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Class Information
Number: 216/95
Name: Etching a substrate: processes > Nongaseous phase etching of substrate > Substrate is multilayered
Description: Process wherein the substrate is plural layered.










Patents under this class:
1 2 3 4

Patent Number Title Of Patent Date Issued
8703005 Methods for removing dielectric materials Apr. 22, 2014
8685755 Combinatorial multidomain mesoporous chips and a method for fractionation, stabilization, and storage of biomolecules Apr. 1, 2014
8641913 Fine pitch microcontacts and method for forming thereof Feb. 4, 2014
8628674 Method for trimming a structure obtained by the assembly of two plates Jan. 14, 2014
8623231 Method for etching an ultra thin film Jan. 7, 2014
8613863 Methods for selective etching of a multi-layer substrate Dec. 24, 2013
8580127 Method of manufacturing RFID based thermal bubble type accelerometer Nov. 12, 2013
8580133 Methods of controlling the etching of silicon nitride relative to silicon dioxide Nov. 12, 2013
8535553 Large-area single- and few-layer graphene on arbitrary substrates Sep. 17, 2013
8529780 Ceramic substrate material, method for the production and use thereof, and antenna or antenna array Sep. 10, 2013
8518281 Acid-resistance promoting composition Aug. 27, 2013
8512587 Highly selective doped oxide etchant Aug. 20, 2013
8491802 Method of forming a dielectric slope for EAMR and magnetic writer Jul. 23, 2013
8486282 Acid chemistries and methodologies for texturing transparent conductive oxide materials Jul. 16, 2013
8435900 Method for manufacturing a transistor May. 7, 2013
8419953 Method and system for removing an antiferromagnetic seed structure Apr. 16, 2013
8404125 Metal processing method, manfacturing method of metal mask and manufacturing method of organic light emitting display device Mar. 26, 2013
8394280 Resist pattern protection technique for double patterning application Mar. 12, 2013
8377324 Methods for removing coatings from a metal component Feb. 19, 2013
8377319 Print head nozzle formation Feb. 19, 2013
8361332 Method of forming micro-lenses Jan. 29, 2013
8303723 Liquid processing apparatus, liquid processing method, and storage medium Nov. 6, 2012
8298434 Method of forming an electrode including an electrochemical catalyst layer Oct. 30, 2012
8298435 Selective etching bath methods Oct. 30, 2012
8277675 Method of damaged low-k dielectric film layer removal Oct. 2, 2012
8246847 Separating method for conductive ceramics sintered body Aug. 21, 2012
8231797 Process for producing air gaps in microstructures Jul. 31, 2012
8221642 Methods for removing dielectric materials Jul. 17, 2012
8187487 Material removal methods employing solutions with reversible ETCH selectivities May. 29, 2012
8153523 Method of etching a layer of a semiconductor device using an etchant layer Apr. 10, 2012
8083962 Method for forming minute pattern and method for forming semiconductor memory device using the same Dec. 27, 2011
8076246 Method of manufacturing thermally assisted magnetic head Dec. 13, 2011
8052883 Method for forming periodic structure Nov. 8, 2011
8043517 Method of forming openings in substrates and inkjet printheads fabricated thereby Oct. 25, 2011
8043521 Processing apparatus Oct. 25, 2011
7964106 Method for fabricating a packaging substrate Jun. 21, 2011
7935262 Method of manufacturing fine patterns May. 3, 2011
7935265 Ceramic substrate material, method for the production and use thereof, and antenna or antenna array May. 3, 2011
7862737 Planarizing method Jan. 4, 2011
7807066 Method of manufacturing a porous resin substrate having perforations and method of making a porous resin substrate including perforations having electrically conductive wall faces Oct. 5, 2010
7718084 Etchants for selectively removing dielectric materials May. 18, 2010
7713429 Method of manufacturing nozzle plate, and liquid ejection head and image forming apparatus comprising nozzle plate May. 11, 2010
7686968 Composition for removing conductive materials and manufacturing method of array substrate using the same Mar. 30, 2010
7662299 Nanoimprint lithography template techniques for use during the fabrication of a semiconductor device and systems including same Feb. 16, 2010
7635436 Etchant composition and manufacturing method for thin film transistor array panel Dec. 22, 2009
7595004 Ink jet printhead and relative manufacturing process Sep. 29, 2009
7591959 Etchants and etchant systems with plural etch selectivities Sep. 22, 2009
7582217 Etchant composition, methods of patterning conductive layer and manufacturing flat panel display device using the same Sep. 1, 2009
7550183 Method for manufacturing conductive element substrate, conductive element substrate, method for manufacturing liquid crystal display, liquid crystal display and electronic information equipmen Jun. 23, 2009
7540968 Micro movable device and method of making the same using wet etching Jun. 2, 2009

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