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Class Information
Number: 216/2
Name: Etching a substrate: processes > Etching of semiconductor material to produce an article having a nonelectrical function
Description: Process of etching a semiconductive precursor, substrate, or device to produce an article whose function is not related to the conduction of electricity.

Patents under this class:

Patent Number Title Of Patent Date Issued
8262916 Enhanced methods for at least partial in situ release of sacrificial material from cavities or channels and/or sealing of etching holes during fabrication of multi-layer microscale or millimet Sep. 11, 2012
8261368 Nanomanufacturing devices and methods Sep. 4, 2012
8231795 Micromachined horn Jul. 31, 2012
8226836 Mirror and mirror layer for optical modulator and method Jul. 24, 2012
8216482 Method of manufacturing inkjet printhead Jul. 10, 2012
8216434 MEMS vascular sensor Jul. 10, 2012
8211321 Method for fabricating micro and nano structures Jul. 3, 2012
8202437 Method for producing a photonic crystal Jun. 19, 2012
8202433 Reducing adherence in a MEMS device Jun. 19, 2012
8202382 Method for manufacturing micro movable element Jun. 19, 2012
8197701 Diamond film deposition and probes Jun. 12, 2012
8192638 Method for manufacturing multiple layers of waveguides Jun. 5, 2012
8182703 Tuning fork resonator element and tuning fork resonator May. 22, 2012
8159056 Package for an electronic device Apr. 17, 2012
8158075 Etching solution reproducing apparatus and etching solution reproduction method Apr. 17, 2012
8147914 Orientation-controlled self-assembled nanolithography using a block copolymer Apr. 3, 2012
8142672 Manufacturing method of opto-electric hybrid board Mar. 27, 2012
8142670 Micro-oscillating element and method of making the same Mar. 27, 2012
8142669 Electromechanical element, electric circuit device and production method of those Mar. 27, 2012
8138088 Manufacturing method of structure by imprint Mar. 20, 2012
8137572 Reflective planar lightwave circuit waveguide Mar. 20, 2012
8137569 Method of fabricating a membrane having a tapered pore Mar. 20, 2012
8123963 Method for producing a semiconductor component and a semiconductor component produced according to the method Feb. 28, 2012
8123962 Alternating self-assembling morphologies of diblock copolymers controlled by variations in surfaces Feb. 28, 2012
8123961 Extensions of self-assembled structures to increased dimensions via a "bootstrap" self-templating method Feb. 28, 2012
8123960 Sub-10 nm line features via rapid graphoepitaxial self-assembly of amphiphilic monolayers Feb. 28, 2012
8114301 Graphoepitaxial self-assembly of arrays of downward facing half-cylinders Feb. 14, 2012
8114300 Multi-layer method for formation of registered arrays of cylindrical pores in polymer films Feb. 14, 2012
8110117 Method to form a recess for a microfluidic device Feb. 7, 2012
8105496 Method of fabricating MEMS devices (such as IMod) comprising using a gas phase etchant to remove a layer Jan. 31, 2012
8101091 Introducer assembly and method for forming an introducer assembly Jan. 24, 2012
8097222 Microfluidic device with integrated micropump, in particular biochemical microreactor, and manufacturing method thereof Jan. 17, 2012
8097174 MEMS device and interconnects for same Jan. 17, 2012
8097173 Magnetic porous particles and method of making Jan. 17, 2012
8088293 Methods of forming reticles configured for imprint lithography Jan. 3, 2012
8083953 Registered structure formation via the application of directed thermal energy to diblock copolymer films Dec. 27, 2011
8080481 Method of manufacturing a nanowire device Dec. 20, 2011
8071413 Micro-electro-mechanical system (MEMS) sensor and method for making same Dec. 6, 2011
8069565 Method of forming a nozzle chamber incorporating an ink ejection paddle and nozzle chamber rim Dec. 6, 2011
8066890 Spatial light modulator with multi-layer landing structures Nov. 29, 2011
8057988 Catalyst for microelectromechanical systems microreactors Nov. 15, 2011
8048322 Method for manufacturing thermal interface material having carbon nanotubes Nov. 1, 2011
8043513 Gimbal-less micro-electro-mechanical-system tip-tilt and tip-tilt-piston actuators and a method for forming the same Oct. 25, 2011
8039847 Printable semiconductor structures and related methods of making and assembling Oct. 18, 2011
8034247 Manufacturing method of silicon nozzle plate and manufacturing method of inkjet head Oct. 11, 2011
8029851 Nanowire fabrication Oct. 4, 2011
8029686 Method of fabricating an ink jet nozzle with a heater element Oct. 4, 2011
8019458 Creating multi-layer/multi-input/multi-output (MLMIMO) models for metal-gate structures Sep. 13, 2011
8019186 Photonic crystal circuit comprising a guided mode adapter and optical system including said circuit coupled with an optical fiber Sep. 13, 2011
8012363 Metal film protection during printhead fabrication with minimum number of MEMS processing steps Sep. 6, 2011

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