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Class Information
Number: 216/2
Name: Etching a substrate: processes > Etching of semiconductor material to produce an article having a nonelectrical function
Description: Process of etching a semiconductive precursor, substrate, or device to produce an article whose function is not related to the conduction of electricity.










Patents under this class:
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Patent Number Title Of Patent Date Issued
6402969 Surface--micromachined rotatable member having a low-contact-area hub Jun. 11, 2002
6399405 Process for constructing a spectrophotometer Jun. 4, 2002
6399406 Encapsulated MEMS band-pass filter for integrated circuits and method of fabrication thereof Jun. 4, 2002
6399410 Method of anodizing silicon substrate and method of producing acceleration sensor Jun. 4, 2002
6399025 Analytical system and method Jun. 4, 2002
6393685 Microjoinery methods and devices May. 28, 2002
6395347 Micromachining method for workpiece observation May. 28, 2002
6392792 Method of fabricating reflection-mode EUV diffraction elements May. 21, 2002
6387290 Tangential flow planar microfabricated fluid filter May. 14, 2002
6387778 Breakable tethers for microelectromechanical system devices utilizing reactive ion etching lag May. 14, 2002
6369931 Method for manufacturing a micromechanical device Apr. 9, 2002
6365055 Process for producing a sensor membrane substrate Apr. 2, 2002
6365056 Method for producing a suspended element in a micro-machined structure Apr. 2, 2002
6362107 Polishing pad and polishing device Mar. 26, 2002
6358426 Method of fabricating probe force atomic force microscope Mar. 19, 2002
6355181 Method and apparatus for manufacturing a micromechanical device Mar. 12, 2002
6350388 Method for patterning high density field emitter tips Feb. 26, 2002
6344148 Method for aligning optical devices with substrate Feb. 5, 2002
6344150 Etching method Feb. 5, 2002
6342427 Method for forming micro cavity Jan. 29, 2002
6338284 Electrical feedthrough structures for micromachined devices and methods of fabricating the same Jan. 15, 2002
6337027 Microelectromechanical device manufacturing process Jan. 8, 2002
6334960 Step and flash imprint lithography Jan. 1, 2002
6332988 Rework process Dec. 25, 2001
6328796 Single-crystal material on non-single-crystalline substrate Dec. 11, 2001
6328902 Probe tip configuration and a method of fabrication thereof Dec. 11, 2001
6328903 Surface-micromachined chain for use in microelectromechanical structures Dec. 11, 2001
6329296 Metal catalyst technique for texturing silicon solar cells Dec. 11, 2001
6326314 Integrated inductor with filled etch Dec. 4, 2001
6322753 Integrated microfluidic element Nov. 27, 2001
6319846 Method for removing solder bodies from a semiconductor wafer Nov. 20, 2001
6312612 Apparatus and method for manufacturing an intracutaneous microneedle array Nov. 6, 2001
6306305 Method and apparatus for diffusive transfer between immiscible liquids Oct. 23, 2001
6306775 Methods of selectively etching polysilicon relative to at least one of deposited oxide, thermally grown oxide and nitride, and methods of selectively etching polysilicon relative to BPSG Oct. 23, 2001
6296717 Regeneration of chemical mechanical polishing pads in-situ Oct. 2, 2001
6296767 Method and apparatus for diffusive transfer between immiscible fluids Oct. 2, 2001
6296779 Method of fabricating a sensor Oct. 2, 2001
6290858 Manufacturing method for a micromechanical device Sep. 18, 2001
6290859 Tungsten coating for improved wear resistance and reliability of microelectromechanical devices Sep. 18, 2001
6287885 Method for manufacturing semiconductor dynamic quantity sensor Sep. 11, 2001
6281033 Semiconductor dynamic quantity-sensor and method of manufacturing the same Aug. 28, 2001
6274198 Shadow mask deposition Aug. 14, 2001
6270685 Method for producing a semiconductor Aug. 7, 2001
6267902 Process for removing a coating from a hole in a metal substrate Jul. 31, 2001
6267905 Method of manufacture of a permanent magnet electromagnetic ink jet printer Jul. 31, 2001
6261466 Composition for circuit board manufacture Jul. 17, 2001
6242163 Shape deposition manufacturing of microscopic ceramic and metallic parts using silicon molds Jun. 5, 2001
6237619 Micro-machined device for fluids and method of manufacture May. 29, 2001
6238580 Method of HF vapor release of microstructures May. 29, 2001
6238584 Method of forming ink jet nozzle plates May. 29, 2001

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