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Class Information
Number: 216/48
Name: Etching a substrate: processes > Masking of a substrate using material resistant to an etchant (i.e., etch resist) > Mask is exposed to nonimaging radiation
Description: Process of exposing the etch resist to nonimaging radiation, e.g., U.V. light, laser beam, etc.










Patents under this class:
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Patent Number Title Of Patent Date Issued
8703032 Biomimetic dry adhesives and methods of production therefor Apr. 22, 2014
8658050 Method to transfer lithographic patterns into inorganic substrates Feb. 25, 2014
8648316 Apparatus for cooling samples during ion beam preparation Feb. 11, 2014
8578594 Process for fabricating a magnetic pole and shields Nov. 12, 2013
8567045 Process to manufacture a magnetic write head Oct. 29, 2013
8557130 Nano-imprint lithography methods Oct. 15, 2013
8533937 Method of forming a fully wrapped-around shielded PMR writer pole Sep. 17, 2013
8512579 Method for making grooves on a luminal surface of an intravascular stent Aug. 20, 2013
8505358 Method for adjusting resonance frequencies of a vibrating microelectromechanical device Aug. 13, 2013
8505357 Method for adjusting resonance frequencies of a vibrating microelectromechanical device Aug. 13, 2013
8499435 Method of manufacturing a thin-film magnetic head Aug. 6, 2013
8453316 Method of manufacturing magnetic head having a patterned pole layer and method of forming a patterned layer Jun. 4, 2013
8425790 Ink-jet ink composition for etching resist Apr. 23, 2013
8425789 Method and apparatus for anisotropic etching Apr. 23, 2013
8414788 Reverse acting rupture disc with laser-defined electropolished line of weakness and method of forming the line of weakness Apr. 9, 2013
8413317 Method for fabricating a structure for a microelectric device Apr. 9, 2013
8393073 Method to control mask profile for read sensor definition Mar. 12, 2013
8382997 Method for high aspect ratio patterning in a spin-on layer Feb. 26, 2013
8377322 Pattern forming method, substrate processing method and mold structure replication method Feb. 19, 2013
8377320 Method of forming an undercut microstructure Feb. 19, 2013
8379311 Method for fabricating micro-lens, and micro-lens array including the micro-lens Feb. 19, 2013
8357616 Adjustable solubility in sacrificial layers for microfabrication Jan. 22, 2013
8347489 Method for manufacturing a perpendicular magnetic write head having a leading edge tapered write pole, self aligned side shield and independent trailing shield Jan. 8, 2013
8347488 Magnetic write head manufactured by damascene process producing a tapered write pole with a non-magnetic step and non-magnetic bump Jan. 8, 2013
8341826 Method for fabricating a magnetic recording transducer using a split seed layer Jan. 1, 2013
8343877 Angle ion implant to re-shape sidewall image transfer patterns Jan. 1, 2013
8333008 Method for manufacturing a perpendicular magnetic recording transducer Dec. 18, 2012
8329052 Imprint lithography Dec. 11, 2012
8327523 High density planarized inductor and method of making the same Dec. 11, 2012
8329089 Method for forming a resist pattern Dec. 11, 2012
8276258 Method for fabricating a magnetic recording transducer Oct. 2, 2012
8263317 Formation of deep hollow areas and use thereof in the production of an optical recording medium Sep. 11, 2012
8257598 Method using block copolymers for making a master mold with high bit-aspect-ratio for nanoimprinting patterned magnetic recording disks Sep. 4, 2012
8257600 Printed masking process Sep. 4, 2012
8256095 Method for manufacturing a magneto-resistance effect element Sep. 4, 2012
8240026 Method of manufacturing a magneto-resistive device Aug. 14, 2012
8240024 Methods for fabricating magnetic transducers using post-deposition tilting Aug. 14, 2012
8230583 Method for manufacturing a magnetic write head Jul. 31, 2012
8201320 Method for manufacturing a magnetic write head having a wrap around shield that is magnetically coupled with a leading magnetic shield Jun. 19, 2012
8186040 Methods for creating slanted perpendicular magnetic pole via metal liftoff May. 29, 2012
8166631 Method for fabricating a magnetic recording transducer having side shields May. 1, 2012
8141235 Method for manufacturing a perpendicular magnetic recording transducers Mar. 27, 2012
8137641 Microfluidic module including an adhesiveless self-bonding rebondable polyimide Mar. 20, 2012
8136228 Method for manufacturing a magnetic write head Mar. 20, 2012
8133402 Pattern forming method, charged particle beam writing apparatus, and recording medium on which program is recorded Mar. 13, 2012
8117738 Method to make a perpendicular magnetic recording head with a side write shield Feb. 21, 2012
8119017 Method using block copolymers for making a master mold with high bit-aspect-ratio for nanoimprinting patterned magnetic recording disks Feb. 21, 2012
8117737 Method of manufacturing magnetic head for perpendicular magnetic recording with shield around main magnetic pole Feb. 21, 2012
8092703 Manufacturing method of semiconductor device Jan. 10, 2012
8088294 Method for manufacturing printed circuit boards Jan. 3, 2012

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