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Class Information
Number: 216/67
Name: Etching a substrate: processes > Gas phase etching of substrate > Application of energy to the gaseous etchant or to the substrate being etched > Using plasma
Description: Process wherein the energy source is a plasma.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7618548 |
Silicon-containing structure with deep etched features, and method of manufacture |
Nov. 17, 2009 |
| RE40951 |
Dry etching method for magnetic material |
Nov. 10, 2009 |
| 7615495 |
Display device and manufacturing method of the same |
Nov. 10, 2009 |
| 7615179 |
Method of imprinting shadow mask nanostructures for display pixel segregation |
Nov. 10, 2009 |
| 7615164 |
Plasma etching methods and contact opening forming methods |
Nov. 10, 2009 |
| 7611640 |
Minimizing arcing in a plasma processing chamber |
Nov. 3, 2009 |
| 7610670 |
Method for manufacturing a diaphragm assembly |
Nov. 3, 2009 |
| 7608196 |
Method of forming high aspect ratio apertures |
Oct. 27, 2009 |
| 7608195 |
High aspect ratio contacts |
Oct. 27, 2009 |
| 7604750 |
Method for fabricating semiconductor device |
Oct. 20, 2009 |
| 7604010 |
Film formation apparatus and method of using the same |
Oct. 20, 2009 |
| 7601619 |
Method and apparatus for plasma processing |
Oct. 13, 2009 |
| 7601272 |
Method and apparatus for integrating metrology with etch processing |
Oct. 13, 2009 |
| 7598503 |
Lithographic apparatus and cleaning method therefor |
Oct. 6, 2009 |
| 7597816 |
Wafer bevel polymer removal |
Oct. 6, 2009 |
| 7595005 |
Method and apparatus for ashing a substrate using carbon dioxide |
Sep. 29, 2009 |
| 7588693 |
Method of modifying an etched trench |
Sep. 15, 2009 |
| 7585423 |
Liquid discharge head and producing method therefor |
Sep. 8, 2009 |
| 7582220 |
Etching method |
Sep. 1, 2009 |
| 7578946 |
Plasma processing system and plasma processing method |
Aug. 25, 2009 |
| 7578945 |
Method and apparatus for tuning a set of plasma processing steps |
Aug. 25, 2009 |
| 7578944 |
Apparatus for generating gas plasma, gas composition for generating plasma and method for manufacturing semiconductor device using the same |
Aug. 25, 2009 |
| 7578889 |
Methodology for cleaning of surface metal contamination from electrode assemblies |
Aug. 25, 2009 |
| 7575855 |
Method of forming pattern |
Aug. 18, 2009 |
| 7575692 |
Method for etching chromium thin film and method for producing photomask |
Aug. 18, 2009 |
| 7572386 |
Method of treating a mask layer prior to performing an etching process |
Aug. 11, 2009 |
| 7569154 |
Plasma processing method, plasma processing apparatus and computer storage medium |
Aug. 4, 2009 |
| 7563722 |
Method of making a textured surface |
Jul. 21, 2009 |
| 7560039 |
Methods of deep reactive ion etching |
Jul. 14, 2009 |
| 7556741 |
Method for producing a solar cell |
Jul. 7, 2009 |
| 7556740 |
Method for producing a solar cell |
Jul. 7, 2009 |
| 7553427 |
Plasma etching of Cu-containing layers |
Jun. 30, 2009 |
| 7553426 |
Apparatus, system, and method for increasing data storage density in patterned media |
Jun. 30, 2009 |
| 7553378 |
Substrate cleaning apparatus and method |
Jun. 30, 2009 |
| 7552523 |
Method for manufacturing a perpendicular magnetic recording transducer |
Jun. 30, 2009 |
| 7550090 |
Oxygen plasma clean to remove carbon species deposited on a glass dome surface |
Jun. 23, 2009 |
| 7547636 |
Pulsed ultra-high aspect ratio dielectric etch |
Jun. 16, 2009 |
| 7547635 |
Process for etching dielectric films with improved resist and/or etch profile characteristics |
Jun. 16, 2009 |
| 7547398 |
Self-aligned process for fabricating imprint templates containing variously etched features |
Jun. 16, 2009 |
| 7546840 |
Method for cleaning reaction container and film deposition system |
Jun. 16, 2009 |
| 7541597 |
Automatic cleaning of ion sources |
Jun. 2, 2009 |
| 7541292 |
Plasma etch process with separately fed carbon-lean and carbon-rich polymerizing etch gases in independent inner and outer gas injection zones |
Jun. 2, 2009 |
| 7541286 |
Method for manufacturing semiconductor device using KrF light source |
Jun. 2, 2009 |
| 7540971 |
Plasma etch process using polymerizing etch gases across a wafer surface and additional polymer managing or controlling gases in independently fed gas zones with time and spatial modulation of |
Jun. 2, 2009 |
| 7534363 |
Method for providing uniform removal of organic material |
May. 19, 2009 |
| 7534360 |
Method of making diamond product and diamond product |
May. 19, 2009 |
| 7531104 |
Micro-optic elements and method for making the same |
May. 12, 2009 |
| 7531102 |
Simultaneous selective polymer deposition and etch pitch doubling for sub 50nm line/space patterning |
May. 12, 2009 |
| 7524430 |
Fluid ejection device structures and methods therefor |
Apr. 28, 2009 |
| 7524428 |
Display device and method of manufacturing transparent substrate for display device |
Apr. 28, 2009 |
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