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Class Information
Number: 216/49
Name: Etching a substrate: processes > Masking of a substrate using material resistant to an etchant (i.e., etch resist) > Mask resist contains organic compound
Description: Process wherein the resist material contains an organic compound.










Sub-classes under this class:

Class Number Class Name Patents
216/50 Mask resist contains a color imparting agent 21


Patents under this class:
1 2 3 4 5 6 7 8 9

Patent Number Title Of Patent Date Issued
8709265 (4927 Apr. 29, 2014
8709267 Double patterning method using tilt-angle deposition Apr. 29, 2014
8703000 Slimming method of carbon-containing thin film and oxidation apparatus Apr. 22, 2014
8685264 Slide member and method for the production thereof Apr. 1, 2014
8679357 Nanoimprinting method and method for producing substrates utilizing the nanoimprinting method Mar. 25, 2014
8658050 Method to transfer lithographic patterns into inorganic substrates Feb. 25, 2014
8641914 Methods of improving long range order in self-assembly of block copolymer films with ionic liquids Feb. 4, 2014
8641913 Fine pitch microcontacts and method for forming thereof Feb. 4, 2014
8623229 Manufacturing techniques to limit damage on workpiece with varying topographies Jan. 7, 2014
8623223 Method using block copolymers for making a master disk with radial binary encoded nondata marks for nanoimprinting patterned magnetic recording disks Jan. 7, 2014
8609221 Alternating self-assembling morphologies of diblock copolymers controlled by variations in surfaces Dec. 17, 2013
8597769 Etching mask, base material having etching mask, finely processed article, and method for production of finely processed article Dec. 3, 2013
8580127 Method of manufacturing RFID based thermal bubble type accelerometer Nov. 12, 2013
8580128 Method of manufacturing electromagnetic-wave shielding plate, electromagnetic-wave shielding plate manufactured thereby, and filter display using the same Nov. 12, 2013
8562844 Methods using block co-polymer self-assembly for sub-lithographic patterning Oct. 22, 2013
8557128 Sub-10 nm line features via rapid graphoepitaxial self-assembly of amphiphilic monolayers Oct. 15, 2013
8551349 Method for producing magnetic recording medium, and magnetic recording/reproducing apparatus Oct. 8, 2013
8536270 Resist composition, resist layer, imprinting method, pattern formation, method for producing magnetic recording medium, and magnetic recording medium Sep. 17, 2013
8535544 Structure and method to form nanopore Sep. 17, 2013
8535549 Method for forming stair-step structures Sep. 17, 2013
8529778 Large area patterning of nano-sized shapes Sep. 10, 2013
8529779 Methods for forming surface features using self-assembling masks Sep. 10, 2013
8518278 Method of drying substrate, and method of manufacturing image display apparatus using the same Aug. 27, 2013
8518275 Graphoepitaxial self-assembly of arrays of downward facing half-cylinders Aug. 27, 2013
8512582 Methods of patterning a substrate Aug. 20, 2013
8501020 Method for making three-dimensional nano-structure array Aug. 6, 2013
8491965 Method of controlling orientation of domains in block copolymer films Jul. 23, 2013
8486278 Drug-delivery pumps and methods of manufacture Jul. 16, 2013
8470189 Method of forming mask pattern, method of forming thin film pattern and method of forming magnetoresistive element Jun. 25, 2013
8444867 Method for fabricating patterns on a wafer through an exposure process May. 21, 2013
8444869 Simultaneous front side ash and backside clean May. 21, 2013
8435416 Method for manufacturing porous structure and method for forming pattern May. 7, 2013
8435900 Method for manufacturing a transistor May. 7, 2013
8419950 Pattern forming method Apr. 16, 2013
8414785 Methods for fabrication of microfluidic systems on printed circuit boards Apr. 9, 2013
8414786 Planar heater stack and method for making planar heater stack with cavity within planar heater substrata above substrate Apr. 9, 2013
8409449 Registered structure formation via the application of directed thermal energy to diblock copolymer films Apr. 2, 2013
8404124 Alternating self-assembling morphologies of diblock copolymers controlled by variations in surfaces Mar. 26, 2013
8394722 Bi-layer, tri-layer mask CD control Mar. 12, 2013
8394282 Adaptive nanotopography sculpting Mar. 12, 2013
8382997 Method for high aspect ratio patterning in a spin-on layer Feb. 26, 2013
8377316 Structure and method for creating surface texture of compliant coatings on piezo ink jet imaging drums Feb. 19, 2013
8372295 Extensions of self-assembled structures to increased dimensions via a "bootstrap" self-templating method Feb. 12, 2013
8329051 Method for forming stair-step structures Dec. 11, 2012
8309278 Guided self-assembly of block copolymer line structures for integrated circuit interconnects Nov. 13, 2012
8303832 Solid inks for masks for printed circuit boards and other electronic devices Nov. 6, 2012
8298430 Method of etching magnetoresistive film by using a plurality of metal hard masks Oct. 30, 2012
8293639 Method for controlling ADI-AEI CD difference ratio of openings having different sizes Oct. 23, 2012
8288284 Substrate processing method, semiconductor chip manufacturing method, and resin-adhesive-layer-backed semiconductor chip manufacturing method Oct. 16, 2012
8287749 High-molecular thin film, pattern medium and manufacturing method thereof Oct. 16, 2012

1 2 3 4 5 6 7 8 9










 
 
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