |
| 7329365 |
Etchant composition for indium oxide layer and etching method using the same |
Feb. 12, 2008 |
| 7309449 |
Substrate processing method |
Dec. 18, 2007 |
| 7303600 |
Unexpanded perlite ore polishing composition and methods |
Dec. 4, 2007 |
| 7291283 |
Combined wet etching method for stacked films and wet etching system used for same |
Nov. 6, 2007 |
| 7279765 |
Transparent electrode made from indium-zinc-oxide and etchant for etching the same |
Oct. 9, 2007 |
| 7276367 |
Method of etching islands of cells in a grid pattern |
Oct. 2, 2007 |
| 7261827 |
Method of processing end portions of optical fibers and optical fibers having their end portions processed |
Aug. 28, 2007 |
| 7238295 |
Regeneration process of etching solution, etching process, and etching system |
Jul. 3, 2007 |
| 7226513 |
Silicon wafer cleaning method |
Jun. 5, 2007 |
| 7192885 |
Method for texturing surfaces of silicon wafers |
Mar. 20, 2007 |
| 7192489 |
Method for polymer residue removal following metal etching |
Mar. 20, 2007 |
| 7169315 |
Method of producing an aluminium surface with a high total reflectance |
Jan. 30, 2007 |
| 7163897 |
Method for assaying elements in a substrate for optics, electronics, or optoelectronics |
Jan. 16, 2007 |
| 7157015 |
Method of manufacturing a substrate with concave portions, a substrate with concave portions, a substrate with concave portions for microlenses, a microlens substrate, a transmission screen an |
Jan. 2, 2007 |
| 7141179 |
Monitoring semiconductor wafer defects below one nanometer |
Nov. 28, 2006 |
| 7138069 |
Method of surface-finishing stainless steel after descaling |
Nov. 21, 2006 |
| 7138066 |
Gear surface treatment procedure |
Nov. 21, 2006 |
| 7128843 |
Process for fabricating monolithic membrane substrate structures with well-controlled air gaps |
Oct. 31, 2006 |
| 7115193 |
Sputtering target producing very few particles, backing plate or apparatus within sputtering device and roughening method by electric discharge machining |
Oct. 3, 2006 |
| 7112530 |
Method of forming contact hole |
Sep. 26, 2006 |
| 7108813 |
Gas/ion species selective membrane supported by multi-stage nano-hole array metal structure |
Sep. 19, 2006 |
| 7097783 |
Method for inspecting a titanium-based component |
Aug. 29, 2006 |
| 7083741 |
Process and device for the wet-chemical treatment of silicon |
Aug. 1, 2006 |
| 7084072 |
Method of manufacturing semiconductor device |
Aug. 1, 2006 |
| 7056447 |
Semiconductor processing methods |
Jun. 6, 2006 |
| 7030033 |
Method for manufacturing circuit devices |
Apr. 18, 2006 |
| 7026255 |
Method and device for photo-electrochemically etching a semiconductor sample, especially gallium nitride |
Apr. 11, 2006 |
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