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Class Information
Number: 216/2
Name: Etching a substrate: processes > Etching of semiconductor material to produce an article having a nonelectrical function
Description: Process of etching a semiconductive precursor, substrate, or device to produce an article whose function is not related to the conduction of electricity.

Patents under this class:

Patent Number Title Of Patent Date Issued
7365012 Etching method, a method of forming a trench isolation structure, a semiconductor substrate and a semiconductor apparatus Apr. 29, 2008
7361524 Method of manufacturing floating structure Apr. 22, 2008
7361278 Process for producing mass transfer device and apparatus for production thereof Apr. 22, 2008
7357874 Staggered vertical comb drive fabrication method Apr. 15, 2008
7357873 Polymide thin film self-assembly process Apr. 15, 2008
7354522 Substrate etching method for forming connected features Apr. 8, 2008
7345289 Sample support prepared by semiconductor silicon process technique Mar. 18, 2008
7329361 Method and apparatus for fabricating or altering microstructures using local chemical alterations Feb. 12, 2008
7323111 Angle control of multi-cavity molded components for MEMS and NEMS group assembly Jan. 29, 2008
7318903 Photonic sensor particles and fabrication methods Jan. 15, 2008
7311503 Micromachined fluidic device and method for making same Dec. 25, 2007
7306966 Method for producing a semiconductor component and a semiconductor component, especially a membrane sensor Dec. 11, 2007
7303935 High temperature microelectromechanical (MEM) devices and fabrication method Dec. 4, 2007
7301692 Micro mirror and method for fabricating the same Nov. 27, 2007
7297568 Three-dimensional structural body composed of silicon fine wire, its manufacturing method, and device using same Nov. 20, 2007
7294280 External cavity semi-conductor laser and method for fabrication thereof Nov. 13, 2007
7294279 Method for releasing a micromechanical structure Nov. 13, 2007
7285844 Multiple internal seal right micro-electro-mechanical system vacuum package Oct. 23, 2007
7279113 Method of forming a compliant template for UV imprinting Oct. 9, 2007
7279112 Method of manufacture of smart microfluidic medical device with universal coating Oct. 9, 2007
7279110 Method and apparatus for creating a phase step in mirrors used in spatial light modulator arrays Oct. 9, 2007
7276172 Method for preparing a nanowire crossbar structure and use of a structure prepared by this method Oct. 2, 2007
7271105 Method for making a micro-fluid ejection device Sep. 18, 2007
7271104 Method for dry etching fluid feed slots in a silicon substrate Sep. 18, 2007
7267781 Method of fabricating optical filters Sep. 11, 2007
7267779 Thermally efficient micromachined device Sep. 11, 2007
7262068 Microneedle array module and method of fabricating the same Aug. 28, 2007
7261826 Electrostatic actuator for microelectromechanical systems and methods of fabrication Aug. 28, 2007
7261825 Method for the production of a micromechanical device, particularly a micromechanical oscillating mirror device Aug. 28, 2007
7261824 Method of fabrication of a microfluidic device Aug. 28, 2007
7258806 Method of fabricating a diaphragm of a capacitive microphone device Aug. 21, 2007
7258805 Micro needles and method of manufacture thereof Aug. 21, 2007
7255800 Wet etching process Aug. 14, 2007
7255799 Method for selectively covering a micro machined surface Aug. 14, 2007
7250139 Nanotipped device and method Jul. 31, 2007
7250113 Method for manufacturing liquid ejection head Jul. 31, 2007
7250112 Method of making an X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging Jul. 31, 2007
7247247 Selective etching method Jul. 24, 2007
7247246 Vertical integration of a MEMS structure with electronics in a hermetically sealed cavity Jul. 24, 2007
7245416 Fabrication of a high fill ratio reflective spatial light modulator with hidden hinge Jul. 17, 2007
7244367 Metal alloy elements in micromachined devices Jul. 17, 2007
7241394 Process of fabricating polymer sustained microelectrodes Jul. 10, 2007
7238621 Integrated optical MEMS devices Jul. 3, 2007
7238291 Method for removing oxides from a Ge semiconductor substrate surface Jul. 3, 2007
7235184 Solid state membrane channel device for the measurement and characterization of atomic and molecular sized samples Jun. 26, 2007
7221495 Thin film precursor stack for MEMS manufacturing May. 22, 2007
7217369 Meso-microelectromechanical system having a glass beam and method for its fabrication May. 15, 2007
7214324 Technique for manufacturing micro-electro mechanical structures May. 8, 2007
7208094 Methods of bridging lateral nanowires and device using same Apr. 24, 2007
7204932 Polarization rotators Apr. 17, 2007

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