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Class Information
Number: 216/17
Name: Etching a substrate: processes > Forming or treating electrical conductor article (e.g., circuit, etc.) > Forming or treating of groove or through hole
Description: Process directed to forming or treating (a) a depression of relatively small area which is formed partially or completely through an electrical conductor or a substrate supporting an electrical circuit, or (b) an elongated relatively narrow trench which is partially or completely through an electrical conductor or substrate.










Sub-classes under this class:

Class Number Class Name Patents
216/19 Filling or coating of groove or through hole in a conductor with an insulator 108
216/18 Filling or coating of groove or through hole with a conductor to form an electrical interconnection 608


Patents under this class:
1 2 3 4 5 6 7 8 9 10 11 12

Patent Number Title Of Patent Date Issued
8709266 (4926 Apr. 29, 2014
8667675 Simultaneous and selective partitioning of via structures using plating resist Mar. 11, 2014
8668834 Protecting a mold having a substantially planar surface provided with a plurality of mold cavities Mar. 11, 2014
8668833 Method of forming a nanostructure Mar. 11, 2014
8668835 Method of etching self-aligned vias and trenches in a multi-layer film stack Mar. 11, 2014
8652337 Self-formed nanometer channel at wafer scale Feb. 18, 2014
8647517 Producing method of suspension board with circuit Feb. 11, 2014
8641914 Methods of improving long range order in self-assembly of block copolymer films with ionic liquids Feb. 4, 2014
8641913 Fine pitch microcontacts and method for forming thereof Feb. 4, 2014
8617988 Through-substrate vias Dec. 31, 2013
8617960 Silicon microphone transducer Dec. 31, 2013
8609221 Alternating self-assembling morphologies of diblock copolymers controlled by variations in surfaces Dec. 17, 2013
8568600 Touch screen panel and method of manufacturing the same Oct. 29, 2013
8562844 Methods using block co-polymer self-assembly for sub-lithographic patterning Oct. 22, 2013
8562847 Thin film support substrate for use in hydrogen production filter and production method of hydrogen production filter Oct. 22, 2013
8557128 Sub-10 nm line features via rapid graphoepitaxial self-assembly of amphiphilic monolayers Oct. 15, 2013
8557508 Method of fabricating capacitive touch panel Oct. 15, 2013
8551271 Method for providing hermetic electrical feedthrough Oct. 8, 2013
8535547 Printed circuit board manufacturing system and manufacturing method thereof Sep. 17, 2013
8535546 Method of manufacturing multilayer wiring substrate Sep. 17, 2013
8524093 Method for forming a deep trench Sep. 3, 2013
8522427 Method of manufacturing a printed circuit board Sep. 3, 2013
8518275 Graphoepitaxial self-assembly of arrays of downward facing half-cylinders Aug. 27, 2013
8512588 Method of fabricating a scalable nanoporous membrane filter Aug. 20, 2013
8501026 Method for making a planar membrane Aug. 6, 2013
8476167 Lithographic apparatus and method of manufacturing an electrostatic clamp for a lithographic apparatus Jul. 2, 2013
8460564 Drug delivery chip and fabricating method thereof Jun. 11, 2013
8455926 Systems, methods, and apparatus of a low conductance silicon micro-leak for mass spectrometer inlet Jun. 4, 2013
8454851 Manufacturing method of the flexible display device Jun. 4, 2013
8454845 High speed interconnect and method of manufacture Jun. 4, 2013
8435414 Nozzle plate manufacturing method, nozzle plate, droplet discharge head manufacturing method, droplet discharge head, and printer May. 7, 2013
8431491 Method for membrane protection during reactive ion/plasma etching processing for via or cavity formation in semiconductor manufacture Apr. 30, 2013
8425785 Mechanical adhesion of copper metallization to dielectric with partially cured epoxy fillers Apr. 23, 2013
8414785 Methods for fabrication of microfluidic systems on printed circuit boards Apr. 9, 2013
8414782 Process for producing fluorocarbon microstructure, fluorocarbon microstructure, and microsystem Apr. 9, 2013
8409452 Through-hole forming method, inkjet head, and silicon substrate Apr. 2, 2013
8409449 Registered structure formation via the application of directed thermal energy to diblock copolymer films Apr. 2, 2013
8404124 Alternating self-assembling morphologies of diblock copolymers controlled by variations in surfaces Mar. 26, 2013
8398869 Transfer film and method for fabricating a circuit Mar. 19, 2013
8398877 Method of forming openings in selected material Mar. 19, 2013
8382996 Metal-clad laminate Feb. 26, 2013
8377317 Method for manufacturing printed circuit board with thick traces Feb. 19, 2013
8372472 Forming photovoltaic conductive features from multiple inks Feb. 12, 2013
8366947 Method for transferring nanostructures into a substrate Feb. 5, 2013
8349194 Method for manufacturing flexible display substrate and flexible display device Jan. 8, 2013
8333459 Printing device Dec. 18, 2012
8329591 Method of manufacturing a semiconductor device Dec. 11, 2012
8329001 Structure, magnetic recording medium, and method of producing the same Dec. 11, 2012
8313661 Deep trench liner removal process Nov. 20, 2012
8308963 Etchant for etching metal wiring layers and method for forming thin film transistor by using the same Nov. 13, 2012

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