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Class Information
Number: 216/2
Name: Etching a substrate: processes > Etching of semiconductor material to produce an article having a nonelectrical function
Description: Process of etching a semiconductive precursor, substrate, or device to produce an article whose function is not related to the conduction of electricity.










Patents under this class:

Patent Number Title Of Patent Date Issued
8480053 Method and apparatus for the mechanical actuation of valves in fluidic devices Jul. 9, 2013
8470184 Method for making a cavity in the thickness of a substrate which may form a site for receiving a component Jun. 25, 2013
8465658 Method of forming main pole of thermally-assisted magnetic recording head Jun. 18, 2013
8465596 Supercritical processing apparatus and supercritical processing method Jun. 18, 2013
8460948 Method for manufacturing liquid ejecting head Jun. 11, 2013
8460564 Drug delivery chip and fabricating method thereof Jun. 11, 2013
8460561 Crystal oscillator piece and method for manufacturing the same Jun. 11, 2013
8455288 Method for etching material longitudinally spaced from etch mask Jun. 4, 2013
8455278 Method of forming a waveguide in diamond Jun. 4, 2013
8440089 Three-dimensional structure and its manufacturing method May. 14, 2013
8435415 Nanofabrication process and nanodevice May. 7, 2013
8425982 Methods of improving long range order in self-assembly of block copolymer films with ionic liquids Apr. 23, 2013
8422702 Condenser microphone having flexure hinge diaphragm and method of manufacturing the same Apr. 16, 2013
8414785 Methods for fabrication of microfluidic systems on printed circuit boards Apr. 9, 2013
8409452 Through-hole forming method, inkjet head, and silicon substrate Apr. 2, 2013
8409449 Registered structure formation via the application of directed thermal energy to diblock copolymer films Apr. 2, 2013
8404600 Method for forming fine pitch structures Mar. 26, 2013
8404124 Alternating self-assembling morphologies of diblock copolymers controlled by variations in surfaces Mar. 26, 2013
8398877 Method of forming openings in selected material Mar. 19, 2013
8398867 Video rate-enabling probes for atomic force microscopy Mar. 19, 2013
8398865 Method of manufacturing a micromechanical part Mar. 19, 2013
8397555 Scanning probe devices Mar. 19, 2013
8394283 Manufacturing method of 3D shape structure having hydrophobic external surface Mar. 12, 2013
8382995 Piezoelectric devices and methods for manufacturing same Feb. 26, 2013
8377319 Print head nozzle formation Feb. 19, 2013
8377315 Method for manufacturing porous microstructures, porous microstructures manufactured according to this method, and the use thereof Feb. 19, 2013
8377147 Control of materials and porous magnetic particles Feb. 19, 2013
8372731 Device fabrication by ink-jet printing materials into bank structures, and embossing tool Feb. 12, 2013
8372297 Method for fabricating membrane having hydrophilicity and hydrophobicity Feb. 12, 2013
8372295 Extensions of self-assembled structures to increased dimensions via a "bootstrap" self-templating method Feb. 12, 2013
8361331 MEMS mirror system for laser printing applications Jan. 29, 2013
8354033 Method for producing porous microneedles and their use Jan. 15, 2013
8354032 Method of manufacturing a micromechanical part Jan. 15, 2013
8351742 Systems and methods for sensing properties of a workpiece and embedding a photonic sensor in metal Jan. 8, 2013
8347696 Microchannel forming method and nanotipped dispensing device having a microchannel Jan. 8, 2013
8347469 Crystal oscillator piece and method for manufacturing the same Jan. 8, 2013
8343365 Method for producing color filter Jan. 1, 2013
8329047 Method for producing liquid discharge head Dec. 11, 2012
8327707 Thermal bubble type angular accelerometer Dec. 11, 2012
8323519 Method for manufacturing liquid discharge head Dec. 4, 2012
8309465 System and method for producing devices including a semiconductor part and a non-semiconductor part Nov. 13, 2012
8308968 Monolithic high aspect ratio nano-size scanning probe microscope (SPM) tip formed by nanowire growth Nov. 13, 2012
8308960 Methods for making micro needles and applications thereof Nov. 13, 2012
8307708 RFID based thermal bubble type accelerometer and method of manufacturing the same Nov. 13, 2012
8307461 Fabrication of a microcantilever microwave probe Nov. 6, 2012
8303827 Method for making micro-electro-mechanical system device Nov. 6, 2012
8298432 Method and system for adjusting beam dimension for high-gradient location specific processing Oct. 30, 2012
8293126 Method and system for multi-pass correction of substrate defects Oct. 23, 2012
8287744 Capillary-channel probes for liquid pickup, transportation and dispense using stressy metal Oct. 16, 2012
8277667 Magnetic element and manufacturing method therefor Oct. 2, 2012











 
 
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