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Class Information
Number: 216/58
Name: Etching a substrate: processes > Gas phase etching of substrate
Description: Process wherein the etchant is in a gaseous state when it contacts the substrate.










Sub-classes under this class:

Class Number Class Name Patents
216/63 Application of energy to the gaseous etchant or to the substrate being etched 301
216/72 Etching a multiple layered substrate where the etching condition used produces a different etching rate or characteristic between at least two of the layers of the substrate 343
216/74 Etching inorganic substrate 212
216/73 Etching vapor produced by evaporation, boiling, or sublimation 49
216/62 Irradiating, ion implanting, alloying, diffusing, or chemically reacting the substrate prior to etching to change properties of substrate toward the etchant 475
216/59 With measuring, testing, or inspecting 479


Patents under this class:
1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16

Patent Number Title Of Patent Date Issued
8709954 Wafer recycling method Apr. 29, 2014
8709265 (4927 Apr. 29, 2014
8703000 Slimming method of carbon-containing thin film and oxidation apparatus Apr. 22, 2014
8703617 Method for planarizing interlayer dielectric layer Apr. 22, 2014
8691701 Strip with reduced low-K dielectric damage Apr. 8, 2014
8691103 Surface profile adjustment using gas cluster ion beam processing Apr. 8, 2014
8691697 Self-aligned devices and methods of manufacture Apr. 8, 2014
8685855 Tray for CVD and method for forming film using same Apr. 1, 2014
8685266 Monocyclic high aspect ratio titanium inductively coupled plasma deep etching processes and products so produced Apr. 1, 2014
8679983 Selective suppression of dry-etch rate of materials containing both silicon and nitrogen Mar. 25, 2014
8679985 Dry etching method for silicon nitride film Mar. 25, 2014
8673166 Plasma processing apparatus and plasma processing method Mar. 18, 2014
8673243 Reactor and manufacturing method of reactor Mar. 18, 2014
8663489 Substrate replacing method and substrate processing apparatus Mar. 4, 2014
8664124 Method for etching organic hardmasks Mar. 4, 2014
8658048 Method of manufacturing magnetic recording medium Feb. 25, 2014
8652338 Magnetic recording medium and method of manufacturing the same Feb. 18, 2014
8652342 Semiconductor fabrication apparatuses to perform semiconductor etching and deposition processes and methods of forming semiconductor device using the same Feb. 18, 2014
8652343 Method for selectively removing material from the surface of a substrate, masking material for a wafer, and wafer with masking material Feb. 18, 2014
8647446 Method and system for improving performance and preventing corrosion in multi-module cleaning chamber Feb. 11, 2014
8647521 Method of forming micro pattern of semiconductor device Feb. 11, 2014
8648316 Apparatus for cooling samples during ion beam preparation Feb. 11, 2014
8642477 Method for clearing native oxide Feb. 4, 2014
8642473 Methods for contact clean Feb. 4, 2014
8641914 Methods of improving long range order in self-assembly of block copolymer films with ionic liquids Feb. 4, 2014
8636912 Package for an electronic device Jan. 28, 2014
8632688 Plasma processing apparatus and plasma processing method Jan. 21, 2014
8623457 Vacuum processing system Jan. 7, 2014
8623765 Processed object processing apparatus, processed object processing method, pressure control method, processed object transfer method, and transfer apparatus Jan. 7, 2014
8617407 Systems and methods for electrical contacts to arrays of vertically aligned nanorods Dec. 31, 2013
8603917 Method of processing a wafer Dec. 10, 2013
8597530 Method of forming semiconductor device Dec. 3, 2013
8598040 ETCH process for 3D flash structures Dec. 3, 2013
8591755 Methods for controlling plasma constituent flux and deposition during semiconductor fabrication and apparatus for implementing the same Nov. 26, 2013
8591752 Plasma processing method Nov. 26, 2013
8591754 Plasma processing apparatus and plasma processing method Nov. 26, 2013
8592318 Pitch reduction using oxide spacer Nov. 26, 2013
8585910 Process of making a microtube and microfluidic devices formed therewith Nov. 19, 2013
8580132 Method for making strip shaped graphene layer Nov. 12, 2013
8574369 Method of removing resist and apparatus therefor Nov. 5, 2013
8569175 Method for dry chemical treatment of substrates and also use thereof Oct. 29, 2013
8568600 Touch screen panel and method of manufacturing the same Oct. 29, 2013
8569179 Method for etching organic hardmasks Oct. 29, 2013
8562844 Methods using block co-polymer self-assembly for sub-lithographic patterning Oct. 22, 2013
8562845 Ink jet print head and method of manufacturing ink jet print head Oct. 22, 2013
8562847 Thin film support substrate for use in hydrogen production filter and production method of hydrogen production filter Oct. 22, 2013
8563619 Methods and arrangements for plasma processing system with tunable capacitance Oct. 22, 2013
8557128 Sub-10 nm line features via rapid graphoepitaxial self-assembly of amphiphilic monolayers Oct. 15, 2013
8546265 Method, apparatus and program for manufacturing silicon structure Oct. 1, 2013
8546264 Etching radical controlled gas chopped deep reactive ion etching Oct. 1, 2013

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