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Class Information
Number: 216
Name: Etching a substrate: processes >
Description: Class 216 is an integral part of Class 156. It incorporates all the definitions, rules, and hierarchy pertaining to subject matter of Class 156.


Class Number Class Name No. of Patents
216/33

Adhesive or autogenous bonding of two or more self-sustaining preforms wherein at least two of the preforms are not intended to be removed (e.g., prefabricated base, etc.)

333
216/34

Etching improves or promotes adherence of preforms being bonded

108
216/35

Bonding of preform of metal or an alloy thereof to a preform of a nonmetal

80
216/36

Removing at least one of the self-sustaining preforms or a portion thereof

113
216/37

Etching and coating occur in the same processing chamber

225
216/2

Etching of semiconductor material to produce an article having a nonelectrical function

923
216/56

Etching to produce porous or perforated article

305
216/39

Forming groove or hole in a substrate which is subsequently filled or coated

372
216/4

Forming or treating a sign or material useful in a sign

30
216/5

Sign or material is electroluminescent

33
216/11

Forming or treating an article whose final configuration has a projection

355
216/28

Forming or treating an ornamented article

27
216/32

Treating elemental metal or alloy thereof

22
216/31

Treating glass (e.g., mirror, etc.)

26
216/30

Treating stone (e.g., marble, etc.)

11
216/29

Wood surface treated or wood grain produced

5
216/23

Forming or treating article containing a liquid crystal material

147
216/22

Forming or treating article containing magnetically responsive material

597
216/8

Forming or treating cylindrical or tubular article having pattern or design on its surface

37
216/9

Forming or treating an embossing cylinder or tubular article

25
216/10

Forming or treating liquid transfer cylinder or tubular article (e.g., printing roll, etc.)

25
216/13

Forming or treating electrical conductor article (e.g., circuit, etc.)

809
216/20

Adhesive or autogenous bonding of self-sustaining preforms (e.g., prefabricated base, etc.)

481
216/15

Forming or treating a crossover

31
216/14

Forming or treating lead frame or beam lead

106
216/17

Forming or treating of groove or through hole

425
216/19

Filling or coating of groove or through hole in a conductor with an insulator

90
216/18

Filling or coating of groove or through hole with a conductor to form an electrical interconnection

542
216/16

Forming or treating resistive material

162
216/21

Repairing circuit

27
216/7

Forming or treating fibrous article or fiber reinforced composite structure

26
216/3

Forming or treating josephson junction article

59
216/12

Forming or treating mask used for its nonetching function (e.g., shadow mask, x-ray mask, etc.)

253
216/6

Forming or treating material useful in a capacitor

120
216/24

Forming or treating optical article

661
216/26

Lens

148
216/25

Phosphor screen

37
216/27

Forming or treating thermal ink jet article (e.g., print head, liquid jet recording head, etc.)

605
216/40

Forming pattern using lift off technique

144
216/57

Gas phase and nongaseous phase etching on the same substrate

149
216/58

Gas phase etching of substrate

467
216/63

Application of energy to the gaseous etchant or to the substrate being etched

234
216/64

Etchant is devoid of chlorocarbon or fluorocarbon compound (e.g., c.f.c., etc.)

63
216/66

Using ion beam, ultraviolet, or visible light

670
216/65

Using laser

467
216/67

Using plasma

1975
216/71

Specific configuration of electrodes to generate the plasma

259
216/68

Using coil to generate the plasma

191
216/69

Using microwave to generate the plasma

170
216/70

Magnetically enhancing the plasma

115
216/72

Etching a multiple layered substrate where the etching condition used produces a different etching rate or characteristic between at least two of the layers of the substrate

263
216/74

Etching inorganic substrate

146
216/81

Etching elemental carbon containing substrate

86
216/79

Etching silicon containing substrate

795
216/80

Silicon containing substrate is glass

198
216/75

Substrate contains elemental metal, alloy thereof, or metal compound

334
216/76

Etching of substrate containing at least one compound having at least one oxygen atom and at least one metal atom

160
216/77

Etching of substrate containing elemental aluminum, or an alloy or compound thereof

186
216/78

Etching of substrate containing elemental copper, or an alloy or compound thereof

105
216/73

Etching vapor produced by evaporation, boiling, or sublimation

32
216/62

Irradiating, ion implanting, alloying, diffusing, or chemically reacting the substrate prior to etching to change properties of substrate toward the etchant

330
216/59

With measuring, testing, or inspecting

339
216/61

By electrical means or of an electrical property

123
216/60

By optical means or of an optical property

339
216/55

Heating or baking of substrate prior to etching to change the chemical properties of substrate toward the etchant

86
216/41

Masking of a substrate using material resistant to an etchant (i.e., etch resist)

1047
216/43

Adhesively bonding resist to substrate

39
216/48

Mask is exposed to nonimaging radiation

729
216/47

Mask is multilayer resist

413
216/45

Mask is reusable (i.e., stencil)

35
216/51

Mask resist contains inorganic material

344
216/49

Mask resist contains organic compound

334
216/50

Mask resist contains a color imparting agent

17
216/46

Masking of sidewall

108
216/44

Mechanically forming pattern into a resist

72
216/42

Resist material applied in particulate form or spray

74
216/52

Mechanically shaping, deforming, or abrading of substrate

634
216/53

Nongaseous phase etching

96
216/83

Nongaseous phase etching of substrate

559
216/96

Etching inorganic substrate

160
216/100

Substrate contains elemental metal, alloy thereof, or metal compound

525
216/108

Etchant contains acid

399
216/109

Etchant contains fluoride ion

158
216/101

Etching of a compound containing at least one oxygen atom and at least one metal atom

249
216/102

Metal is elemental aluminum, an alloy, or compound thereof

205
216/103

Etchant contains acid

186
216/104

Etchant contains fluoride ion

63
216/105

Metal is elemental copper, an alloy, or compound thereof

280
216/106

Etchant contains acid

239
216/107

Etchant contains fluoride ion

47
216/99

Substrate contains silicon or silicon compound

626
216/97

Substrate is glass

308
216/98

Frosting glass

9
216/94

Etching using radiation (e.g., laser, electron-beam, ion-beam, etc.)

128
216/87

Irradiating, ion implanting, alloying, diffusing, or chemically reacting the substrate prior to ethching to change properties of substrate toward the etchant

225
216/92

Projecting etchant against a moving substrate or controlling the angle or pattern projection of the etchant or controlling the angle or pattern of movement of the substrate

243
216/93

Recycling, regenerating, or rejunevating etchant

184
216/90

Relative movement between the substrate and a confined pool of etchant

171
216/91

Rotating, repeated dipping, or advancing movement of substrate

145
216/95

Substrate is multilayered

146
216/88

Using film of etchant between a stationary surface and a moving surface (e.g., chemical lapping, etc.)

478
216/89

Etchant contains solid particle (e.g., abrasive for polishing, etc.)

404
216/84

With measuring, testing, or inspecting

207
216/86

By electrical means or of an electrical property

103
216/85

By optical means or of an optical property

134
216/54

Pattern or design applied by transfer

144
216/38

Planarizing a nonplanar surface

404
 
 
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