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Class Information
Number: 216/2
Name: Etching a substrate: processes > Etching of semiconductor material to produce an article having a nonelectrical function
Description: Process of etching a semiconductive precursor, substrate, or device to produce an article whose function is not related to the conduction of electricity.

Patents under this class:

Patent Number Title Of Patent Date Issued
7507346 Method for manufacturing electronic component, and electronic component Mar. 24, 2009
7504644 Method and devices for producing corpuscular radiation systems Mar. 17, 2009
7501069 Flexible structures for sensors and electronics Mar. 10, 2009
7501068 Method for manufacturing resonator Mar. 10, 2009
7497958 Methods of forming capacitors Mar. 3, 2009
7494594 Method of manufacturing an electrostatic actuator Feb. 24, 2009
7494593 Method for forming a cantilever and tip Feb. 24, 2009
7482587 Circular silicon substrates with thin film membranes for electron microscopy Jan. 27, 2009
7481943 Method suitable for etching hydrophillic trenches in a substrate Jan. 27, 2009
7479233 Mask blank for charged particle beam exposure, method of forming mask blank and mask for charged particle beam exposure Jan. 20, 2009
7479232 Method for producing a semiconductor component and a semiconductor component produced according to the method Jan. 20, 2009
7476951 Selective isotropic etch for titanium-based materials Jan. 13, 2009
7476327 Method of manufacture for microelectromechanical devices Jan. 13, 2009
7473533 Membrane arrays and methods of manufacture Jan. 6, 2009
7470631 Methods for fabricating residue-free contact openings Dec. 30, 2008
7468138 Flexural plate wave sensor Dec. 23, 2008
7466022 Wafer-level seal for non-silicon-based devices Dec. 16, 2008
7462292 Silicon carbide imprint stamp Dec. 9, 2008
7459399 Method for manufacturing probe structure of probe card Dec. 2, 2008
7459094 Method for making a surface acoustic wave device package Dec. 2, 2008
7459093 MEMS mirror made from topside and backside etching of wafer Dec. 2, 2008
7455884 Atomic layer deposition with point of use generated reactive gas species Nov. 25, 2008
7449122 Micro-fabricated electrokinetic pump Nov. 11, 2008
7445119 Chip receptacle, method for fabricating a chip receptacle and chip transport container Nov. 4, 2008
7443002 Encapsulated microstructure and method of producing one such microstructure Oct. 28, 2008
7442924 Repetitive circumferential milling for sample preparation Oct. 28, 2008
7442652 Method for removing contamination and method for fabricating semiconductor device Oct. 28, 2008
7442303 Microporous filter membrane, method of making microporous filter membrane and separator employing microporous filter membranes Oct. 28, 2008
7441444 AFM cantilevers and methods for making and using same Oct. 28, 2008
7435355 Liquid-based gravity-driven etching-stop technique for controlling structure dimension Oct. 14, 2008
7431853 Selective etching of oxides from substrates Oct. 7, 2008
7428094 Fabrication of a high fill ratio reflective spatial light modulator with hidden hinge Sep. 23, 2008
7425276 Method for etching microchannel networks within liquid crystal polymer substrates Sep. 16, 2008
7422696 Multicomponent nanorods Sep. 9, 2008
7418166 Device and approach for integration of optical devices and waveguides therefor Aug. 26, 2008
7410901 Submicron device fabrication Aug. 12, 2008
7410590 Transferable micro spring structure Aug. 12, 2008
7399652 Method for manufacturing a micro-electro-mechanical device, in particular an optical microswitch, and micro-electro-mechanical device thus obtained Jul. 15, 2008
7399422 System and method for forming nanodisks used in imprint lithography and nanodisk and memory disk formed thereby Jul. 15, 2008
7396478 Multiple internal seal ring micro-electro-mechanical system vacuum packaging method Jul. 8, 2008
7396477 Method for manufacturing a thermal interface material Jul. 8, 2008
7396476 Method for reducing harmonic distortion in comb drive devices Jul. 8, 2008
7396475 Method of forming stepped structures employing imprint lithography Jul. 8, 2008
7387742 Silicon blades for surgical and non-surgical use Jun. 17, 2008
7387737 Method for fabricating an isolated microelectromechanical system (MEMS) device using an internal void Jun. 17, 2008
7381344 Method to reduce particle level for dry-etch Jun. 3, 2008
7380320 Piezoelectric device and method of manufacturing the device Jun. 3, 2008
7378346 Integrated multi-wavelength Fabry-Perot filter and method of fabrication May. 27, 2008
7375874 Light modulator with integrated drive and control circuitry May. 20, 2008
7365405 Metrology structure and methods Apr. 29, 2008

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