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Class Information
Number: 216/2
Name: Etching a substrate: processes > Etching of semiconductor material to produce an article having a nonelectrical function
Description: Process of etching a semiconductive precursor, substrate, or device to produce an article whose function is not related to the conduction of electricity.










Patents under this class:
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Patent Number Title Of Patent Date Issued
6824697 Method for fabricating mems and microfluidic devices using smile, latent masking, and delayed locos techniques Nov. 30, 2004
6821450 Substrate and method of forming substrate for fluid ejection device Nov. 23, 2004
6821794 Flexible snapshot in endpoint detection Nov. 23, 2004
6818137 Fabrication of electronic magnetic, optical, chemical, and mechanical systems using chemical endpoint detection Nov. 16, 2004
6815361 Method of fabricating anti-stiction micromachined structures Nov. 9, 2004
6811853 Single mask lithographic process for patterning multiple types of surface features Nov. 2, 2004
6810899 Integrated palladium-based micromembranes for hydrogen separation and hydrogenation/dehydrogenation reactions Nov. 2, 2004
6811714 Micromachined component and method of manufacture Nov. 2, 2004
6808522 Microchip devices for delivery of molecules and methods of fabrication thereof Oct. 26, 2004
6808640 Micromechanical part and method for its manufacture Oct. 26, 2004
6808920 Microchip device for chemotaxis observation Oct. 26, 2004
6800210 Method for making a micromechanical device by removing a sacrificial layer with multiple sequential etchants Oct. 5, 2004
6797187 Surface-micromachined microfluidic devices Sep. 28, 2004
6793736 Method of providing high flux of point of use activated reactive species for semiconductor processing Sep. 21, 2004
6793829 Bonding for a micro-electro-mechanical system (MEMS) and MEMS based devices Sep. 21, 2004
6793830 Method for forming a microstructure from a monocrystalline substrate Sep. 21, 2004
6787047 Methods for manufacturing a microstructured sensor Sep. 7, 2004
6787049 Fluid ejection device Sep. 7, 2004
6787051 Method of manufacturing a micro-electromechanical fluid ejecting device Sep. 7, 2004
6787768 Method and apparatus for tool and tip design for nanomachining and measurement Sep. 7, 2004
6780336 Methods of fabricating MEMS and microfluidic devices using latent masking technique Aug. 24, 2004
6780337 Method for trench etching Aug. 24, 2004
6776915 Method of manufacturing a fluid ejection device with a fluid channel therethrough Aug. 17, 2004
6776916 Substrate and method of forming substrate for fluid ejection device Aug. 17, 2004
6770208 Method for forming MEMS-based spinning nozzle Aug. 3, 2004
6770506 Release etch method for micromachined sensors Aug. 3, 2004
6761829 Method for fabricating an isolated microelectromechanical system (MEMS) device using an internal void Jul. 13, 2004
6758983 Staggered torsional electrostatic combdrive and method of forming same Jul. 6, 2004
6760144 Articulated MEMS electrostatic rotary actuator Jul. 6, 2004
6755982 Self-aligned micro hinges Jun. 29, 2004
6756310 Method for constructing an isolate microelectromechanical system (MEMS) device using surface fabrication techniques Jun. 29, 2004
6752931 Method for using DRIE with reduced lateral etching Jun. 22, 2004
6750152 Method and apparatus for electrically testing and characterizing formation of microelectric features Jun. 15, 2004
6743368 Nano-size imprinting stamp using spacer technique Jun. 1, 2004
6743731 Method for making a radio frequency component and component produced thereby Jun. 1, 2004
6736982 Micromachined vertical vibrating gyroscope May. 18, 2004
6736983 Method for producing microcomponents May. 18, 2004
6733681 Laterally supported handle wafer for through-wafer reactive-ion etch micromachining May. 11, 2004
6723250 Method of producing structured wafers Apr. 20, 2004
6719873 Method and apparatus for preventing plasma formation Apr. 13, 2004
6716363 Electrode patterning for a differential PZT activator Apr. 6, 2004
6712983 Method of etching a deep trench in a substrate and method of fabricating on-chip devices and micro-machined structures using the same Mar. 30, 2004
6709604 Parylene micro check valve and fabrication method thereof Mar. 23, 2004
6709605 Etching method Mar. 23, 2004
6706200 Method for fabricating ESI device using smile and delayed LOCOS techniques Mar. 16, 2004
6706619 Method for tiling unit cells Mar. 16, 2004
6702950 Method for fabricating LC device using latent masking and delayed LOCOS techniques Mar. 9, 2004
6700121 Methods of sampling specimens for microanalysis Mar. 2, 2004
6699394 Micromachined parylene membrane valve and pump Mar. 2, 2004
6689694 Micromechanical system fabrication method using (111) single crystalline silicon Feb. 10, 2004

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