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Class Information
Number: 216/2
Name: Etching a substrate: processes > Etching of semiconductor material to produce an article having a nonelectrical function
Description: Process of etching a semiconductive precursor, substrate, or device to produce an article whose function is not related to the conduction of electricity.










Patents under this class:
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Patent Number Title Of Patent Date Issued
6942811 Method for achieving improved selectivity in an etching process Sep. 13, 2005
6942812 Method of manufacturing etalon Sep. 13, 2005
6942814 Methods of forming integrated optoelectronic devices Sep. 13, 2005
6939472 Etching method in fabrications of microstructures Sep. 6, 2005
6939473 Method of making an X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging Sep. 6, 2005
6939574 Method for reducing leaching in metal-coated MEMS Sep. 6, 2005
6939809 Method for release of surface micromachined structures in an epitaxial reactor Sep. 6, 2005
6930367 Anti-stiction technique for thin film and wafer-bonded encapsulated microelectromechanical systems Aug. 16, 2005
6913701 Method for fabricating integrated LC/ESI device using SMILE, latent masking, and delayed LOCOS techniques Jul. 5, 2005
6911156 Methods for fabricating MRAM device structures Jun. 28, 2005
6908565 Etch thinning techniques for wafer-to-wafer vertical stacks Jun. 21, 2005
6905613 Use of an organic dielectric as a sacrificial layer Jun. 14, 2005
6905614 Pattern-transfer process for forming micro-electro-mechanical structures Jun. 14, 2005
6905615 Method of manufacturing a micromechanical component Jun. 14, 2005
6905616 Method of releasing devices from a substrate Jun. 14, 2005
6896821 Fabrication of MEMS devices with spin-on glass May. 24, 2005
6893574 MEMS capping method and apparatus May. 17, 2005
6893577 Method of forming substrate for fluid ejection device May. 17, 2005
6890445 Process for packaging electronic devices using thin bonding regions May. 10, 2005
6887391 Fabrication and controlled release of structures using etch-stop trenches May. 3, 2005
6887392 Light emitting device and method of manufacturing the same May. 3, 2005
6887393 Monolithic printhead with self-aligned groove and relative manufacturing process May. 3, 2005
6887395 Method of forming sub-micron-size structures over a substrate May. 3, 2005
6884361 Method for making a mirror for photolithography Apr. 26, 2005
6884362 Mass production of cross-section TEM samples by focused ion beam deposition and anisotropic etching Apr. 26, 2005
6878271 Implementation of microfluidic components in a microfluidic system Apr. 12, 2005
6875257 Particle filter for microelectromechanical systems Apr. 5, 2005
6875365 Method for producing liquid discharge head Apr. 5, 2005
6872319 Process for high yield fabrication of MEMS devices Mar. 29, 2005
6868605 Method of manufacturing a bubble-jet type ink-jet printhead Mar. 22, 2005
6867897 Micromirrors and off-diagonal hinge structures for micromirror arrays in projection displays Mar. 15, 2005
6862925 Device for contacting and/or modifying a surface having a cantilever and a method for production of said cantilever Mar. 8, 2005
6863832 Method for producing a torsion spring Mar. 8, 2005
6863833 Microfabricated apertures for supporting bilayer lipid membranes Mar. 8, 2005
6861005 Generating nitride waveguides Mar. 1, 2005
6861273 Method of fabricating reflection-mode EUV diffusers Mar. 1, 2005
6857501 Method of forming parylene-diaphragm piezoelectric acoustic transducers Feb. 22, 2005
6852365 Silicon penetration device with increased fracture toughness and method of fabrication Feb. 8, 2005
6846423 Wafer-level seal for non-silicon-based devices Jan. 25, 2005
6843899 2D/3D chemical sensors and methods of fabricating and operating the same Jan. 18, 2005
6844269 Etching method for semiconductor silicon wafer Jan. 18, 2005
6841339 Silicon micro-mold and method for fabrication Jan. 11, 2005
6841079 Fluorochemical treatment for silicon articles Jan. 11, 2005
6834663 Small scale actuators and methods for their formation and use Dec. 28, 2004
6833079 Method of etching a shaped cavity Dec. 21, 2004
6833527 Slotted substrates and methods and systems for forming same Dec. 21, 2004
6830701 Method for fabricating microelectromechanical structures for liquid emission devices Dec. 14, 2004
6831742 Monitoring substrate processing using reflected radiation Dec. 14, 2004
6827866 Deep-well lithography process for forming micro-electro-mechanical structures Dec. 7, 2004
6827869 Method of micromachining a multi-part cavity Dec. 7, 2004

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