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Class Information
Number: 216/44
Name: Etching a substrate: processes > Masking of a substrate using material resistant to an etchant (i.e., etch resist) > Mechanically forming pattern into a resist
Description: Process directed to the forming of a pattern into the etch resist by mechanical means, e.g., cutting, punching, scribing using a stylus, etc.

Patents under this class:
1 2 3

Patent Number Title Of Patent Date Issued
8679355 MEMS element Mar. 25, 2014
8679357 Nanoimprinting method and method for producing substrates utilizing the nanoimprinting method Mar. 25, 2014
8663484 Method for manufacturing a printed circuit board and a printed circuit board obtained by the manufacturing method Mar. 4, 2014
8658537 Mask manufacturing method for nanoimprinting Feb. 25, 2014
8613141 Manufacturing method of liquid ejection head Dec. 24, 2013
8603349 Method of manufacturing nanoimprint stamp Dec. 10, 2013
8597769 Etching mask, base material having etching mask, finely processed article, and method for production of finely processed article Dec. 3, 2013
8574444 Fabricating method for multilayer printed circuit board Nov. 5, 2013
8562842 Methods of fabricating nanoimprint stamp Oct. 22, 2013
8557130 Nano-imprint lithography methods Oct. 15, 2013
8551348 Magnetic recording medium and method of manufacturing the same Oct. 8, 2013
8536270 Resist composition, resist layer, imprinting method, pattern formation, method for producing magnetic recording medium, and magnetic recording medium Sep. 17, 2013
8522411 Method to control BAW resonator top electrode edge during patterning Sep. 3, 2013
8506830 Pattern formation method Aug. 13, 2013
8486288 Pattern forming method Jul. 16, 2013
8465655 Method of manufacturing polymer nanopillars by anodic aluminum oxide membrane and imprint process Jun. 18, 2013
8414788 Reverse acting rupture disc with laser-defined electropolished line of weakness and method of forming the line of weakness Apr. 9, 2013
8410193 Silane coating process for high alkali bioactive glasses Apr. 2, 2013
8394282 Adaptive nanotopography sculpting Mar. 12, 2013
8365371 Methods for manufacturing piezoelectric vibrating devices Feb. 5, 2013
8361336 Imprint method for imprinting a pattern of a mold onto a resin material of a substrate and related substrate processing method Jan. 29, 2013
8349241 Method to arrange features on a substrate to replicate features having minimal dimensional variability Jan. 8, 2013
8329052 Imprint lithography Dec. 11, 2012
8329089 Method for forming a resist pattern Dec. 11, 2012
8323541 Imprint lithography Dec. 4, 2012
8308965 Stamper, method of manufacturing the stamper, and magnetic recording medium manufacturing method using the stamper Nov. 13, 2012
8293125 Method and device for manufacturing structure having pattern, and method for manufacturing mold Oct. 23, 2012
8252189 Nano structure fabrication Aug. 28, 2012
8222153 Textured single crystal Jul. 17, 2012
8196285 Method and system for providing a pole for a perpendicular magnetic recording head using a multi-layer hard mask Jun. 12, 2012
8156621 Methods of producing piezoelectric vibrating devices Apr. 17, 2012
8128832 Processes and materials for step and flash imprint lithography Mar. 6, 2012
8097539 Imprint mask manufacturing method for nanoimprinting Jan. 17, 2012
8070967 Method for manufacturing patterned magnetic recording medium Dec. 6, 2011
8048323 Method for manufacturing magnetic recording medium and magnetic recording and reproducing apparatus Nov. 1, 2011
8043516 Method of manufacturing magnetic recording medium and magnetic recording medium Oct. 25, 2011
8017023 Method of manufacturing magnetic recording medium and magnetic recording medium Sep. 13, 2011
8012382 Molded waveguides Sep. 6, 2011
8012394 Template pattern density doubling Sep. 6, 2011
8002997 Method of manufacturing magnetic recording medium and magnetic recording medium Aug. 23, 2011
7972523 Method of manufacturing magnetic recording medium Jul. 5, 2011
7967993 Method of manufacturing magnetic recording medium Jun. 28, 2011
7947608 Positive tone bi-layer method May. 24, 2011
7867406 Patterned magnetic media having an exchange bridge structure connecting islands Jan. 11, 2011
7858528 Positive tone bi-layer method Dec. 28, 2010
7846345 Method of manufacturing an imprinting template using a semiconductor manufacturing process and the imprinting template obtained Dec. 7, 2010
7846346 Processing apparatus and method Dec. 7, 2010
7837459 Method for fabricating dual damascene structures using photo-imprint lithography, methods for fabricating imprint lithography molds for dual damascene structures, materials for imprintable die Nov. 23, 2010
7828984 Imprint method, imprint apparatus, and process for producing chip Nov. 9, 2010
7810226 Method of manufacturing a thin-film magnetic head having an element having a lower layer with a narrower width Oct. 12, 2010

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