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Class Information
Number: 216/2
Name: Etching a substrate: processes > Etching of semiconductor material to produce an article having a nonelectrical function
Description: Process of etching a semiconductive precursor, substrate, or device to produce an article whose function is not related to the conduction of electricity.

Patents under this class:

Patent Number Title Of Patent Date Issued
7771790 Method and system for fabricating a nano-structure Aug. 10, 2010
7767101 Method for fabricating probe for use in scanning probe microscope Aug. 3, 2010
7767099 Sub-lithographic interconnect patterning using self-assembling polymers Aug. 3, 2010
7755825 Method of fabricating an optical modulator Jul. 13, 2010
7738753 CMOS compatible integrated dielectric optical waveguide coupler and fabrication Jun. 15, 2010
7736929 Thin film microshells incorporating a getter layer Jun. 15, 2010
7728485 Bulk acoustic wave device and a method of its manufacturing Jun. 1, 2010
7723143 Method for manufacturing cantilever structure of probe card May. 25, 2010
7718457 Method for producing a MEMS device May. 18, 2010
7718077 Fabricating a structure usable in an imprint lithographic process May. 18, 2010
7703313 Conformal film micro-channels for a fluidic micro analyzer Apr. 27, 2010
7686970 Imprint lithography Mar. 30, 2010
7686967 Temperature controlled microfabricated two-pin liquid sample dispensing system Mar. 30, 2010
7678587 Cantilever-type probe and method of fabricating the same Mar. 16, 2010
7678289 Metrology structure and methods Mar. 16, 2010
7674389 Precision shape modification of nanodevices with a low-energy electron beam Mar. 9, 2010
7666319 Semiconductor etching process to release single crystal silicon mirrors Feb. 23, 2010
7655538 MEMS device and interposer and method for integrating MEMS device and interposer Feb. 2, 2010
7655075 Filter element and method for the production thereof Feb. 2, 2010
7641806 Manufacturing method for membrane member Jan. 5, 2010
7632417 Method for forming nanostructure having high aspect ratio and method for forming nanopattern using the same Dec. 15, 2009
7630596 Silicon structure and method of manufacturing the same Dec. 8, 2009
7625603 Crack and residue free conformal deposited silicon oxide with predictable and uniform etching characteristics Dec. 1, 2009
7618548 Silicon-containing structure with deep etched features, and method of manufacture Nov. 17, 2009
7606132 Cantilever-type near-field probe for optical data storage and method of manufacturing the same Oct. 20, 2009
7604749 Techniques of anisotropic wet etch micromachining for comb drive transducers and resonance frequency reduction Oct. 20, 2009
7601620 Methods for fabricating nanocoils Oct. 13, 2009
7597819 Redox buffered hydrofluoric acid etchant for the reduction of galvanic attack during release etching of MEMS devices having noble material films Oct. 6, 2009
7595539 Method for release of surface micromachined structures in an epitaxial reactor Sep. 29, 2009
7595206 Manufacturing method for semiconductor light emitting device Sep. 29, 2009
7585417 Method of fabricating a diaphragm of a capacitive microphone device Sep. 8, 2009
7581645 Method for manufacturing carbon nanotubes with desired length Sep. 1, 2009
7572300 Monolithic high aspect ratio nano-size scanning probe microscope (SPM) tip formed by nanowire growth Aug. 11, 2009
7563722 Method of making a textured surface Jul. 21, 2009
7563382 Mask and method of fabricating the same, and method of machining material Jul. 21, 2009
7563379 Dry etching method and photonic crystal device fabricated by use of the same Jul. 21, 2009
7562429 Suspended device and method of making Jul. 21, 2009
7560040 Etching method and article etched molded by that method Jul. 14, 2009
7560036 System and method for drug delivery and microfluidic applications using microneedles Jul. 14, 2009
7541007 Microreactor and method of use to produce hydrogen by methanol reforming Jun. 2, 2009
7540968 Micro movable device and method of making the same using wet etching Jun. 2, 2009
7538927 MEMS mirror with short vertical comb teeth and long in-plane comb teeth May. 26, 2009
7524430 Fluid ejection device structures and methods therefor Apr. 28, 2009
7524427 Electrochemical fabrication methods incorporating dielectric materials and/or using dielectric substrates Apr. 28, 2009
7520998 Method of fabricating micro actuator having media stage Apr. 21, 2009
7517462 Electrochemical fabrication methods incorporating dielectric materials and/or using dielectric substrates Apr. 14, 2009
7514283 Method of fabricating electromechanical device having a controlled atmosphere Apr. 7, 2009
7514012 Pre-oxidization of deformable elements of microstructures Apr. 7, 2009
7511282 Sample preparation Mar. 31, 2009
7510663 Method for manufacturing organic molecular device Mar. 31, 2009

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