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Class Information
Number: 216/41
Name: Etching a substrate: processes > Masking of a substrate using material resistant to an etchant (i.e., etch resist)
Description: Process directed to using a patterned material which is resistant to the etchant.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7625822 |
Semiconductor device and method for manufacturing the same including two antireflective coating films |
Dec. 1, 2009 |
| 7622049 |
Passivation for cleaning a material |
Nov. 24, 2009 |
| 7615482 |
Structure and method for porous SiCOH dielectric layers and adhesion promoting or etch stop layers having increased interfacial and mechanical strength |
Nov. 10, 2009 |
| 7608196 |
Method of forming high aspect ratio apertures |
Oct. 27, 2009 |
| 7608194 |
Photonic structures, devices, and methods |
Oct. 27, 2009 |
| 7601645 |
Methods for fabricating device features having small dimensions |
Oct. 13, 2009 |
| 7591955 |
Method for forming an etched soft edge metal foil and the product thereof |
Sep. 22, 2009 |
| 7585614 |
Sub-lithographic imaging techniques and processes |
Sep. 8, 2009 |
| 7585424 |
Pattern reversal process for self aligned imprint lithography and device |
Sep. 8, 2009 |
| 7585419 |
Substrate structure and the fabrication method thereof |
Sep. 8, 2009 |
| 7582218 |
Method for merging sensor field-mill and electronic lapping guide material placement for a partial mill process and sensor formed according to the method |
Sep. 1, 2009 |
| 7581645 |
Method for manufacturing carbon nanotubes with desired length |
Sep. 1, 2009 |
| 7579284 |
Etching solution, method of forming a pattern using the same, method of manufacturing a multiple gate oxide layer using the same and method of manufacturing a flash memory device using the sam |
Aug. 25, 2009 |
| 7575694 |
Method of selectively stripping a metallic coating |
Aug. 18, 2009 |
| 7575692 |
Method for etching chromium thin film and method for producing photomask |
Aug. 18, 2009 |
| 7571533 |
Method of manufacturing a micro flux gate sensor |
Aug. 11, 2009 |
| 7569153 |
Fabrication method of liquid crystal display device |
Aug. 4, 2009 |
| 7565732 |
Method of manufacturing a write pole |
Jul. 28, 2009 |
| 7563382 |
Mask and method of fabricating the same, and method of machining material |
Jul. 21, 2009 |
| 7563379 |
Dry etching method and photonic crystal device fabricated by use of the same |
Jul. 21, 2009 |
| 7560040 |
Etching method and article etched molded by that method |
Jul. 14, 2009 |
| 7560039 |
Methods of deep reactive ion etching |
Jul. 14, 2009 |
| 7553430 |
Polishing slurries and methods for chemical mechanical polishing |
Jun. 30, 2009 |
| 7550044 |
Hard mask structure for patterning of materials |
Jun. 23, 2009 |
| 7549214 |
Method for bonding slider row bars for photolithography process |
Jun. 23, 2009 |
| 7541286 |
Method for manufacturing semiconductor device using KrF light source |
Jun. 2, 2009 |
| 7540970 |
Methods of fabricating a semiconductor device |
Jun. 2, 2009 |
| 7540968 |
Micro movable device and method of making the same using wet etching |
Jun. 2, 2009 |
| 7531293 |
Radiation sensitive self-assembled monolayers and uses thereof |
May. 12, 2009 |
| 7531100 |
Method of making a fuel cell component using an easily removed mask |
May. 12, 2009 |
| 7524431 |
Lift-off patterning processing employing energetically-stimulated local removal of solid-condensed-gas layers |
Apr. 28, 2009 |
| 7524430 |
Fluid ejection device structures and methods therefor |
Apr. 28, 2009 |
| 7524428 |
Display device and method of manufacturing transparent substrate for display device |
Apr. 28, 2009 |
| 7517808 |
Method for forming and removing a patterned silicone film |
Apr. 14, 2009 |
| 7517466 |
Method for manufacturing porous structure and method for forming pattern |
Apr. 14, 2009 |
| 7517465 |
Ultra lightweight photovoltaic device and method for its manufacture |
Apr. 14, 2009 |
| 7517464 |
Method for manufacturing an LCD device |
Apr. 14, 2009 |
| 7516545 |
Method of manufacturing printed circuit board having landless via hole |
Apr. 14, 2009 |
| 7510978 |
Method for forming mask for using dry-etching and method for forming fine structure pattern |
Mar. 31, 2009 |
| 7510976 |
Dielectric plasma etch process with in-situ amorphous carbon mask with improved critical dimension and etch selectivity |
Mar. 31, 2009 |
| 7510763 |
Substrate with a self-cleaning coating |
Mar. 31, 2009 |
| 7502605 |
Sub-millimeter wavelength camera |
Mar. 10, 2009 |
| 7501071 |
Method of forming a patterned conductive structure |
Mar. 10, 2009 |
| 7497009 |
Main pole forming method of perpendicular magnetic recording head |
Mar. 3, 2009 |
| 7491343 |
Line end shortening reduction during etch |
Feb. 17, 2009 |
| 7488429 |
Method of dry etching, method of manufacturing magnetic recording medium, and magnetic recording medium |
Feb. 10, 2009 |
| 7485891 |
Multi-bit phase change memory cell and multi-bit phase change memory including the same, method of forming a multi-bit phase change memory, and method of programming a multi-bit phase change m |
Feb. 3, 2009 |
| 7485238 |
Etching method, etched product formed by the same, and piezoelectric vibration device, method for producing the same |
Feb. 3, 2009 |
| 7485236 |
Interference display cell and fabrication method thereof |
Feb. 3, 2009 |
| 7481942 |
Monolithic ink-jet printhead and method of manufacturing the same |
Jan. 27, 2009 |
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