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Class Information
Number: 216/40
Name: Etching a substrate: processes > Forming pattern using lift off technique
Description: Process directed to placing a mask on a substrate, coating, or depositing material over the mask and substrate, then removing the mask to remove the deposited layer on the mask, thus leaving the deposited layer in a pattern where the mask was not present, and etching using the pattern as a mask.


Patents under this class:
1 2 3

Patent Number Title Of Patent Date Issued
7384568 Method of forming a darkfield etch mask Jun. 10, 2008
7375012 Method of forming multilayer film May. 20, 2008
7354521 Method of fabricating inkjet print head using photocurable resin composition Apr. 8, 2008
7334317 Method of forming magnetoresistive junctions in manufacturing MRAM cells Feb. 26, 2008
7323113 Pattern transfer with self-similar sacrificial mask layer and vector magnetic field sensor Jan. 29, 2008
7316783 Method of wiring formation and method for manufacturing electronic components Jan. 8, 2008
7316784 Method of patterning transparent conductive film, thin film transistor substrate using the same and fabricating method thereof Jan. 8, 2008
7313857 Method of manufacturing a magneto-resistive device Jan. 1, 2008
7311850 Method of forming patterned thin film and method of fabricating micro device Dec. 25, 2007
7291282 Method of fabricating a mold for imprinting a structure Nov. 6, 2007
7270758 Method to improve ability to perform CMP-assisted liftoff for trackwidth definition Sep. 18, 2007
7244368 Manufacturing process of a magnetic head, magnetic head, pattern formation method Jul. 17, 2007
7235141 Lift-off method and chemical liquid tank Jun. 26, 2007
7195715 Method for manufacturing quartz oscillator Mar. 27, 2007
7178222 Method of manufacturing a tunneling magnetoresistive element Feb. 20, 2007
7168155 Method of manufacturing an integrated thin film head Jan. 30, 2007
7118680 Self-alignment scheme for enhancement of CPP-GMR Oct. 10, 2006
7100270 Method of fabricating a thin film integrated circuit with thick film resistors Sep. 5, 2006
7090783 Lithography-based patterning of layer-by-layer nano-assembled thin films Aug. 15, 2006
7043823 Method of manufacturing a current-perpendicular-to-plane magnetoresistive device with oxidized free layer side regions May. 16, 2006
7041228 Substrate for and a process in connection with the product of structures May. 9, 2006
6996894 Methods of making magnetic heads with improved contiguous junctions Feb. 14, 2006
6994884 High performance fuel cell electrode and method for manufacturing same Feb. 7, 2006
6968613 Fabrication method of circuit board Nov. 29, 2005
6962630 Lift-off method and chemical liquid tank Nov. 8, 2005
6958123 Method for removing a sacrificial material with a compressed fluid Oct. 25, 2005
6955767 Scanning probe based lithographic alignment Oct. 18, 2005
6926840 Flexible frame for mounting a deposition mask Aug. 9, 2005
6890447 Method of forming noble metal thin film pattern May. 10, 2005
6872319 Process for high yield fabrication of MEMS devices Mar. 29, 2005
6872321 Direct positive image photo-resist transfer of substrate design Mar. 29, 2005
6852550 MRAM sense layer area control Feb. 8, 2005
6808641 Method of wiring formation and method for manufacturing electronic components Oct. 26, 2004
6719918 Method of reducing notching during reactive ion etching Apr. 13, 2004
6706202 Method for shaped optical MEMS components with stressed thin films Mar. 16, 2004
6699396 Methods for electroplating large copper interconnects Mar. 2, 2004
6689283 Dry etching method, microfabrication process and dry etching mask Feb. 10, 2004
6686128 Method of fabricating patterned layers of material upon a substrate Feb. 3, 2004
6680214 Artificial band gap Jan. 20, 2004
6679996 Metal oxide pattern forming method Jan. 20, 2004
6624080 Method of fabricating nickel etching mask Sep. 23, 2003
6606782 Method of forming a continuous free layer spin valve sensor with patterned exchange underlayer stabilization Aug. 19, 2003
6565763 Method for manufacturing porous structure and method for forming pattern May. 20, 2003
6550131 Method for making a thin-film magnetic head Apr. 22, 2003
6544430 Methods for detaching a layer from a substrate Apr. 8, 2003
6495311 Bilayer liftoff process for high moment laminate Dec. 17, 2002
6485894 Method to self-align a lithographic pattern to a workpiece Nov. 26, 2002
6447689 Protective layer for continuous GMR design using reverse photo mask Sep. 10, 2002
6428714 Protective layer for continuous GMR design Aug. 6, 2002
6416677 Narrow track stitched GMR head Jul. 9, 2002

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