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Class Information
Number: 211/41.18
Name: Supports: racks > Special article > Platelike > Semiconductor wafer
Description: Device specially designed to support semiconductor wafer (e.g., wafer boat).
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7611766 |
Wafer protective sheet |
Nov. 3, 2009 |
| 7530462 |
Wafer storage container |
May. 12, 2009 |
| 7500564 |
Wafer carrying apparatus |
Mar. 10, 2009 |
| 7501370 |
High purity silicon carbide wafer boats |
Mar. 10, 2009 |
| 7484958 |
Vertical boat for heat treatment and method for producing the same |
Feb. 3, 2009 |
| 7476960 |
System and method for improved auto-boating |
Jan. 13, 2009 |
| 7458469 |
Substrate transfer apparatus and method, and storage medium |
Dec. 2, 2008 |
| 7442038 |
Heat treatment jig for semiconductor silicon substrate |
Oct. 28, 2008 |
| 7393207 |
Wafer support tool for heat treatment and heat treatment apparatus |
Jul. 1, 2008 |
| 7381673 |
Composite material, wafer holding member and method for manufacturing the same |
Jun. 3, 2008 |
| 7334690 |
Substrate supporting rod and substrate cassette using the same |
Feb. 26, 2008 |
| 7334691 |
Glass substrate cassette |
Feb. 26, 2008 |
| 7331780 |
Heat treatment jig for semiconductor wafer |
Feb. 19, 2008 |
| 7329947 |
Heat treatment jig for semiconductor substrate |
Feb. 12, 2008 |
| 7325692 |
Cassette having separation plates for storing a plurality of semiconductor wafers |
Feb. 5, 2008 |
| 7316315 |
Thin plate storage container and lid having at least one thin plate supporting member |
Jan. 8, 2008 |
| 7316325 |
Substrate container |
Jan. 8, 2008 |
| 7299927 |
Stackable wafer container with raised handle and ribs |
Nov. 27, 2007 |
| 7270240 |
Device for accomodating substrates |
Sep. 18, 2007 |
| 7252199 |
Disk cassette system |
Aug. 7, 2007 |
| 7246708 |
Adjustable cassette for substrates |
Jul. 24, 2007 |
| 7241141 |
Low contact SiC boat for silicon nitride stress reduction |
Jul. 10, 2007 |
| 7225934 |
Cassette for receiving glass substrates |
Jun. 5, 2007 |
| 7219802 |
Thin wafer insert |
May. 22, 2007 |
| 7216766 |
Thin plate storage container with handled supporting member |
May. 15, 2007 |
| 7210925 |
Heat treatment jig for silicon semiconductor substrate |
May. 1, 2007 |
| 7201280 |
Wafer boat for consolidation of porous thin layer |
Apr. 10, 2007 |
| 7188736 |
Structure for racking substrates |
Mar. 13, 2007 |
| 7163393 |
Heat treatment jig for semiconductor silicon substrate |
Jan. 16, 2007 |
| 7163110 |
Adjustable cassette for accommodating substrates and method for adjusting same |
Jan. 16, 2007 |
| 7160514 |
Slide case with removable rack |
Jan. 9, 2007 |
| 7131176 |
Wafer support attachment for a semi-conductor wafer transport container |
Nov. 7, 2006 |
| 7121414 |
Semiconductor cassette reducer |
Oct. 17, 2006 |
| 7086540 |
Storage cassette with positionable stoppers and method for operating the same |
Aug. 8, 2006 |
| 7055702 |
Slip resistant horizontal semiconductor wafer boat |
Jun. 6, 2006 |
| 7051887 |
Supporting column and cassette using the same |
May. 30, 2006 |
| 7032758 |
Workpiece holder for clean container |
Apr. 25, 2006 |
| 7033168 |
Semiconductor wafer boat for a vertical furnace |
Apr. 25, 2006 |
| 7017749 |
Precision substrate storage container and retaining member therefor |
Mar. 28, 2006 |
| 7017758 |
Wafer protective cassette |
Mar. 28, 2006 |
| 6981594 |
Method and apparatus to facilitate transport of semiconductor wafers |
Jan. 3, 2006 |
| 6976585 |
Wafer carrier with ultraphobic surfaces |
Dec. 20, 2005 |
| 6959823 |
Wafer guides for processing semiconductor substrates |
Nov. 1, 2005 |
| 6953338 |
Device for thermal treatment of substrates |
Oct. 11, 2005 |
| 6951284 |
Wafer carrier with wafer retaining system |
Oct. 4, 2005 |
| 6938774 |
Tray carrier with ultraphobic surfaces |
Sep. 6, 2005 |
| 6938783 |
Carrier tape |
Sep. 6, 2005 |
| 6939132 |
Semiconductor workpiece apparatus |
Sep. 6, 2005 |
| 6929471 |
Heat insulation pedestal and vertical type furnace tube |
Aug. 16, 2005 |
| 6874638 |
Wafer cassette |
Apr. 5, 2005 |
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