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Class Information
Number: 216/40
Name: Etching a substrate: processes > Forming pattern using lift off technique
Description: Process directed to placing a mask on a substrate, coating, or depositing material over the mask and substrate, then removing the mask to remove the deposited layer on the mask, thus leaving the deposited layer in a pattern where the mask was not present, and etching using the pattern as a mask.

Patents under this class:
1 2 3 4

Patent Number Title Of Patent Date Issued
8673161 Structure formation using metal deposited on a RIE-able seedlayer Mar. 18, 2014
8661634 Method of manufacturing a flexible piezoelectric device Mar. 4, 2014
8628673 Resin composition for pattern formation, pattern formation method and process for producing light-emitting element Jan. 14, 2014
8603347 Method for forming recess defect on carbon nanotube Dec. 10, 2013
8585918 Method of etching a silicon-based material Nov. 19, 2013
8580127 Method of manufacturing RFID based thermal bubble type accelerometer Nov. 12, 2013
8562842 Methods of fabricating nanoimprint stamp Oct. 22, 2013
8555486 Method for providing a pole in a magnetic recording transducer using a cathodic etch Oct. 15, 2013
8551353 Hierarchical structure and manufacturing method thereof Oct. 8, 2013
8551347 Methods for creating a stepped perpendicular magnetic pole via milling and/or metal liftoff Oct. 8, 2013
8512588 Method of fabricating a scalable nanoporous membrane filter Aug. 20, 2013
8512583 Method using block copolymers and a hard electroplated mask for making a master disk for nanoimprinting patterned magnetic recording disks Aug. 20, 2013
8512585 Template pillar formation Aug. 20, 2013
8470189 Method of forming mask pattern, method of forming thin film pattern and method of forming magnetoresistive element Jun. 25, 2013
8454847 Method of lifting off and fabricating array substrate for liquid crystal display device using the same Jun. 4, 2013
8455278 Method of forming a waveguide in diamond Jun. 4, 2013
8431034 Manufacturing of nanopores Apr. 30, 2013
8414786 Planar heater stack and method for making planar heater stack with cavity within planar heater substrata above substrate Apr. 9, 2013
8415000 Patterned inorganic layers, radiation based patterning compositions and corresponding methods Apr. 9, 2013
8409450 Graphene-based structure, method of suspending graphene membrane, and method of depositing material onto graphene membrane Apr. 2, 2013
8404600 Method for forming fine pitch structures Mar. 26, 2013
8388852 Method for fabricating touch sensor panels Mar. 5, 2013
8375565 Method for providing an electronic lapping guide corresponding to a near-field transducer of an energy assisted magnetic recording transducer Feb. 19, 2013
8372296 Manufacturing method for a thermal head Feb. 12, 2013
8336194 Method of fabricating a tunneling magnetoresistive (TMR) reader Dec. 25, 2012
8303828 Method for manufacturing magnetic recording medium and magnetic recording-reproducing apparatus Nov. 6, 2012
8233248 Method and system for providing a magnetic recording transducer using a line hard mask Jul. 31, 2012
8223330 Nanostructures and lithographic method for producing highly sensitive substrates for surface-enhanced spectroscopy Jul. 17, 2012
8206602 Method of manufacturing magnetic recording medium Jun. 26, 2012
8187479 Manufacturing method of printed circuit board May. 29, 2012
8176622 Process for manufacturing a magnetic tunnel junction (MTJ) device May. 15, 2012
8163185 Method and apparatus for lifting off photoresist beneath an overlayer Apr. 24, 2012
8128830 Labeling an imprint lithography template Mar. 6, 2012
8123966 Piezoelectric electronic component, process for producing the same, and communication apparatus Feb. 28, 2012
8123967 Method of producing an article having patterned decorative coating Feb. 28, 2012
8114777 Horizontal nanotube/nanofiber growth method Feb. 14, 2012
8083959 Substrate processing method, substrate processing system, and computer-readable storage medium Dec. 27, 2011
8083957 Decorative material, method for producing decorative material, and molded article Dec. 27, 2011
8075792 Nanoparticle-based etching of silicon surfaces Dec. 13, 2011
8070968 Ultraviolet-curable resin material for pattern transfer and magnetic recording medium manufacturing method using the same Dec. 6, 2011
8057689 Method of manufacturing magnetic recording medium Nov. 15, 2011
8029682 Method of manufacturing magnetic recording medium Oct. 4, 2011
8025776 Glass electrophoresis microchip and method of manufacturing the same by MEMS fabrication Sep. 27, 2011
8012361 Method of manufacturing magnetic recording medium Sep. 6, 2011
7996984 Process for making a FBAR bandpass filter Aug. 16, 2011
7993972 Wafer level die integration and method therefor Aug. 9, 2011
7988871 Method of lifting off and fabricating array substrate for liquid crystal display device using the same Aug. 2, 2011
7887710 Method of patterning transparent conductive film, thin film transistor substrate using the same and fabricating method thereof Feb. 15, 2011
7846344 Method and device for modulating light Dec. 7, 2010
7807064 Halogen-free amorphous carbon mask etch having high selectivity to photoresist Oct. 5, 2010

1 2 3 4

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