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Class Information
Number: 216/90
Name: Etching a substrate: processes > Nongaseous phase etching of substrate > Relative movement between the substrate and a confined pool of etchant
Description: Process including the step of causing a relative motion between a substrate being etched and an etchant which is confined in a container, (e.g., dipping, ultrasonic vibrating., etc.):
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7387963 |
Semiconductor wafer and process for producing a semiconductor wafer |
Jun. 17, 2008 |
| 7364666 |
Flexible circuits and method of making same |
Apr. 29, 2008 |
| 7314575 |
Manufacturing method of glass substrate for magnetic disk, and manufacturing method of magnetic disk |
Jan. 1, 2008 |
| 7307023 |
Polishing method of Cu film and method for manufacturing semiconductor device |
Dec. 11, 2007 |
| 7291282 |
Method of fabricating a mold for imprinting a structure |
Nov. 6, 2007 |
| 7291283 |
Combined wet etching method for stacked films and wet etching system used for same |
Nov. 6, 2007 |
| 7288207 |
Etching liquid for controlling silicon wafer surface shape and method for manufacturing silicon wafer using the same |
Oct. 30, 2007 |
| 7279115 |
Method to reduce stacking fault nucleation sites and reduce V.sub.f drift in bipolar devices |
Oct. 9, 2007 |
| 7276449 |
Gas assisted method for applying resist stripper and gas-resist stripper combinations |
Oct. 2, 2007 |
| 7252782 |
Chemical mechanical polishing aqueous dispersion and chemical mechanical polishing method |
Aug. 7, 2007 |
| 7182821 |
Substrate processing method and substrate processing apparatus |
Feb. 27, 2007 |
| 7122126 |
Wet processing using a fluid meniscus, apparatus and method |
Oct. 17, 2006 |
| 7094131 |
Microelectronic substrate having conductive material with blunt cornered apertures, and associated methods for removing conductive material |
Aug. 22, 2006 |
| 7090786 |
Aqueous dispersion for chemical/mechanical polishing |
Aug. 15, 2006 |
| 7063800 |
Methods of cleaning copper surfaces in the manufacture of printed circuit boards |
Jun. 20, 2006 |
| 7056447 |
Semiconductor processing methods |
Jun. 6, 2006 |
| 7022244 |
Method and apparatus for generation of fine particles |
Apr. 4, 2006 |
| 7018554 |
Method to reduce stacking fault nucleation sites and reduce forward voltage drift in bipolar devices |
Mar. 28, 2006 |
| 6936183 |
Etch process for etching microstructures |
Aug. 30, 2005 |
| 6884361 |
Method for making a mirror for photolithography |
Apr. 26, 2005 |
| 6869889 |
Etching metal carbide films |
Mar. 22, 2005 |
| 6861005 |
Generating nitride waveguides |
Mar. 1, 2005 |
| 6861007 |
Method for removing organic material from a substrate and for oxidizing oxidizable material thereon |
Mar. 1, 2005 |
| 6831307 |
Semiconductor mounting system |
Dec. 14, 2004 |
| 6802911 |
Method for cleaning damaged layers and polymer residue from semiconductor device |
Oct. 12, 2004 |
| 6798128 |
Cathode-ray tube cathode and alloy therefor |
Sep. 28, 2004 |
| 6730605 |
Redistribution of copper deposited films |
May. 4, 2004 |
| 6726847 |
Silver stain removal by chemical etching and sonication |
Apr. 27, 2004 |
| 6716365 |
Method for wet etching and wet etching apparatus |
Apr. 6, 2004 |
| 6699400 |
Etch process and apparatus therefor |
Mar. 2, 2004 |
| 6660640 |
Process for planarizing patterned metal structures for magnetic thin film heads |
Dec. 9, 2003 |
| 6648933 |
Powder composition and method for polishing stone |
Nov. 18, 2003 |
| 6624087 |
Etchant for patterning indium tin oxide and method of fabricating liquid crystal display device using the same |
Sep. 23, 2003 |
| 6616514 |
High selectivity CMP slurry |
Sep. 9, 2003 |
| 6586143 |
Accurate wafer patterning method for mass production |
Jul. 1, 2003 |
| 6579798 |
Processes for chemical-mechanical polishing of a semiconductor wafer |
Jun. 17, 2003 |
| 6566268 |
Method and apparatus for planarizing a wafer surface of a semiconductor wafer having an elevated portion extending therefrom |
May. 20, 2003 |
| 6547974 |
Method of producing fine-line circuit boards using chemical polishing |
Apr. 15, 2003 |
| 6497238 |
Method of manufacturing electronic devices and apparatus for carrying out such a method |
Dec. 24, 2002 |
| 6461470 |
Apparatus for etching glass substrate |
Oct. 8, 2002 |
| 6440320 |
Substrate processing method and apparatus |
Aug. 27, 2002 |
| 6409936 |
Composition and method of formation and use therefor in chemical-mechanical polishing |
Jun. 25, 2002 |
| 6402883 |
Polishing pad conditioning surface having integral conditioning points |
Jun. 11, 2002 |
| 6383332 |
Endpoint detection method and apparatus which utilize a chelating agent to detect a polishing endpoint |
May. 7, 2002 |
| 6361646 |
Method and apparatus for endpoint detection for chemical mechanical polishing |
Mar. 26, 2002 |
| 6361708 |
Method and apparatus for polishing a metal film |
Mar. 26, 2002 |
| 6351682 |
Semiconductor processing workpiece position sensing |
Feb. 26, 2002 |
| 6340434 |
Method and apparatus for chemical-mechanical polishing |
Jan. 22, 2002 |
| 6303041 |
Method and bath for tapering optical fibers |
Oct. 16, 2001 |
| 6264848 |
Method for providing track position and identification information for data storage devices |
Jul. 24, 2001 |
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