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Class Information
Number: 216/2
Name: Etching a substrate: processes > Etching of semiconductor material to produce an article having a nonelectrical function
Description: Process of etching a semiconductive precursor, substrate, or device to produce an article whose function is not related to the conduction of electricity.










Patents under this class:
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Patent Number Title Of Patent Date Issued
6071353 Protection of consumable susceptor during etch by a second coating of another consumable material Jun. 6, 2000
6071426 Micro benchtop optics by bulk silicon micromachining Jun. 6, 2000
6066265 Micromachined silicon probe for scanning probe microscopy May. 23, 2000
6063299 Manufacture of a silicon waveguide structure May. 16, 2000
6059981 Fiducial marks for charged-particle-beam exposure apparatus and methods for forming same May. 9, 2000
6059982 Micro probe assembly and method of fabrication May. 9, 2000
6060336 Micro-electro mechanical device made from mono-crystalline silicon and method of manufacture therefore May. 9, 2000
6056887 Process for fabricating a feeler member for a micromechanical probe, in particular for an atomic force microscope May. 2, 2000
6057082 Method of fabricating authentication labels and authenticating patterns incorporating diffraction structures May. 2, 2000
6054061 Composition for circuit board manufacture Apr. 25, 2000
6044981 Microfabricated filter with specially constructed channel walls, and containment well and capsule constructed with such filters Apr. 4, 2000
6045710 Self-aligned construction and manufacturing process for monolithic print heads Apr. 4, 2000
6045711 Vacuum seal for field emission arrays Apr. 4, 2000
6045712 Micromachined reflector antenna method Apr. 4, 2000
6036872 Method for making a wafer-pair having sealed chambers Mar. 14, 2000
6038475 High output sensor and accelerometer for implantable medical device Mar. 14, 2000
6033581 Process for producing ink jet recording head Mar. 7, 2000
6024884 Method for creating microstructures Feb. 15, 2000
6025117 Method of forming a pattern using polysilane Feb. 15, 2000
6022484 Semiconductor processor with wafer face protection Feb. 8, 2000
6019906 Hard masking method for forming patterned oxygen containing plasma etchable layer Feb. 1, 2000
6020272 Method for forming suspended micromechanical structures Feb. 1, 2000
6009830 Independent gas feeds in a plasma reactor Jan. 4, 2000
6007676 Atomizing nozzle and filter and spray generating device Dec. 28, 1999
6007728 Design of a novel tactile sensor Dec. 28, 1999
6007951 Method for precise crystallographic semiconductor wafer alignment orientation Dec. 28, 1999
6004832 Method of fabricating an electrostatic ultrasonic transducer Dec. 21, 1999
6001540 Microlens process Dec. 14, 1999
5998297 Method of etching copper or copper-doped aluminum Dec. 7, 1999
5993679 Method of cleaning metallic films built up within thin film deposition apparatus Nov. 30, 1999
5989445 Microchannel system for fluid delivery Nov. 23, 1999
5985520 Metal line structure and method of manufacturing the same Nov. 16, 1999
5980762 Method of micromachining a semiconductor Nov. 9, 1999
5981304 Self-alignment process usable in microelectronics, and application to creating a focusing grid for micropoint flat screens Nov. 9, 1999
5976390 Micromachining method and micromachined structure Nov. 2, 1999
5972232 Micromirror for a hybrid optoelectronic integrated circuit, a method for manufacturing the same, a micromirror-photodetector assembly and an assembly of hybrid optoelectronic integrated circui Oct. 26, 1999
5972794 Silicon stencil mask manufacturing method Oct. 26, 1999
5968711 Method of dry etching A1Cu using SiN hard mask Oct. 19, 1999
5961832 Method and apparatus for diffusive transfer between immiscible fluids Oct. 5, 1999
5961849 Miniature mounting device and method Oct. 5, 1999
5962081 Method for the manufacture of a membrane-containing microstructure Oct. 5, 1999
5958257 Process for treating brass components to reduce leachable lead Sep. 28, 1999
5954974 Laser-assisted coating removal from optical fibers Sep. 21, 1999
5951879 Method of etching polysilicon layer Sep. 14, 1999
5938923 Microfabricated filter and capsule using a substrate sandwich Aug. 17, 1999
5939171 Micromechanical component Aug. 17, 1999
5939741 Methods of forming integrated circuitry and integrated circuitry structures Aug. 17, 1999
5935451 Fabrication of etched features Aug. 10, 1999
5925259 Lithographic surface or thin layer modification Jul. 20, 1999
5922212 Semiconductor sensor having suspended thin-film structure and method for fabricating thin-film structure body Jul. 13, 1999

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