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Class Information
Number: 216/95
Name: Etching a substrate: processes > Nongaseous phase etching of substrate > Substrate is multilayered
Description: Process wherein the substrate is plural layered.










Patents under this class:
1 2 3 4

Patent Number Title Of Patent Date Issued
6500354 Inkjet printer head actuator and method for manufacturing the same Dec. 31, 2002
6497827 Method for etching dielectric films Dec. 24, 2002
6468439 Etching of metallic composite articles Oct. 22, 2002
6444083 Corrosion resistant component of semiconductor processing equipment and method of manufacturing thereof Sep. 3, 2002
6436300 Method of manufacturing electronic components Aug. 20, 2002
6426012 Wet chemical etch process for patterning MRAM magnetic layers Jul. 30, 2002
6420099 Tungsten hard mask for dry etching aluminum-containing layers Jul. 16, 2002
6413436 Selective treatment of the surface of a microelectronic workpiece Jul. 2, 2002
6406639 Method of partially forming oxide layer on glass substrate Jun. 18, 2002
6391137 Method for producing display device May. 21, 2002
6383332 Endpoint detection method and apparatus which utilize a chelating agent to detect a polishing endpoint May. 7, 2002
6379577 Hydrogen peroxide and acid etchant for a wet etch process Apr. 30, 2002
6328796 Single-crystal material on non-single-crystalline substrate Dec. 11, 2001
6329302 Removal of a top IC die from a bottom IC die of a multichip IC package with preservation of interconnect Dec. 11, 2001
6322712 Buffer layer in flat panel display Nov. 27, 2001
6261735 Composition and method for removing probing ink and negative photoresist from silicon wafers enclosures Jul. 17, 2001
6258205 Endpoint detection method and apparatus which utilize an endpoint polishing layer of catalyst material Jul. 10, 2001
6254794 Etching solution for etching porous silicon, etching method using the etching solution and method of preparing semiconductor member using the etching solution Jul. 3, 2001
6254791 Multicolored control panel Jul. 3, 2001
6238586 Etching solution for etching porous silicon, etching method using the etching solution and method of preparing semiconductor member using the etching solution May. 29, 2001
6235638 Simplified etching technique for producing multiple undercut profiles May. 22, 2001
6214245 Forming-ink jet nozzle plate layer on a base Apr. 10, 2001
6187216 Method for etching a dielectric layer over a semiconductor substrate Feb. 13, 2001
6171512 Etching solution for etching porous silicon, etching method using the etching solution and method of preparing semiconductor member using the etching solution Jan. 9, 2001
6146543 Microbellows actuator Nov. 14, 2000
6117351 Method for etching dielectric films Sep. 12, 2000
6093331 Backside silicon removal for face down chip analysis Jul. 25, 2000
6086775 Preparation of colored optical fiber for splicing Jul. 11, 2000
6022751 Production of electronic device Feb. 8, 2000
6007695 Selective removal of material using self-initiated galvanic activity in electrolytic bath Dec. 28, 1999
5996212 Method of manufacturing a body having a structure of layers Dec. 7, 1999
5951880 Method for making bump disks Sep. 14, 1999
5932114 Integrated optical module including a waveguide and a photoreception device Aug. 3, 1999
5928529 Composition and method for stripping tin and tin-lead from copper surfaces Jul. 27, 1999
5919379 Copper-foil having a protective layer and copper-clad laminates using same Jul. 6, 1999
5904545 Apparatus for fabricating self-assembling microstructures May. 18, 1999
5904859 Flip chip metallization May. 18, 1999
5879577 Process for wafer peripheral edge defect reduction Mar. 9, 1999
5863838 Method for chemically-mechanically polishing a metal layer Jan. 26, 1999
5849208 Making apparatus for conducting biochemical analyses Dec. 15, 1998
5840205 Method of fabricating specimen for analyzing defects of semiconductor device Nov. 24, 1998
5840204 Method for patterning a layer on oxide superconductor thin film and superconducting device manufactured thereby Nov. 24, 1998
5804083 Method of forming a microstructure Sep. 8, 1998
5785876 Layer construction with an organic layer and a transparent cover layer which is harder than the organ layer and process for its production Jul. 28, 1998
5785879 Multilayer ceramic parts and method for making Jul. 28, 1998
5779929 Thin film metallization for barium nanotitanate substrates Jul. 14, 1998
5707538 Variable gap magnetoresistive transducer and method of making the same Jan. 13, 1998
5705082 Roughening of metal surfaces Jan. 6, 1998
5676850 Micromechanical barb and method for making the same Oct. 14, 1997
5670062 Method for producing tapered lines Sep. 23, 1997

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