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Class Information
Number: 216/2
Name: Etching a substrate: processes > Etching of semiconductor material to produce an article having a nonelectrical function
Description: Process of etching a semiconductive precursor, substrate, or device to produce an article whose function is not related to the conduction of electricity.










Patents under this class:
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Patent Number Title Of Patent Date Issued
6235638 Simplified etching technique for producing multiple undercut profiles May. 22, 2001
6231771 Process for making optical waveguides May. 15, 2001
6227519 Female mold substrate having a heat flowable layer, method to make the same, and method to make a microprobe tip using the female substrate May. 8, 2001
6228166 Method for boron contamination reduction in IC fabrication May. 8, 2001
6228275 Method of manufacturing a sensor May. 8, 2001
6221738 Substrate and production method thereof Apr. 24, 2001
6214243 Process for producing a speed of rotation coriolis sensor Apr. 10, 2001
6210593 Etching method and etching apparatus Apr. 3, 2001
6203673 Method of producing a thin-film platinum temperature-sensitive resistor for a thin-film microstructure sensor Mar. 20, 2001
6190571 Semiconductor micromachine and manufacturing method thereof Feb. 20, 2001
6187210 Epidermal abrasion device with isotropically etched tips, and method of fabricating such a device Feb. 13, 2001
6187412 Silicon article having columns and method of making Feb. 13, 2001
6177285 Process for determining the crystal orientation in a wafer Jan. 23, 2001
6174448 Method for stripping aluminum from a diffusion coating Jan. 16, 2001
6174820 Use of silicon oxynitride as a sacrificial material for microelectromechanical devices Jan. 16, 2001
6171972 Fracture-resistant micromachined devices Jan. 9, 2001
6162367 Gas-phase silicon etching with bromine trifluoride Dec. 19, 2000
6159385 Process for manufacture of micro electromechanical devices having high electrical isolation Dec. 12, 2000
6159842 Method for fabricating a hybrid low-dielectric-constant intermetal dielectric (IMD) layer with improved reliability for multilevel interconnections Dec. 12, 2000
6156216 Method for making nitride cantilevers devices Dec. 5, 2000
6153917 Semiconductor acceleration sensor and manufacturing method thereof Nov. 28, 2000
6150275 Micromechanical system fabrication method using (111) single crystalline silicon Nov. 21, 2000
6150280 Electron-beam cell projection aperture formation method Nov. 21, 2000
6146541 Method of manufacturing a semiconductor device that uses a calibration standard Nov. 14, 2000
6146542 Dry etching method of multilayer film Nov. 14, 2000
6146543 Microbellows actuator Nov. 14, 2000
6143190 Method of producing a through-hole, silicon substrate having a through-hole, device using such a substrate, method of producing an ink-jet print head, and ink-jet print head Nov. 7, 2000
6139758 Method of manufacturing a micromachined thermal flowmeter Oct. 31, 2000
6136208 Manufacturing method for planar microprobe including electrostatic actuator using sacrificial layer technology Oct. 24, 2000
6136243 Method for molding high precision components Oct. 24, 2000
6133072 Microelectronic connector with planar elastomer sockets Oct. 17, 2000
6123802 Method and apparatus for preventing plasma formation Sep. 26, 2000
6123861 Fabrication of microchip drug delivery devices Sep. 26, 2000
6120002 Fluid valves having cantilevered blocking films Sep. 19, 2000
6117795 Use of corrosion inhibiting compounds in post-etch cleaning processes of an integrated circuit Sep. 12, 2000
6110391 Method of manufacturing a bonding substrate Aug. 29, 2000
6106734 Micromachine manufacture using gas beam crystallization Aug. 22, 2000
6106735 Wafer stack and method of producing sensors Aug. 22, 2000
6103479 Miniaturized cell array methods and apparatus for cell-based screening Aug. 15, 2000
6099744 Test sample fabrication technique Aug. 8, 2000
6096656 Formation of microchannels from low-temperature plasma-deposited silicon oxynitride Aug. 1, 2000
6094965 Semiconductor calibration structures and calibration wafers for ascertaining layer alignment during processing and calibrating multiple semiconductor wafer coating systems Aug. 1, 2000
6096229 Method of making alignment grooves in an optical connector support member Aug. 1, 2000
6093330 Microfabrication process for enclosed microstructures Jul. 25, 2000
6093331 Backside silicon removal for face down chip analysis Jul. 25, 2000
6093332 Methods for reducing mask erosion during plasma etching Jul. 25, 2000
6093334 Glass wave guide element and method of manufacturing the same Jul. 25, 2000
6090300 Ion-implantation assisted wet chemical etching of III-V nitrides and alloys Jul. 18, 2000
6086774 Method of making released micromachined structures by directional etching Jul. 11, 2000
6073636 Dry etcher apparatus and method of preventing residual reaction gas from condensing on wafers after etching Jun. 13, 2000

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