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Class Information
Number: 216/83
Name: Etching a substrate: processes > Nongaseous phase etching of substrate
Description: Process the ... wherein the etchant used is employed in a nongaseous phase:










Sub-classes under this class:

Class Number Class Name Patents
216/96 Etching inorganic substrate 251
216/94 Etching using radiation (e.g., laser, electron-beam, ion-beam, etc.) 189
216/87 Irradiating, ion implanting, alloying, diffusing, or chemically reacting the substrate prior to ethching to change properties of substrate toward the etchant 268
216/92 Projecting etchant against a moving substrate or controlling the angle or pattern projection of the etchant or controlling the angle or pattern of movement of the substrate 276
216/93 Recycling, regenerating, or rejunevating etchant 197
216/90 Relative movement between the substrate and a confined pool of etchant 196
216/95 Substrate is multilayered 191
216/88 Using film of etchant between a stationary surface and a moving surface (e.g., chemical lapping, etc.) 629
216/84 With measuring, testing, or inspecting 272


Patents under this class:
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Patent Number Title Of Patent Date Issued
8709266 (4926 Apr. 29, 2014
8709265 (4927 Apr. 29, 2014
8703007 Polishing composition and polishing method using the same Apr. 22, 2014
8703005 Methods for removing dielectric materials Apr. 22, 2014
8691019 Process for cleaning a compound semiconductor wafer Apr. 8, 2014
8691105 Method of detecting contamination of titanium alloys of two-phase type having an alpha and a beta phase Apr. 8, 2014
8685260 Conductive polymer electrodes Apr. 1, 2014
8679361 Method and device for characterizing wafers during the production of solar cells Mar. 25, 2014
8679360 Base surface processing method and MEMS device Mar. 25, 2014
8673163 Method for fabricating thin sheets of glass Mar. 18, 2014
8673167 Laser processing method Mar. 18, 2014
8669189 Method for treating a semiconductor wafer Mar. 11, 2014
8663487 Method for manufacturing crystal oscillator Mar. 4, 2014
8658049 Method for manufacturing a touch panel Feb. 25, 2014
8652344 Liquid treatment method and storage system Feb. 18, 2014
8652345 Method of forming a patterned substrate Feb. 18, 2014
8647523 Etching composition Feb. 11, 2014
8647526 Two component etching Feb. 11, 2014
8641914 Methods of improving long range order in self-assembly of block copolymer films with ionic liquids Feb. 4, 2014
8641913 Fine pitch microcontacts and method for forming thereof Feb. 4, 2014
8636912 Package for an electronic device Jan. 28, 2014
8636915 Liquid processing apparatus and liquid processing method Jan. 28, 2014
8637409 Etching method, method for manufacturing semiconductor device, and etching device Jan. 28, 2014
8632836 Nanosurface Jan. 21, 2014
8632691 Interface treatment method for germanium-based device Jan. 21, 2014
8632690 Method and apparatus for preventing native oxide regrowth Jan. 21, 2014
8623223 Method using block copolymers for making a master disk with radial binary encoded nondata marks for nanoimprinting patterned magnetic recording disks Jan. 7, 2014
8623231 Method for etching an ultra thin film Jan. 7, 2014
8623232 Method and device for treating silicon wafers Jan. 7, 2014
8618000 Selective wet etching of hafnium aluminum oxide films Dec. 31, 2013
8617413 Method and device for encapsulating microstructures Dec. 31, 2013
8617409 Magnetically levitated gas cell for touchless site-isolated wet processing Dec. 31, 2013
8617407 Systems and methods for electrical contacts to arrays of vertically aligned nanorods Dec. 31, 2013
8609221 Alternating self-assembling morphologies of diblock copolymers controlled by variations in surfaces Dec. 17, 2013
8603917 Method of processing a wafer Dec. 10, 2013
8603348 Method of reducing main pole corrosion during aluminum oxide etch Dec. 10, 2013
8603352 Chrome-free methods of etching organic polymers Dec. 10, 2013
8597540 Compositions for polishing silicon-containing substrates Dec. 3, 2013
8591756 Method of manufacturing a metallized ceramic substrate Nov. 26, 2013
8585916 Micropores and methods of making and using thereof Nov. 19, 2013
8585917 Etching, cleaning and drying methods using supercritical fluid and chamber systems using these methods Nov. 19, 2013
8580128 Method of manufacturing electromagnetic-wave shielding plate, electromagnetic-wave shielding plate manufactured thereby, and filter display using the same Nov. 12, 2013
8580129 Method for processing a surface Nov. 12, 2013
8580133 Methods of controlling the etching of silicon nitride relative to silicon dioxide Nov. 12, 2013
8580134 Nanotextured cobalt-chromium alloy articles having high wettability and method of producing same Nov. 12, 2013
8580656 Process for inhibiting corrosion and removing contaminant from a surface during wafer dicing and composition useful therefor Nov. 12, 2013
8569174 Using spectra to determine polishing endpoints Oct. 29, 2013
8562844 Methods using block co-polymer self-assembly for sub-lithographic patterning Oct. 22, 2013
8562845 Ink jet print head and method of manufacturing ink jet print head Oct. 22, 2013
8562855 Silicon etching liquid and etching method Oct. 22, 2013

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