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Class Information
Number: 216/37
Name: Etching a substrate: processes > Etching and coating occur in the same processing chamber
Description: Process wherein etching and coating occur in the same vessel.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7608544 |
Etching method and storage medium |
Oct. 27, 2009 |
| 7601643 |
Arrangement and method for fabricating a semiconductor wafer |
Oct. 13, 2009 |
| 7595005 |
Method and apparatus for ashing a substrate using carbon dioxide |
Sep. 29, 2009 |
| 7579284 |
Etching solution, method of forming a pattern using the same, method of manufacturing a multiple gate oxide layer using the same and method of manufacturing a flash memory device using the sam |
Aug. 25, 2009 |
| 7560038 |
Thin film forming method and system |
Jul. 14, 2009 |
| 7540970 |
Methods of fabricating a semiconductor device |
Jun. 2, 2009 |
| 7541292 |
Plasma etch process with separately fed carbon-lean and carbon-rich polymerizing etch gases in independent inner and outer gas injection zones |
Jun. 2, 2009 |
| 7531102 |
Simultaneous selective polymer deposition and etch pitch doubling for sub 50nm line/space patterning |
May. 12, 2009 |
| 7527741 |
Microreactor including magnetic barrier |
May. 5, 2009 |
| 7514013 |
Devices with thermoelectric and thermodiodic characteristics and methods for manufacturing same |
Apr. 7, 2009 |
| 7509962 |
Method and control system for treating a hafnium-based dielectric processing system |
Mar. 31, 2009 |
| 7494594 |
Method of manufacturing an electrostatic actuator |
Feb. 24, 2009 |
| 7491343 |
Line end shortening reduction during etch |
Feb. 17, 2009 |
| 7485579 |
Method of manufacturing a semiconductor device |
Feb. 3, 2009 |
| 7481943 |
Method suitable for etching hydrophillic trenches in a substrate |
Jan. 27, 2009 |
| 7459097 |
Method of forming a conductive pattern |
Dec. 2, 2008 |
| 7459098 |
Dry etching apparatus, dry etching method, and plate and tray used therein |
Dec. 2, 2008 |
| 7456109 |
Method for cleaning substrate processing chamber |
Nov. 25, 2008 |
| 7455753 |
Thin film stent |
Nov. 25, 2008 |
| 7438822 |
Apparatus and method for shielding a wafer from charged particles during plasma etching |
Oct. 21, 2008 |
| 7438824 |
Fabrication of long range periodic nanostructures in transparent or semitransparent dielectrics |
Oct. 21, 2008 |
| 7416675 |
Method of fabricating inkjet print heads |
Aug. 26, 2008 |
| 7413990 |
Method of fabricating a dual damascene interconnect structure |
Aug. 19, 2008 |
| 7407597 |
Line end shortening reduction during etch |
Aug. 5, 2008 |
| 7402261 |
Slurry compositions, methods of preparing slurry compositions, and methods of polishing an object using slurry compositions |
Jul. 22, 2008 |
| 7399709 |
Complementary replacement of material |
Jul. 15, 2008 |
| 7396476 |
Method for reducing harmonic distortion in comb drive devices |
Jul. 8, 2008 |
| 7368393 |
Chemical oxide removal of plasma damaged SiCOH low k dielectrics |
May. 6, 2008 |
| 7361605 |
System and method for removal of photoresist and residues following contact etch with a stop layer present |
Apr. 22, 2008 |
| 7357873 |
Polymide thin film self-assembly process |
Apr. 15, 2008 |
| 7354522 |
Substrate etching method for forming connected features |
Apr. 8, 2008 |
| 7354525 |
Specimen surface processing apparatus and surface processing method |
Apr. 8, 2008 |
| 7347953 |
Methods for forming improved self-assembled patterns of block copolymers |
Mar. 25, 2008 |
| 7341672 |
Method of fabricating printhead for ejecting ink supplied under pulsed pressure |
Mar. 11, 2008 |
| 7329366 |
Method of polishing implantable medical devices to lower thrombogenecity and increase mechanical stability |
Feb. 12, 2008 |
| 7323115 |
Substrate processing method and ink jet recording head substrate manufacturing method |
Jan. 29, 2008 |
| 7309515 |
Method for fabricating an imprint mold structure |
Dec. 18, 2007 |
| 7306745 |
Method and apparatus for stabilizing a plasma |
Dec. 11, 2007 |
| 7282158 |
Method of processing a workpiece |
Oct. 16, 2007 |
| 7279112 |
Method of manufacture of smart microfluidic medical device with universal coating |
Oct. 9, 2007 |
| 7279424 |
Method for fabricating thin film magnetic heads using CMP with polishing stop layer |
Oct. 9, 2007 |
| 7271105 |
Method for making a micro-fluid ejection device |
Sep. 18, 2007 |
| 7270758 |
Method to improve ability to perform CMP-assisted liftoff for trackwidth definition |
Sep. 18, 2007 |
| 7268082 |
Highly selective nitride etching employing surface mediated uniform reactive layer films |
Sep. 11, 2007 |
| 7264741 |
Coater having substrate cleaning device and coating deposition methods employing such coater |
Sep. 4, 2007 |
| 7264677 |
Process for treating solid surface and substrate surface |
Sep. 4, 2007 |
| 7258807 |
Controlled growth of gallium nitride nanostructures |
Aug. 21, 2007 |
| 7229925 |
Methods of forming a pattern for a semiconductor device |
Jun. 12, 2007 |
| 7192531 |
In-situ plug fill |
Mar. 20, 2007 |
| 7169440 |
Method for removing photoresist and etch residues |
Jan. 30, 2007 |
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