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Class Information
Number: 216/62
Name: Etching a substrate: processes > Gas phase etching of substrate > Irradiating, ion implanting, alloying, diffusing, or chemically reacting the substrate prior to etching to change properties of substrate toward the etchant
Description: Process wherein a substrate is altered by contacting prior to etching with a material or irradiation which (a) forms an alloy, (b) diffuses into, or (c) chemically reacts with the substrate, or causes a chemical reaction within the substrate to alter the effect of the etchant on the substrate or any part thereof.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7624494 |
Method of fabricating a mesoscaled resonator |
Dec. 1, 2009 |
| 7617588 |
Method for making a device |
Nov. 17, 2009 |
| 7610670 |
Method for manufacturing a diaphragm assembly |
Nov. 3, 2009 |
| 7605063 |
Photoresist stripping chamber and methods of etching photoresist on substrates |
Oct. 20, 2009 |
| 7596853 |
Method of manufacturing thin film magnetic head having lower shield layer embedded in insulating |
Oct. 6, 2009 |
| 7596854 |
Method of fabrication for read head having shaped read sensor-biasing layer junctions using partial milling |
Oct. 6, 2009 |
| 7585424 |
Pattern reversal process for self aligned imprint lithography and device |
Sep. 8, 2009 |
| 7569152 |
Method for separating a useful layer and component obtained by said method |
Aug. 4, 2009 |
| 7568278 |
Method of manufacturing inductor |
Aug. 4, 2009 |
| 7565733 |
Process for the fabrication of multilayer thin film magnetoresistive sensors |
Jul. 28, 2009 |
| 7559130 |
Method for fabricating quartz-based nanoresonators |
Jul. 14, 2009 |
| 7552523 |
Method for manufacturing a perpendicular magnetic recording transducer |
Jun. 30, 2009 |
| 7544622 |
Passivation for cleaning a material |
Jun. 9, 2009 |
| 7536778 |
Method of fabrication for slider with underpass leads |
May. 26, 2009 |
| 7536777 |
Use of metal capped seed layers for the fabrication of perpendicular thin film heads |
May. 26, 2009 |
| 7536776 |
Fabrication method for thin film magnetic heads |
May. 26, 2009 |
| 7536775 |
Method for sample preparation for exposing a main pole of a recording head |
May. 26, 2009 |
| 7530159 |
Method of distortion correction in shrink processes for fabrication of write poles |
May. 12, 2009 |
| 7530160 |
Method for manufacturing a magnetoresistive sensor having improved antiparallel tab free layer biasing |
May. 12, 2009 |
| 7520048 |
Method of fabricating a GMR head |
Apr. 21, 2009 |
| 7516538 |
Method of manufacturing a magnetic head for perpendicular magnetic recording |
Apr. 14, 2009 |
| 7509729 |
Method for making a perpendicular magnetic recording write head |
Mar. 31, 2009 |
| 7506429 |
Method of constructing a magnetic sensor |
Mar. 24, 2009 |
| 7506431 |
Method of manufacturing a perpendicular magnetic write head having a wrap-around trailing shield and a concave trailing edge main pole |
Mar. 24, 2009 |
| 7506430 |
Process to manufacture narrow track CPP head with bias cancellation |
Mar. 24, 2009 |
| 7504623 |
Device and method for milling of material using ions |
Mar. 17, 2009 |
| 7497008 |
Method of fabricating a thin film magnetic sensor on a wafer |
Mar. 3, 2009 |
| 7497095 |
Method for producing quartz glass jig and quartz glass jig |
Mar. 3, 2009 |
| 7493688 |
Method of manufacturing a magnetic recording transducer |
Feb. 24, 2009 |
| 7494593 |
Method for forming a cantilever and tip |
Feb. 24, 2009 |
| 7479234 |
Method for producing cavities having optically transparent wall |
Jan. 20, 2009 |
| 7473377 |
Plasma processing method |
Jan. 6, 2009 |
| 7472471 |
Method of manufacturing magnetic head for perpendicular magnetic recording |
Jan. 6, 2009 |
| 7469461 |
Method for making a diaphragm unit of a condenser microphone |
Dec. 30, 2008 |
| 7469467 |
Method of manufacturing a perpendicular write head |
Dec. 30, 2008 |
| 7469468 |
Methods of slider-level reader isolation measurement technique for advanced GMR heads |
Dec. 30, 2008 |
| 7467460 |
Method of manufacturing slider |
Dec. 23, 2008 |
| 7464457 |
Method for forming a write head having an air bearing surface (ABS) |
Dec. 16, 2008 |
| 7464458 |
Method for manufacturing a self-aligned, notched trailing shield for perpendicular recording |
Dec. 16, 2008 |
| 7461445 |
Method of manufacturing a magnetic head with a deposited shield |
Dec. 9, 2008 |
| 7454828 |
Method for manufacturing a magnetic write head |
Nov. 25, 2008 |
| 7452477 |
Procedure for etching of materials at the surface with focussed electron beam induced chemical reaction at said surface |
Nov. 18, 2008 |
| 7444740 |
Damascene process for fabricating poles in recording heads |
Nov. 4, 2008 |
| 7441321 |
Method of manufacturing ultrasound transducer device having acoustic backing |
Oct. 28, 2008 |
| 7438822 |
Apparatus and method for shielding a wafer from charged particles during plasma etching |
Oct. 21, 2008 |
| 7438824 |
Fabrication of long range periodic nanostructures in transparent or semitransparent dielectrics |
Oct. 21, 2008 |
| 7431855 |
Apparatus and method for removing photoresist from a substrate |
Oct. 7, 2008 |
| 7418778 |
Method for producing a CPP thin-film magnetic head |
Sep. 2, 2008 |
| 7398591 |
Manufacturing method of a thin-film magnetic head |
Jul. 15, 2008 |
| 7395595 |
Method for manufacturing P3 layer of a perpendicular magnetic write head |
Jul. 8, 2008 |
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