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Class Information
Number: 216/51
Name: Etching a substrate: processes > Masking of a substrate using material resistant to an etchant (i.e., etch resist) > Mask resist contains inorganic material
Description: Process wherein the resist material is inorganic and includes material in an elemental state.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7405161 |
Method for fabricating a semiconductor device |
Jul. 29, 2008 |
| 7354523 |
Methods for sidewall etching and etching during filling of a trench |
Apr. 8, 2008 |
| 7335600 |
Method for removing photoresist |
Feb. 26, 2008 |
| 7326358 |
Plasma processing method and apparatus, and storage medium |
Feb. 5, 2008 |
| 7316785 |
Methods and apparatus for the optimization of etch resistance in a plasma processing system |
Jan. 8, 2008 |
| 7276175 |
Semiconductor device fabrication method |
Oct. 2, 2007 |
| 7271528 |
Uniform emitter array for display devices |
Sep. 18, 2007 |
| 7262068 |
Microneedle array module and method of fabricating the same |
Aug. 28, 2007 |
| 7255800 |
Wet etching process |
Aug. 14, 2007 |
| 7255801 |
Deep submicron CMOS compatible suspending inductor |
Aug. 14, 2007 |
| 7247247 |
Selective etching method |
Jul. 24, 2007 |
| 7244368 |
Manufacturing process of a magnetic head, magnetic head, pattern formation method |
Jul. 17, 2007 |
| 7238293 |
Slotted substrate and method of making |
Jul. 3, 2007 |
| 7204932 |
Polarization rotators |
Apr. 17, 2007 |
| 7185419 |
Method of manufacturing a mask for evaporation |
Mar. 6, 2007 |
| 7166232 |
Method for producing a solid body including a microstructure |
Jan. 23, 2007 |
| 7105098 |
Method to control artifacts of microstructural fabrication |
Sep. 12, 2006 |
| 7060197 |
Micromechanical mass flow sensor and method for the production thereof |
Jun. 13, 2006 |
| 7056446 |
Method of manufacturing nano-gap electrode |
Jun. 6, 2006 |
| 7052621 |
Bilayered metal hardmasks for use in Dual Damascene etch schemes |
May. 30, 2006 |
| 7008551 |
Low loss optical waveguide device |
Mar. 7, 2006 |
| 6998221 |
Method for forming a via in a substrate |
Feb. 14, 2006 |
| 6995094 |
Method for deep trench etching through a buried insulator layer |
Feb. 7, 2006 |
| 6974549 |
Method for forming fine grooves and stamper and structure with fine grooves |
Dec. 13, 2005 |
| 6969568 |
Method for etching a quartz layer in a photoresistless semiconductor mask |
Nov. 29, 2005 |
| 6926843 |
Etching of hard masks |
Aug. 9, 2005 |
| 6913702 |
Amorphous material processing method and glass substrate |
Jul. 5, 2005 |
| 6911156 |
Methods for fabricating MRAM device structures |
Jun. 28, 2005 |
| 6890447 |
Method of forming noble metal thin film pattern |
May. 10, 2005 |
| 6890446 |
Uniform emitter array for display devices, etch mask for the same, and methods for making the same |
May. 10, 2005 |
| 6869542 |
Hard mask integrated etch process for patterning of silicon oxide and other dielectric materials |
Mar. 22, 2005 |
| 6866790 |
Method of making an ink jet printhead having a narrow ink channel |
Mar. 15, 2005 |
| 6835663 |
Hardmask of amorphous carbon-hydrogen (a-C:H) layers with tunable etch resistivity |
Dec. 28, 2004 |
| 6828082 |
Method to pattern small features by using a re-flowable hard mask |
Dec. 7, 2004 |
| 6824698 |
Uniform emitter array for display devices, etch mask for the same, and methods for making the same |
Nov. 30, 2004 |
| 6824697 |
Method for fabricating mems and microfluidic devices using smile, latent masking, and delayed locos techniques |
Nov. 30, 2004 |
| 6800214 |
Method for correcting characteristics of attenuated phase-shift mask |
Oct. 5, 2004 |
| 6793830 |
Method for forming a microstructure from a monocrystalline substrate |
Sep. 21, 2004 |
| 6790372 |
Microneedle array module and method of fabricating the same |
Sep. 14, 2004 |
| 6783688 |
Method and apparatus for structuring printed circuit boards |
Aug. 31, 2004 |
| 6736984 |
Non-mechanical fabrication of carbon-containing work pieces |
May. 18, 2004 |
| 6712983 |
Method of etching a deep trench in a substrate and method of fabricating on-chip devices and micro-machined structures using the same |
Mar. 30, 2004 |
| 6699395 |
Method of forming alignment features for conductive devices |
Mar. 2, 2004 |
| 6696222 |
Dual damascene process using metal hard mask |
Feb. 24, 2004 |
| 6689282 |
Method for forming uniform sharp tips for use in a field emission array |
Feb. 10, 2004 |
| 6679997 |
Organic insulation film formation method |
Jan. 20, 2004 |
| 6679998 |
Method for patterning high density field emitter tips |
Jan. 20, 2004 |
| 6673719 |
Method for etching using a multilevel hard mask |
Jan. 6, 2004 |
| 6664032 |
Method of producing two-dimensional phase type optical element |
Dec. 16, 2003 |
| 6660173 |
Method for forming uniform sharp tips for use in a field emission array |
Dec. 9, 2003 |
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