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Class Information
Number: 216/2
Name: Etching a substrate: processes > Etching of semiconductor material to produce an article having a nonelectrical function
Description: Process of etching a semiconductive precursor, substrate, or device to produce an article whose function is not related to the conduction of electricity.










Patents under this class:
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Patent Number Title Of Patent Date Issued
5779918 Method for manufacturing a photo-sensor Jul. 14, 1998
5777328 Ramped foot support Jul. 7, 1998
5772902 Method to prevent adhesion of micromechanical structures Jun. 30, 1998
5770465 Trench-filling etch-masking microfabrication technique Jun. 23, 1998
5766367 Method for preventing micromechanical structures from adhering to another object Jun. 16, 1998
5763289 Method for fabricating multi-layer polymer thin florelectro-optical device Jun. 9, 1998
5763318 Method of making a machine structures fabricated of mutiple microstructure layers Jun. 9, 1998
5753128 Self-supporting thin-film filament detector, process for its manufacture and it applications to gas detection and gas chromatography May. 19, 1998
5749132 Method of fabrication an optical waveguide May. 12, 1998
5750000 Semiconductor member, and process for preparing same and semiconductor device formed by use of same May. 12, 1998
5738799 Method and materials for fabricating an ink-jet printhead Apr. 14, 1998
5725729 Process for micromechanical fabrication Mar. 10, 1998
5725785 Method for manufacturing accelerometer sensor Mar. 10, 1998
5723053 Ink jet print head and a method of manufacturing the same Mar. 3, 1998
5720893 Tapered beam expander waveguide integrated with a diode lasesr Feb. 24, 1998
5719073 Microstructures and single mask, single-crystal process for fabrication thereof Feb. 17, 1998
5716533 Method of fabricating ink jet printheads Feb. 10, 1998
5709773 Silicon microstructures and process for their fabrication Jan. 20, 1998
5709802 Method of making a micro-actuator device Jan. 20, 1998
5707537 Bulk removal, transport and storage fixture for small batch-fabricated devices Jan. 13, 1998
5705318 Micromotors and methods of fabrication Jan. 6, 1998
5705018 Micromachined peristaltic pump Jan. 6, 1998
5702618 Methods for manufacturing a flow switch Dec. 30, 1997
5702619 Method for fabricating a high pressure piezoresistive transducer Dec. 30, 1997
5700379 Method for drying micromechanical components Dec. 23, 1997
5700382 Method for fabricating a silicon semiconductor substrate having an integrated waveguide and an optical fiber coupled thereto Dec. 23, 1997
5698063 Intermediate workpiece employing a mask for etching an aperture aligned with the crystal planes in the workpiece substrate Dec. 16, 1997
5698112 Corrosion protection for micromechanical metal layers Dec. 16, 1997
5693234 Method for producing at least one recess in a surface of a substrate apparatus for carrying out the said method and use of the product thus obtained Dec. 2, 1997
5693237 Method of producing integrated active-matrix liquid crystal displays Dec. 2, 1997
5690841 Method of producing cavity structures Nov. 25, 1997
5688474 Device for treating gases using microfabricated matrix of catalyst Nov. 18, 1997
5683546 Method of etching silicon substrate at different etching rates for different planes of the silicon to form an air bridge Nov. 4, 1997
5683591 Process for producing surface micromechanical structures Nov. 4, 1997
5683594 Method for making diaphragm-based sensors and apparatus constructed therewith Nov. 4, 1997
5681484 Etching to form cross-over, non-intersecting channel networks for use in partitioned microelectronic and fluidic device arrays for clinical diagnostics and chemical synthesis Oct. 28, 1997
5679216 Method of manufacturing a multi-degree-of-freedom manipulator Oct. 21, 1997
5676850 Micromechanical barb and method for making the same Oct. 14, 1997
5676851 Method of making a capacitance type acceleration sensor Oct. 14, 1997
5677783 Method of making a deformable grating apparatus for modulating a light beam and including means for obviating stiction between grating elements and underlying substrate Oct. 14, 1997
5674406 Stopper manufacturing method of a silicon micromachining structure Oct. 7, 1997
5665202 Multi-step planarization process using polishing at two different pad pressures Sep. 9, 1997
5665249 Micro-electromechanical die module with planarized thick film layer Sep. 9, 1997
5665250 Method of manufacturing surface type acceleration sensor method of manufacturing Sep. 9, 1997
5662772 Method for the selective removal of silicon dioxide Sep. 2, 1997
5662814 Micro-machining minute hollow using native oxide membrane Sep. 2, 1997
5660680 Method for fabrication of high vertical aspect ratio thin film structures Aug. 26, 1997
5658471 Fabrication of thermal ink-jet feed slots in a silicon substrate Aug. 19, 1997
5658472 Method for producing deep vertical structures in silicon substrates Aug. 19, 1997
5658710 Method of making superhard mechanical microstructures Aug. 19, 1997

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