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Class Information
Number: 216/2
Name: Etching a substrate: processes > Etching of semiconductor material to produce an article having a nonelectrical function
Description: Process of etching a semiconductive precursor, substrate, or device to produce an article whose function is not related to the conduction of electricity.

Patents under this class:

Patent Number Title Of Patent Date Issued
RE39143 Method for making a wafer-pair having sealed chambers Jun. 27, 2006
7063796 Micromechanical component and method for producing the same Jun. 20, 2006
7063798 Method for realizing microchannels in an integrated structure Jun. 20, 2006
7060197 Micromechanical mass flow sensor and method for the production thereof Jun. 13, 2006
7052616 Fabrication of molecular scale devices using fluidic assembly May. 30, 2006
7052617 Simplified etching technique for producing multiple undercut profiles May. 30, 2006
7054052 Adhesive sacrificial bonding of spatial light modulators May. 30, 2006
7049164 Microelectronic mechanical system and methods May. 23, 2006
7045052 Method of manufacturing a spectral filter for green and longer wavelengths May. 16, 2006
7045069 Microfabrication method based on metal matrix composite technology May. 16, 2006
7045278 Corner cube array and method of making the corner cube array May. 16, 2006
7041224 Method for vapor phase etching of silicon May. 9, 2006
7041225 Micromechanical component and method for producing the same May. 9, 2006
7037438 Method for production of a semiconductor component and a semiconductor component produced by said method May. 2, 2006
7034982 Method of improving the performance of microstructures Apr. 25, 2006
7034984 Fabrication of a high fill ratio reflective spatial light modulator with hidden hinge Apr. 25, 2006
7035496 Drive unit for optical switch Apr. 25, 2006
7033514 Method and apparatus for micromachining using a magnetic field and plasma etching Apr. 25, 2006
7033515 Method for manufacturing microstructure Apr. 25, 2006
7033519 Method of fabricating sub-micron structures in transparent dielectric materials Apr. 25, 2006
7029830 Precision and apertures for lithographic systems Apr. 18, 2006
7027703 Method for forming and apparatus comprising optical waveguides leading to a free space coupler region Apr. 11, 2006
7022244 Method and apparatus for generation of fine particles Apr. 4, 2006
7022245 Fabrication of a reflective spatial light modulator Apr. 4, 2006
7022249 Method for making an optical micromirror and micromirror or array of micromirrors obtained by said method Apr. 4, 2006
7018548 Conductive thin film pattern and method of forming the same, method of manufacturing thin film magnetic head, method of manufacturing thin film inductor, and method of manufacturing micro devi Mar. 28, 2006
7018549 Method of fabricating multiple nanowires of uniform length from a single catalytic nanoparticle Mar. 28, 2006
7018550 Method for fabricating an isolated microelectromechanical system (MEMS) device using an internal void Mar. 28, 2006
7018575 Method for assembly of complementary-shaped receptacle site and device microstructures Mar. 28, 2006
7018580 Method and apparatus for forming tapered waveguide structures Mar. 28, 2006
7014115 MEMS scanning mirror with distributed hinges and multiple support attachments Mar. 21, 2006
7014786 Methods and apparatus for forming submicron patterns on films Mar. 21, 2006
7005193 Method of adding mass to MEMS structures Feb. 28, 2006
7000298 Method a quartz sensor Feb. 21, 2006
6998059 Method for manufacturing a silicon sensor and a silicon sensor Feb. 14, 2006
6986202 Method of fabricating a micro-electromechanical fluid ejection device Jan. 17, 2006
6986609 Optical module and method for manufacturing the same Jan. 17, 2006
6984332 Method for making a micro-electro-mechanical gyroscope Jan. 10, 2006
6984436 Graded material and method for synthesis thereof and method for processing thereof Jan. 10, 2006
6979406 Cantilever-type near-field probe for optical data storage and method of manufacturing the same Dec. 27, 2005
6979407 Process for producing an SPM sensor Dec. 27, 2005
6974549 Method for forming fine grooves and stamper and structure with fine grooves Dec. 13, 2005
6969470 Method for fabricating ESI device using smile and delayed LOCOS techniques Nov. 29, 2005
6969473 Manufacturing a liquid ejection device Nov. 29, 2005
6964086 Method of manufacturing thin film piezoelectric element, and element housing jig Nov. 15, 2005
6964804 Micromachined structures made by combined wet and dry etching Nov. 15, 2005
6960305 Methods for forming and releasing microelectromechanical structures Nov. 1, 2005
6958123 Method for removing a sacrificial material with a compressed fluid Oct. 25, 2005
6958124 SPM sensor and process for producing it Oct. 25, 2005
6949199 Heat-transfer-stamp process for thermal imprint lithography Sep. 27, 2005

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