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Class Information
Number: 216/2
Name: Etching a substrate: processes > Etching of semiconductor material to produce an article having a nonelectrical function
Description: Process of etching a semiconductive precursor, substrate, or device to produce an article whose function is not related to the conduction of electricity.

Patents under this class:

Patent Number Title Of Patent Date Issued
8000001 Method of forming polymeric microarray support Aug. 16, 2011
7998356 Optical integrated device manufacturing process Aug. 16, 2011
7998355 CPL mask and a method and program product for generating the same Aug. 16, 2011
7997123 Nanotipped device and method Aug. 16, 2011
7993534 Chemical microreactor and method thereof Aug. 9, 2011
7988875 Differential etch rate control of layers deposited by chemical vapor deposition Aug. 2, 2011
7981303 Method of manufacturing monocrystalline silicon micromirrors Jul. 19, 2011
7976714 Single SOI wafer accelerometer fabrication process Jul. 12, 2011
7973373 Microminiature moving device Jul. 5, 2011
7968017 Stamper for optical disc, method for manufacturing optical disc, and optical disc Jun. 28, 2011
7951299 Method of fabricating a microresonator May. 31, 2011
7950847 Breguet overcoil balance spring made of micro-machinable material May. 31, 2011
7947589 FinFET formation with a thermal oxide spacer hard mask formed from crystalline silicon layer May. 24, 2011
7939355 Single-mask fabrication process for linear and angular piezoresistive accelerometers May. 10, 2011
7938975 Method for making a micro-fluid ejection device May. 10, 2011
7935556 Microelectromechanical system and process of making the same May. 3, 2011
7931844 Imprint lithography Apr. 26, 2011
7925125 Microfluidic detection device having reduced dispersion and method for making same Apr. 12, 2011
7922922 Ink jet print head manufacturing method and ink jet print head Apr. 12, 2011
7919006 Method of anti-stiction dimple formation under MEMS Apr. 5, 2011
7916986 Erbium-doped silicon nanocrystalline embedded silicon oxide waveguide Mar. 29, 2011
7913544 Scanning probe devices and methods for fabricating same Mar. 29, 2011
7895885 Method and system for nanoknife and MEMS platform Mar. 1, 2011
7892440 Wet etching process Feb. 22, 2011
7875194 Method for manufacturing hydrogen sensors using Pd nano wire Jan. 25, 2011
7875193 Method for manufacturing probe structure of probe card Jan. 25, 2011
7871936 Method of manufacturing active matrix display device Jan. 18, 2011
7871529 System for fabricating nanocoils using a wet etch technique Jan. 18, 2011
7867405 Process for producing microfluidic arrangements from a plate-shaped composite structure Jan. 11, 2011
7862732 Method for forming micro lenses and semiconductor device including the micro lenses Jan. 4, 2011
7862731 Method for producing insulation structures Jan. 4, 2011
7850861 Microfluidic device, and related methods Dec. 14, 2010
7833425 Method for fabricating micro and nano structures Nov. 16, 2010
7833405 Micromechanical component and corresponding production method Nov. 16, 2010
7829364 Method of fabricating a suspension microstructure Nov. 9, 2010
7828981 Semiconductor probe with high resolution resistive tip and method of fabricating the same Nov. 9, 2010
7824561 Method for manufacturing probe structure Nov. 2, 2010
7824560 Manufacturing method for ink jet recording head chip, and manufacturing method for ink jet recording head Nov. 2, 2010
7820063 Micromirror device and a method of making the same Oct. 26, 2010
7817331 MEMS device with an angular vertical comb actuator Oct. 19, 2010
7807061 Optical gas concentration detector and method of producing structure used in the detector Oct. 5, 2010
7799699 Printable semiconductor structures and related methods of making and assembling Sep. 21, 2010
7795063 Micro-electro-mechanical systems (MEMS) device and process for fabricating the same Sep. 14, 2010
7794611 Micropump for integrated device for biological analyses Sep. 14, 2010
7794610 Optical components and production thereof Sep. 14, 2010
7790045 Formation of close-packed sphere arrays in V-shaped grooves Sep. 7, 2010
7785485 System and method for creating linear and non-linear trenches in silicon and other crystalline materials with a router Aug. 31, 2010
7785481 Method for fabricating micromachined structures Aug. 31, 2010
7785459 Microneedles and methods of fabricating Aug. 31, 2010
7776749 Methods of forming semiconductor constructions Aug. 17, 2010

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