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Class Information
Number: 216/103
Name: Etching a substrate: processes > Nongaseous phase etching of substrate > Etching inorganic substrate > Substrate contains elemental metal, alloy thereof, or metal compound > Metal is elemental aluminum, an alloy, or compound thereof > Etchant contains acid
Description: Process wherein the substrate is etched with H+ ion producing or containing material.

Sub-classes under this class:

Class Number Class Name Patents
216/104 Etchant contains fluoride ion 79

Patents under this class:
1 2 3 4 5

Patent Number Title Of Patent Date Issued
8641829 Substrate processing system Feb. 4, 2014
8618000 Selective wet etching of hafnium aluminum oxide films Dec. 31, 2013
8617417 Cleaning composition, method for producing semiconductor device, and cleaning method Dec. 31, 2013
8557137 Polishing composition for nickel phosphorous memory disks Oct. 15, 2013
8529780 Ceramic substrate material, method for the production and use thereof, and antenna or antenna array Sep. 10, 2013
8506836 Methods for manufacturing components from articles formed by additive-manufacturing processes Aug. 13, 2013
8497215 Edge deletion of thin-layer solar modules by etching Jul. 30, 2013
8461057 Process for the rough-etching of silicon solar cells Jun. 11, 2013
8419965 System and method for texturing glass Apr. 16, 2013
8419953 Method and system for removing an antiferromagnetic seed structure Apr. 16, 2013
8409455 Methods and devices for ultra smooth substrate for use in thin film solar cell manufacturing Apr. 2, 2013
8324114 Method and apparatus for silicon oxide residue removal Dec. 4, 2012
8303839 Trioka acid semiconductor cleaning compositions and methods of use Nov. 6, 2012
8288291 Method for removal of bulk metal contamination from III-V semiconductor substrates Oct. 16, 2012
8283258 Selective wet etching of hafnium aluminum oxide films Oct. 9, 2012
8257609 Etchant for etching metal wiring layers and method for forming thin film transistor by using the same Sep. 4, 2012
8236704 Etchant and array substrate having copper lines etched by the etchant Aug. 7, 2012
8226841 Polishing composition for nickel-phosphorous memory disks Jul. 24, 2012
8133538 Method of producing mold having uneven structure Mar. 13, 2012
8105498 Method for fabricating variable parallel plate capacitors Jan. 31, 2012
8083955 Selective chemical etch method for MRAM freelayers Dec. 27, 2011
8066898 Surface treatment solution for the fine surface processing of a glass substrate containing multiple ingredients Nov. 29, 2011
8021491 Method for selectively removing coatings from metal substrates Sep. 20, 2011
7976718 System and method for selective etching of silicon nitride during substrate processing Jul. 12, 2011
7968000 Etchant composition, and method of fabricating metal pattern and thin film transistor array panel using the same Jun. 28, 2011
7959820 Substrate processing method and substrate processing apparatus Jun. 14, 2011
7935265 Ceramic substrate material, method for the production and use thereof, and antenna or antenna array May. 3, 2011
7910010 Ink jet head having an electrostatic actuator and manufacturing method of the same Mar. 22, 2011
7897059 High tin solder etching solution Mar. 1, 2011
7887736 Superhydrophobic polymer fabrication Feb. 15, 2011
7883635 Substrate treating apparatus and method Feb. 8, 2011
7879255 Method and composition for electrochemically polishing a conductive material on a substrate Feb. 1, 2011
7851372 Composition for removing an insulation material, method of removing an insulation layer and method of recycling a substrate using the same Dec. 14, 2010
7811464 Preferential etching method and silicon single crystal substrate Oct. 12, 2010
7759253 Method and material for forming a double exposure lithography pattern Jul. 20, 2010
7691280 Ink jet printing of etchants and modifiers Apr. 6, 2010
7628932 Wet etch suitable for creating square cuts in si Dec. 8, 2009
7578889 Methodology for cleaning of surface metal contamination from electrode assemblies Aug. 25, 2009
7575694 Method of selectively stripping a metallic coating Aug. 18, 2009
7566404 Method of fabricating a thin film transistor Jul. 28, 2009
7521373 Compositions for dissolution of low-k dielectric films, and methods of use Apr. 21, 2009
7404910 Etching solution, etched article and method for etched article Jul. 29, 2008
7402261 Slurry compositions, methods of preparing slurry compositions, and methods of polishing an object using slurry compositions Jul. 22, 2008
7396484 Methods of fabricating complex blade geometries from silicon wafers and strengthening blade geometries Jul. 8, 2008
7384570 Anodized aluminum etching process and related apparatus Jun. 10, 2008
7368065 Implants with textured surface and methods for producing the same May. 6, 2008
7357878 Etchant, and method for fabricating a thin film transistor subtrate including conductive wires using the etchant and the resulting structure Apr. 15, 2008
7341958 Integrated process for thin film resistors with silicides Mar. 11, 2008
7329366 Method of polishing implantable medical devices to lower thrombogenecity and increase mechanical stability Feb. 12, 2008
7314575 Manufacturing method of glass substrate for magnetic disk, and manufacturing method of magnetic disk Jan. 1, 2008

1 2 3 4 5

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