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Class Information
Number: 216/109
Name: Etching a substrate: processes > Nongaseous phase etching of substrate > Etching inorganic substrate > Substrate contains elemental metal, alloy thereof, or metal compound > Etchant contains acid > Etchant contains fluoride ion
Description: Process wherein the etchant contains fluoride ion.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7578889 |
Methodology for cleaning of surface metal contamination from electrode assemblies |
Aug. 25, 2009 |
| 7550091 |
Implant surface preparation |
Jun. 23, 2009 |
| 7547399 |
Implant surface preparation |
Jun. 16, 2009 |
| 7531492 |
Composition for the removal of sidewall residues |
May. 12, 2009 |
| 7501073 |
Methods for producing metallic implants having roughened surfaces |
Mar. 10, 2009 |
| 7497963 |
Etching method |
Mar. 3, 2009 |
| 7491341 |
Method of making tapered capillary tips with constant inner diameters |
Feb. 17, 2009 |
| 7417016 |
Composition for the removing of sidewall residues |
Aug. 26, 2008 |
| 7367343 |
Method of cleaning a surface of a cobalt-containing material, method of forming an opening to a cobalt-containing material, semiconductor processing method of forming an integrated circuit com |
May. 6, 2008 |
| 7368065 |
Implants with textured surface and methods for producing the same |
May. 6, 2008 |
| 7347951 |
Method of manufacturing electronic device |
Mar. 25, 2008 |
| 7314575 |
Manufacturing method of glass substrate for magnetic disk, and manufacturing method of magnetic disk |
Jan. 1, 2008 |
| 7306681 |
Method of cleaning a semiconductor substrate |
Dec. 11, 2007 |
| 7276181 |
Method for preparing decorative glass using glass etching composition |
Oct. 2, 2007 |
| 7169317 |
Implant surface preparation |
Jan. 30, 2007 |
| 7098143 |
Etching method using an at least semi-solid media |
Aug. 29, 2006 |
| 7097783 |
Method for inspecting a titanium-based component |
Aug. 29, 2006 |
| 7067015 |
Modified clean chemistry and megasonic nozzle for removing backside CMP slurries |
Jun. 27, 2006 |
| 7048870 |
Metallic implant and process for treating a metallic implant |
May. 23, 2006 |
| 7033519 |
Method of fabricating sub-micron structures in transparent dielectric materials |
Apr. 25, 2006 |
| 7022254 |
Chromate-free method for surface etching of titanium |
Apr. 4, 2006 |
| 7018552 |
Method of manufacturing electronic device |
Mar. 28, 2006 |
| 7001533 |
Chromate-free method for surface etching of aluminum and aluminum alloys |
Feb. 21, 2006 |
| 6969474 |
Implant surface preparation |
Nov. 29, 2005 |
| 6953533 |
Process for removing chromide coatings from metal substrates, and related compositions |
Oct. 11, 2005 |
| 6933254 |
Plasma-resistant articles and production method thereof |
Aug. 23, 2005 |
| 6908561 |
Polymide-to-substrate adhesion promotion in HDI |
Jun. 21, 2005 |
| 6902626 |
Method for roughening copper surface |
Jun. 7, 2005 |
| 6893578 |
Selective etchant for oxide sacrificial material in semiconductor device fabrication |
May. 17, 2005 |
| 6843928 |
Method for removing metal cladding from airfoil substrate |
Jan. 18, 2005 |
| 6843929 |
Accelerated etching of chromium |
Jan. 18, 2005 |
| 6821452 |
Etchant |
Nov. 23, 2004 |
| 6808746 |
Multilayer carbon nanotube films and method of making the same |
Oct. 26, 2004 |
| 6802911 |
Method for cleaning damaged layers and polymer residue from semiconductor device |
Oct. 12, 2004 |
| 6800214 |
Method for correcting characteristics of attenuated phase-shift mask |
Oct. 5, 2004 |
| 6793838 |
Chemical milling process and solution for cast titanium alloys |
Sep. 21, 2004 |
| 6793738 |
Method for processing acid treatment solution, solution processed thereby, and method for treating articles therewith |
Sep. 21, 2004 |
| 6790786 |
Etching processes for integrated circuit manufacturing including methods of forming capacitors |
Sep. 14, 2004 |
| 6776918 |
Titanium composite material |
Aug. 17, 2004 |
| 6733597 |
Method of cleaning a dual damascene structure |
May. 11, 2004 |
| 6726848 |
Apparatus and method for single substrate processing |
Apr. 27, 2004 |
| 6706121 |
Device and method for the treatment of semiconductor wafers |
Mar. 16, 2004 |
| 6692580 |
Method of cleaning a dual damascene structure |
Feb. 17, 2004 |
| 6669857 |
Process for etching bismuth-containing oxide films |
Dec. 30, 2003 |
| 6649947 |
Surface-micromachined rotatable member having a low-contact-area hub |
Nov. 18, 2003 |
| 6635184 |
Method for pattern-etching alumina layers and products |
Oct. 21, 2003 |
| 6634186 |
Process for cutting a glass sheet and a glass disk for a recording medium |
Oct. 21, 2003 |
| 6620332 |
Method for making a mesh-and-plate surgical implant |
Sep. 16, 2003 |
| 6607674 |
Method of repairing a phase shifting mask |
Aug. 19, 2003 |
| 6605230 |
Solutions and processes for removal of sidewall residue after dry etching |
Aug. 12, 2003 |
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