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Class Information
Number: 216/2
Name: Etching a substrate: processes > Etching of semiconductor material to produce an article having a nonelectrical function
Description: Process of etching a semiconductive precursor, substrate, or device to produce an article whose function is not related to the conduction of electricity.










Patents under this class:
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Patent Number Title Of Patent Date Issued
6547973 Fabrication of suspended structures using a sacrificial layer Apr. 15, 2003
6548263 Miniaturized cell array methods and apparatus for cell-based screening Apr. 15, 2003
6544863 Method of fabricating semiconductor wafers having multiple height subsurface layers Apr. 8, 2003
6544898 Method for improved die release of a semiconductor device from a wafer Apr. 8, 2003
6539798 Acceleration threshold sensor Apr. 1, 2003
6537256 Microfabricated devices for the delivery of molecules into a carrier fluid Mar. 25, 2003
6537839 Nitride semiconductor light emitting device and manufacturing method thereof Mar. 25, 2003
6533947 Microelectromechanical mirror and mirror array Mar. 18, 2003
6533949 Microneedle structure and production method therefor Mar. 18, 2003
6533951 Method of manufacturing fluid pump Mar. 18, 2003
6534247 Method of fabricating micromachined ink feed channels for an inkjet printhead Mar. 18, 2003
6531417 Thermally driven micro-pump buried in a silicon substrate and method for fabricating the same Mar. 11, 2003
6527762 Thermally-activated microchip chemical delivery devices Mar. 4, 2003
6527961 Method of manufacturing pressure microsensors Mar. 4, 2003
6528339 Method of imparting birefringence in a III-V compound semiconductor Mar. 4, 2003
6524650 Substrate processing apparatus and method Feb. 25, 2003
6519822 Method for producing an electronic component Feb. 18, 2003
6520477 Micro pump Feb. 18, 2003
6521313 Method for producing a diaphragm sensor unit and diaphragm sensor unit Feb. 18, 2003
6517735 Ink feed trench etch technique for a fully integrated thermal inkjet printhead Feb. 11, 2003
6518192 Two etchant etch method Feb. 11, 2003
6508946 Method for manufacturing ink jet recording head, ink jet recording head, and ink jet recording apparatus Jan. 21, 2003
6508947 Method for fabricating a micro-electro-mechanical fluid ejector Jan. 21, 2003
6506314 Adhesion of polymeric materials to metal surfaces Jan. 14, 2003
6503409 Lithographic fabrication of nanoapertures Jan. 7, 2003
6500348 Deep reactive ion etching process and microelectromechanical devices formed thereby Dec. 31, 2002
6497825 Manufacturing method of thin-film magnetic head Dec. 24, 2002
6491666 Microfabricated devices for the delivery of molecules into a carrier fluid Dec. 10, 2002
6478974 Microfabricated filter and shell constructed with a permeable membrane Nov. 12, 2002
6479315 Process for manufacturing micromechanical and microoptomechanical structures with single crystal silicon exposure step Nov. 12, 2002
6475398 Semiconductor device incorporating hemispherical solid immersion lens, apparatus and method for manufacturing same Nov. 5, 2002
6475821 Circuit substrate, detector, and method of manufacturing the same Nov. 5, 2002
6472110 Process for manufacturing liquid crystal display element Oct. 29, 2002
6461799 Method for producing plano-convex convergence lenses Oct. 8, 2002
6447688 Method for fabricating a stencil mask Sep. 10, 2002
6440766 Microfabrication using germanium-based release masks Aug. 27, 2002
6436613 Integrated hybrid optoelectronic devices Aug. 20, 2002
6432695 Miniaturized thermal cycler Aug. 13, 2002
6432720 Analytical system and method Aug. 13, 2002
6428713 MEMS sensor structure and microfabrication process therefor Aug. 6, 2002
6426296 Method and apparatus for obtaining a precision thickness in semiconductor and other wafers Jul. 30, 2002
6419844 Method for fabricating calibration target for calibrating semiconductor wafer test systems Jul. 16, 2002
6420206 Optical membrane singulation process utilizing backside and frontside protective coating during die saw Jul. 16, 2002
6415653 Cantilever for use in a scanning probe microscope Jul. 9, 2002
6415975 Determination of quality of bonding between a conductive ball and a conductive pad within an IC package Jul. 9, 2002
6417939 Polarizing filter and its manufacturing method Jul. 9, 2002
6406636 Methods for wafer to wafer bonding using microstructures Jun. 18, 2002
6406637 Thin film-planar structure and method for producing the same Jun. 18, 2002
6406638 Method of forming vertical, hollow needles within a semiconductor substrate, and needles formed thereby Jun. 18, 2002
6402968 Microelectromechanical capactive accelerometer and method of making same Jun. 11, 2002

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