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Class Information
Number: 216/41
Name: Etching a substrate: processes > Masking of a substrate using material resistant to an etchant (i.e., etch resist)
Description: Process directed to using a patterned material which is resistant to the etchant.

Sub-classes under this class:

Class Number Class Name Patents
216/43 Adhesively bonding resist to substrate 51
216/48 Mask is exposed to nonimaging radiation 802
216/47 Mask is multilayer resist 510
216/45 Mask is reusable (i.e., stencil) 45
216/51 Mask resist contains inorganic material 385
216/49 Mask resist contains organic compound 439
216/46 Masking of sidewall 172
216/44 Mechanically forming pattern into a resist 133
216/42 Resist material applied in particulate form or spray 103

Patents under this class:

Patent Number Title Of Patent Date Issued
8709267 Double patterning method using tilt-angle deposition Apr. 29, 2014
8709266 (4926 Apr. 29, 2014
8702999 Method and apparatus for plasma surface treatment of a moving substrate Apr. 22, 2014
8691697 Self-aligned devices and methods of manufacture Apr. 8, 2014
8691104 Nanotextured surfaces and related methods, systems, and uses Apr. 8, 2014
8691102 Method of manufacturing plasmon generator Apr. 8, 2014
8685864 Method and device for treating a substrate surface of a substrate Apr. 1, 2014
8685858 Formation of metal nanospheres and microspheres Apr. 1, 2014
8685264 Slide member and method for the production thereof Apr. 1, 2014
8679358 Plasma etching method and computer-readable storage medium Mar. 25, 2014
8679357 Nanoimprinting method and method for producing substrates utilizing the nanoimprinting method Mar. 25, 2014
8668833 Method of forming a nanostructure Mar. 11, 2014
8663487 Method for manufacturing crystal oscillator Mar. 4, 2014
8658051 Lithography resolution improving method Feb. 25, 2014
8652345 Method of forming a patterned substrate Feb. 18, 2014
8652343 Method for selectively removing material from the surface of a substrate, masking material for a wafer, and wafer with masking material Feb. 18, 2014
8652342 Semiconductor fabrication apparatuses to perform semiconductor etching and deposition processes and methods of forming semiconductor device using the same Feb. 18, 2014
8652339 Patterned lift-off of thin films deposited at high temperatures Feb. 18, 2014
8652338 Magnetic recording medium and method of manufacturing the same Feb. 18, 2014
8648316 Apparatus for cooling samples during ion beam preparation Feb. 11, 2014
8647522 Methods of wet etching a self-assembled monolayer patterned substrate and metal patterned articles Feb. 11, 2014
8647521 Method of forming micro pattern of semiconductor device Feb. 11, 2014
8647517 Producing method of suspension board with circuit Feb. 11, 2014
8641914 Methods of improving long range order in self-assembly of block copolymer films with ionic liquids Feb. 4, 2014
8641913 Fine pitch microcontacts and method for forming thereof Feb. 4, 2014
8641912 Method for fabricating monolithic two-dimensional nanostructures Feb. 4, 2014
8636914 Method of forming pattern Jan. 28, 2014
8623771 Method for fabricating micropattern of semiconductor device Jan. 7, 2014
8623223 Method using block copolymers for making a master disk with radial binary encoded nondata marks for nanoimprinting patterned magnetic recording disks Jan. 7, 2014
8617999 Method of manufacturing semiconductor device and computer readable medium for storing pattern size setting program Dec. 31, 2013
8617969 Method for producing semiconductor optical device Dec. 31, 2013
8617409 Magnetically levitated gas cell for touchless site-isolated wet processing Dec. 31, 2013
8614151 Method of etching a high aspect ratio contact Dec. 24, 2013
8609221 Alternating self-assembling morphologies of diblock copolymers controlled by variations in surfaces Dec. 17, 2013
8603349 Method of manufacturing nanoimprint stamp Dec. 10, 2013
8598041 Method for positioning spacers in pitch multiplication Dec. 3, 2013
8597769 Etching mask, base material having etching mask, finely processed article, and method for production of finely processed article Dec. 3, 2013
8591756 Method of manufacturing a metallized ceramic substrate Nov. 26, 2013
8591755 Methods for controlling plasma constituent flux and deposition during semiconductor fabrication and apparatus for implementing the same Nov. 26, 2013
8585916 Micropores and methods of making and using thereof Nov. 19, 2013
8585915 Methods for fabricating sub-resolution alignment marks on semiconductor structures Nov. 19, 2013
8580129 Method for processing a surface Nov. 12, 2013
8580128 Method of manufacturing electromagnetic-wave shielding plate, electromagnetic-wave shielding plate manufactured thereby, and filter display using the same Nov. 12, 2013
8580126 Piezoelectric vibrating pieces comprising edge mesa steps, and methods for manufacturing same Nov. 12, 2013
8578594 Process for fabricating a magnetic pole and shields Nov. 12, 2013
8569178 Plasma processing method and plasma processing apparatus Oct. 29, 2013
8568605 Forming nanometer-sized patterns by electron microscopy Oct. 29, 2013
8568604 CMOS gate structures fabricated by selective oxidation Oct. 29, 2013
8568600 Touch screen panel and method of manufacturing the same Oct. 29, 2013
8567045 Process to manufacture a magnetic write head Oct. 29, 2013

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