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Class Information
Number: 216/66
Name: Etching a substrate: processes > Gas phase etching of substrate > Application of energy to the gaseous etchant or to the substrate being etched > Using ion beam, ultraviolet, or visible light
Description: Process wherein the energy source is an ion beam, ultraviolet, or visible light.










Patents under this class:
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Patent Number Title Of Patent Date Issued
8709269 Method and system for imaging a cross section of a specimen Apr. 29, 2014
8691103 Surface profile adjustment using gas cluster ion beam processing Apr. 8, 2014
8691700 Gas cluster ion beam etch profile control using beam divergence Apr. 8, 2014
8663491 ION etching of growing InP nanocrystals using microwave Mar. 4, 2014
8648316 Apparatus for cooling samples during ion beam preparation Feb. 11, 2014
8636911 Process for MEMS scanning mirror with mass remove from mirror backside Jan. 28, 2014
8636913 Removing residues in magnetic head fabrication Jan. 28, 2014
8632687 Method for electron beam induced etching of layers contaminated with gallium Jan. 21, 2014
8628672 Process for manufacturing a perpendicular magnetic recording writer pole with nonmagnetic bevel Jan. 14, 2014
8621744 Method of manufacturing an inductor for a microelectronic device Jan. 7, 2014
8623230 Methods and systems for removing a material from a sample Jan. 7, 2014
8615868 Method for manufacturing a magnetic sensor using two step ion milling Dec. 31, 2013
8607439 Method for providing an energy assisted magnetic recording (EAMR) head Dec. 17, 2013
8607438 Method for fabricating a read sensor for a read transducer Dec. 17, 2013
8580130 Laser-assisted nanomaterial deposition, nanomanufacturing, in situ monitoring and associated apparatus Nov. 12, 2013
8567041 Method of fabricating a heated quartz crystal resonator Oct. 29, 2013
8568602 Method of manufacturing a magnetic read sensor having a low resistance cap structure Oct. 29, 2013
8568605 Forming nanometer-sized patterns by electron microscopy Oct. 29, 2013
8557710 Gas cluster ion beam etching process for metal-containing materials Oct. 15, 2013
8551348 Magnetic recording medium and method of manufacturing the same Oct. 8, 2013
8545710 Ion radiation damage prediction method, ion radiation damage simulator, ion radiation apparatus and ion radiation method Oct. 1, 2013
8546264 Etching radical controlled gas chopped deep reactive ion etching Oct. 1, 2013
8540852 Method and apparatus for manufacturing magnetoresistive devices Sep. 24, 2013
8540892 Ion etching of growing InP nanocrystals using microwave Sep. 24, 2013
8525139 Method and apparatus of halogen removal Sep. 3, 2013
8518279 Method and system for providing a laser cavity for an energy assisted magnetic recording head Aug. 27, 2013
8505190 Method of manufacturing inertial sensor Aug. 13, 2013
8506828 Method and system for providing a magnetic recording transducer using an ion beam scan polishing planarization Aug. 13, 2013
8501629 Smooth SiConi etch for silicon-containing films Aug. 6, 2013
8496842 MEMS device fabricated with integrated circuit Jul. 30, 2013
8496844 Ion etching of growing InP nanocrystals using microwave Jul. 30, 2013
8491801 Method and system for providing an NFT using a sacrificial NFT structure Jul. 23, 2013
8474127 Method for enhancing thermal stability, improving biasing and reducing damage from electrostatic discharge in self-pinned abutted junction heads Jul. 2, 2013
8475672 Plasma processing device, plasma processing method and method of manufacturing element including substrate to be processed Jul. 2, 2013
8471223 Apparatus and method for sample preparation Jun. 25, 2013
8470190 Method for processing portions of walls of an opening formed in a silicon substrate Jun. 25, 2013
8468682 Method for manufacturing perpendicular magnetic recording transducers Jun. 25, 2013
8453312 Method of manufacturing vibrating micromechanical structures Jun. 4, 2013
8455849 Method and apparatus for modulating wafer treatment profile in UV chamber Jun. 4, 2013
8449782 See-through-type integrated thin-film solar cell, method of manufacturing the same and method of electrically series connecting unit cells thereof May. 28, 2013
8443511 Method of forming a MEMS power inductor May. 21, 2013
8438710 Method of manufacturing a structure with an integrated circuit and a silicon condenser microphone mounted on a single substrate May. 14, 2013
8435418 Ion etching of growing InP nanocrystals using microwave May. 7, 2013
8424192 Method for manufacturing a pole for a magnetic recording head Apr. 23, 2013
8419952 Method of manufacturing magnetic recording medium and magnetic recording apparatus Apr. 16, 2013
8409458 Process for reactive ion etching a layer of diamond like carbon Apr. 2, 2013
8402635 Method of manufacturing a magnetic head including shield layers which surround a MR element Mar. 26, 2013
8384029 Cross-section systems and methods Feb. 26, 2013
8381392 Method for manufacturing a self-aligned bevel for a write pole Feb. 26, 2013
8375564 Method for fabricating a pole of a magnetic transducer Feb. 19, 2013

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