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Class Information
Number: 216/92
Name: Etching a substrate: processes > Nongaseous phase etching of substrate > Projecting etchant against a moving substrate or controlling the angle or pattern projection of the etchant or controlling the angle or pattern of movement of the substrate
Description: Process wherein an etchant is transported through space by mechanical force and (a) brought into contact with a substrate while the substrate is in motion, (b) the etchant or substrate is transported at a predetermined angle, or (c) the etchant or substrate is transported in a particular pattern.










Patents under this class:
1 2 3 4 5 6

Patent Number Title Of Patent Date Issued
8656936 Barrier structure and nozzle device for use in tools used to process microelectronic workpieces with one or more treatment fluids Feb. 25, 2014
8641913 Fine pitch microcontacts and method for forming thereof Feb. 4, 2014
8623232 Method and device for treating silicon wafers Jan. 7, 2014
8562848 End point detecting method of metal etching and device thereof Oct. 22, 2013
8545640 Substrate processing method, storage medium storing computer program for performing substrate processing method, and substrate processing apparatus Oct. 1, 2013
8540891 Etching pastes for silicon surfaces and layers Sep. 24, 2013
8535548 Non-contact etching of moving glass sheets Sep. 17, 2013
8529707 Liquid processing apparatus, liquid processing method, and storage medium having computer program recorded therein Sep. 10, 2013
8530359 Modulated metal removal using localized wet etching Sep. 10, 2013
8506832 Wafer dividing apparatus and methods Aug. 13, 2013
8501028 Method for grinding a semiconductor wafer Aug. 6, 2013
8470191 Topography reduction and control by selective accelerator removal Jun. 25, 2013
8466071 Method for etching single wafer Jun. 18, 2013
8435417 Method of manufacturing semiconductor device May. 7, 2013
8419964 Apparatus and method for edge bevel removal of copper from silicon wafers Apr. 16, 2013
8420549 Etching and cleaning methods and etching and cleaning apparatuses used therefor Apr. 16, 2013
8414708 Method and apparatus for cleaning photomask Apr. 9, 2013
8415000 Patterned inorganic layers, radiation based patterning compositions and corresponding methods Apr. 9, 2013
8409451 Apparatus for etching substrate and method of fabricating thin-glass substrate Apr. 2, 2013
8394721 Method for obtaining a layout design for an existing integrated circuit Mar. 12, 2013
8377219 Method for cleaning a semiconductor wafer composed of silicon directly after a process of polishing of the semiconductor wafer Feb. 19, 2013
8303723 Liquid processing apparatus, liquid processing method, and storage medium Nov. 6, 2012
8216382 Foreign matter removal method and storage medium Jul. 10, 2012
8177993 Apparatus and methods for cleaning and drying of wafers May. 15, 2012
8105498 Method for fabricating variable parallel plate capacitors Jan. 31, 2012
8066896 Apparatus for etching wafer by single-wafer process and single wafer type method for etching wafer Nov. 29, 2011
8007594 Method for manufacturing semiconductor device Aug. 30, 2011
7884028 Method of removing material layer and remnant metal Feb. 8, 2011
7879251 Thin film removing device and thin film removing method Feb. 1, 2011
7803716 Fabrication method of semiconductor device Sep. 28, 2010
7799695 Device for liquid treatment of wafer-shaped articles Sep. 21, 2010
7759252 Method of two-step backside etching Jul. 20, 2010
7691280 Ink jet printing of etchants and modifiers Apr. 6, 2010
7517469 Method and system to measure flow velocity and volume Apr. 14, 2009
7494597 Method and apparatus for etching disk-like member Feb. 24, 2009
7481945 Polishing progress monitoring method and device thereof, polishing device, semiconductor device production method, and semiconductor device Jan. 27, 2009
7449124 Method of polishing a wafer Nov. 11, 2008
7446051 Method of etching silicon Nov. 4, 2008
7439190 Fabrication method of semiconductor device Oct. 21, 2008
7431861 Etchant, replenishment solution and method for producing copper wiring using the same Oct. 7, 2008
7396483 Uniform chemical etching method Jul. 8, 2008
7390423 Self-cleaning colloidal slurry composition and process for finishing a surface of a substrate Jun. 24, 2008
7387741 Power module member manufactured by wet treatment, and wet treatment method and wet treatment equipment thereof Jun. 17, 2008
7351642 Deglaze route to compensate for film non-uniformities after STI oxide processing Apr. 1, 2008
7332440 Wet etching apparatus and method Feb. 19, 2008
7300598 Substrate processing method and apparatus Nov. 27, 2007
7291283 Combined wet etching method for stacked films and wet etching system used for same Nov. 6, 2007
7291282 Method of fabricating a mold for imprinting a structure Nov. 6, 2007
7279116 Method for the wet treatment of disk-like objects Oct. 9, 2007
7264742 Method of planarizing a surface Sep. 4, 2007

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