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Class Information
Number: 216/62
Name: Etching a substrate: processes > Gas phase etching of substrate > Irradiating, ion implanting, alloying, diffusing, or chemically reacting the substrate prior to etching to change properties of substrate toward the etchant
Description: Process wherein a substrate is altered by contacting prior to etching with a material or irradiation which (a) forms an alloy, (b) diffuses into, or (c) chemically reacts with the substrate, or causes a chemical reaction within the substrate to alter the effect of the etchant on the substrate or any part thereof.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7398591 |
Manufacturing method of a thin-film magnetic head |
Jul. 15, 2008 |
| 7395595 |
Method for manufacturing P3 layer of a perpendicular magnetic write head |
Jul. 8, 2008 |
| 7392579 |
Method for protecting a slider mounted CPP GMR or TMR read head sensor from noise and ESD damage |
Jul. 1, 2008 |
| 7394067 |
Systems and methods for reducing alteration of a specimen during analysis for charged particle based and other measurement systems |
Jul. 1, 2008 |
| 7389578 |
Manufacturing method of a perpendicular recording magnetic head |
Jun. 24, 2008 |
| 7390753 |
In-situ plasma treatment of advanced resists in fine pattern definition |
Jun. 24, 2008 |
| 7370405 |
Fabrication method of a high gradient-field recording head for perpendicular magnetic recording |
May. 13, 2008 |
| 7363699 |
Method for manufacturing a magnetic read sensor employing oblique etched underlayers for inducing uniaxial magnetic anisotropy in hard magnetic bias layers |
Apr. 29, 2008 |
| 7360302 |
Manufacturing method of a magnetic sensor |
Apr. 22, 2008 |
| 7360300 |
Method for manufacturing a magnetic read sensor employing oblique etched underlayers for inducing uniaxial magnetic anisotropy in a hard magnetic pinning layer |
Apr. 22, 2008 |
| 7360301 |
Method of manufacturing a thin film magnetic head |
Apr. 22, 2008 |
| 7360299 |
Method for manufacturing a magnetic read sensor employing oblique etched underlayers for inducing uniaxial magnetic anisotropy in a hard magnetic in-stack bias layer |
Apr. 22, 2008 |
| 7351986 |
Method and apparatus for reducing cross contamination of species during ion implantation |
Apr. 1, 2008 |
| 7343666 |
Methods of making magnetic write heads with use of linewidth shrinkage techniques |
Mar. 18, 2008 |
| 7343667 |
Methods of making a side-by-side read/write head with a self-aligned trailing shield structure |
Mar. 18, 2008 |
| 7343668 |
Method of manufacturing perpendicular magnetic recording head capable of highly precisely defining gap distance |
Mar. 18, 2008 |
| 7343669 |
Method of manufacturing a thin film magnetic head |
Mar. 18, 2008 |
| 7313863 |
Method to form a cavity having inner walls of varying slope |
Jan. 1, 2008 |
| 7313854 |
Method of manufacturing a tactile sensor |
Jan. 1, 2008 |
| 7306744 |
Method of manufacturing a nozzle plate |
Dec. 11, 2007 |
| 7296338 |
Method and apparatus for providing a reverse air bearing surface head with trailing shield design for perpendicular recording |
Nov. 20, 2007 |
| 7284316 |
Method for forming a hard bias structure in a magnetoresistive sensor |
Oct. 23, 2007 |
| 7272883 |
Methods of forming an electrical connection in a magnetic head using a damascene process |
Sep. 25, 2007 |
| 7254884 |
Method for fabricating a pole tip in a magnetic transducer using feed-forward and feedback |
Aug. 14, 2007 |
| 7253120 |
Selectable area laser assisted processing of substrates |
Aug. 7, 2007 |
| 7247247 |
Selective etching method |
Jul. 24, 2007 |
| 7247248 |
Method of forming atomic force microscope tips |
Jul. 24, 2007 |
| 7247252 |
Method of avoiding plasma arcing during RIE etching |
Jul. 24, 2007 |
| 7238294 |
Procedure for etching of materials at the surface with focussed electron beam induced chemical reactions at said surface |
Jul. 3, 2007 |
| 7237315 |
Method for fabricating a resonator |
Jul. 3, 2007 |
| 7232526 |
Method and apparatus for controlling material removal from semiconductor substrate using induced current endpointing |
Jun. 19, 2007 |
| 7225524 |
Method for fabricating a gyroscope |
Jun. 5, 2007 |
| 7213322 |
Method for manufacturing surface acoustic wave device |
May. 8, 2007 |
| 7214327 |
Anisotropic dry etching of Cu-containing layers |
May. 8, 2007 |
| 7196015 |
Pattern forming method and electric device fabricating method using the same |
Mar. 27, 2007 |
| 7159304 |
Method of manufacturing a spin-valve giant magnetoresistive head |
Jan. 9, 2007 |
| 7152305 |
Method for fabricating a magnetoresistive (MR) read head |
Dec. 26, 2006 |
| 7144820 |
Method of manufacturing a layer sequence and a method of manufacturing an integrated circuit |
Dec. 5, 2006 |
| 7140096 |
Method of manufacturing a magnetoresistance effect device |
Nov. 28, 2006 |
| 7140094 |
Magnetic head and production method for magnetic heads |
Nov. 28, 2006 |
| 7138065 |
Method for removing at least one area of a layer of a component consisting of metal or a metal compound |
Nov. 21, 2006 |
| 7132673 |
Device and method for milling of material using ions |
Nov. 7, 2006 |
| 7131186 |
Method of manufacturing combination type thin film magnetic head |
Nov. 7, 2006 |
| 7128844 |
Metal/ceramic circuit board and method for producing same |
Oct. 31, 2006 |
| 7125496 |
Etching method using photoresist etch barrier |
Oct. 24, 2006 |
| 7112288 |
Methods for inspection sample preparation |
Sep. 26, 2006 |
| 7107665 |
Method for manufacturing microphone assembly |
Sep. 19, 2006 |
| 7096873 |
Method for manufacturing a group III nitride compound semiconductor device |
Aug. 29, 2006 |
| 7097781 |
Method for manufacturing porous structure and method for forming pattern |
Aug. 29, 2006 |
| 7083903 |
Methods of etching photoresist on substrates |
Aug. 1, 2006 |
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