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Class Information
Number: 216/2
Name: Etching a substrate: processes > Etching of semiconductor material to produce an article having a nonelectrical function
Description: Process of etching a semiconductive precursor, substrate, or device to produce an article whose function is not related to the conduction of electricity.

Patents under this class:

Patent Number Title Of Patent Date Issued
8709264 (4928 Apr. 29, 2014
8702997 Balancing a microelectromechanical system Apr. 22, 2014
8691099 Process for fabricating MEMS devices Apr. 8, 2014
8679887 Method for manufacturing a micro-electro-mechanical device, in particular an optical microswitch, and micro-electro-mechanical device thus obtained Mar. 25, 2014
8679355 MEMS element Mar. 25, 2014
8679354 Method of etching a sacrificial silicon oxide layer Mar. 25, 2014
8668833 Method of forming a nanostructure Mar. 11, 2014
8664022 Submount for light emitting diode and method for fabricating the same Mar. 4, 2014
8663487 Method for manufacturing crystal oscillator Mar. 4, 2014
8656936 Barrier structure and nozzle device for use in tools used to process microelectronic workpieces with one or more treatment fluids Feb. 25, 2014
8643128 Micro-electro-mechanical-system sensor and method for making same Feb. 4, 2014
8641912 Method for fabricating monolithic two-dimensional nanostructures Feb. 4, 2014
8636912 Package for an electronic device Jan. 28, 2014
8636911 Process for MEMS scanning mirror with mass remove from mirror backside Jan. 28, 2014
8623769 Through hole forming method, nozzle plate and MEMS device Jan. 7, 2014
8623222 MEMS-based micro and nano grippers with two axis force sensors Jan. 7, 2014
8617406 Device for the actively-controlled and localized deposition of at least one biological solution Dec. 31, 2013
8613862 Method for manufacturing liquid discharge head substrate Dec. 24, 2013
8609221 Alternating self-assembling morphologies of diblock copolymers controlled by variations in surfaces Dec. 17, 2013
8605920 Condenser microphone having flexure hinge diaphragm and method of manufacturing the same Dec. 10, 2013
8597529 Method for processing substrate and method for producing liquid ejection head and substrate for liquid ejection head Dec. 3, 2013
8591756 Method of manufacturing a metallized ceramic substrate Nov. 26, 2013
8585916 Micropores and methods of making and using thereof Nov. 19, 2013
8585910 Process of making a microtube and microfluidic devices formed therewith Nov. 19, 2013
8580127 Method of manufacturing RFID based thermal bubble type accelerometer Nov. 12, 2013
8580126 Piezoelectric vibrating pieces comprising edge mesa steps, and methods for manufacturing same Nov. 12, 2013
8569391 Ordered porous mesostructured materials from nanoparticle-block copolymer self-assembly Oct. 29, 2013
8568598 Tip type probe manufacturing method, tip type probe and tip type probe manufacturing apparatus Oct. 29, 2013
8557698 Method for producing a micromechanical and/or nanomechanical device with anti-bonding stops Oct. 15, 2013
8557128 Sub-10 nm line features via rapid graphoepitaxial self-assembly of amphiphilic monolayers Oct. 15, 2013
8541313 Method for etching a sacrificial layer for a micro-machined structure Sep. 24, 2013
8535544 Structure and method to form nanopore Sep. 17, 2013
8529773 Method for making micro-electro-mechanical system device Sep. 10, 2013
8524112 Process for the production of microelectromechanical systems Sep. 3, 2013
8523426 One-piece regulating member and method of manufacturing the same Sep. 3, 2013
8518279 Method and system for providing a laser cavity for an energy assisted magnetic recording head Aug. 27, 2013
8518276 Ultrathin porous nanoscale membranes, methods of making, and uses thereof Aug. 27, 2013
8518275 Graphoepitaxial self-assembly of arrays of downward facing half-cylinders Aug. 27, 2013
8512588 Method of fabricating a scalable nanoporous membrane filter Aug. 20, 2013
8512578 Multi-step release method for electrochemically fabricated structures Aug. 20, 2013
8506829 Semiconductor hollow-core waveguide using photonic crystal gratings Aug. 13, 2013
8506827 Short pitch metal gratings and methods for making the same Aug. 13, 2013
8506826 Method of manufacturing a switch system Aug. 13, 2013
8501584 Method of manufacturing multi-level, silicon, micromechanical parts and parts thereby obtained Aug. 6, 2013
8491803 Method of hydrophobizing and patterning frontside surface of integrated circuit Jul. 23, 2013
8486840 Inverse spacer processing Jul. 16, 2013
8486282 Acid chemistries and methodologies for texturing transparent conductive oxide materials Jul. 16, 2013
8486279 Silicon-metal composite micromechanical component and method of manufacturing the same Jul. 16, 2013
8486278 Drug-delivery pumps and methods of manufacture Jul. 16, 2013
RE44356 Tunable-wavelength optical filter and method of manufacturing the same Jul. 9, 2013

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