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Class Information
Number: 205/656
Name: Electrolysis: processes, compositions used therein, and methods of preparing the compositions > Electrolytic erosion of a workpiece for shape or surface change (e.g., etching, polishing, etc.) (process and electrolyte composition) > Eroding workpiece of nonuniform internal electrical characteristics
Description: Process in which the workpiece has electrical characteristics which vary within its interior (e.g., doped semiconductor with n and p regions, etc.), so that erosion proceeds at differing rates on one or more localized areas or portions thereof, usually to confine the erosion to desired locations.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7628906 |
Method of manufacturing a spectral filter for green and longer wavelengths |
Dec. 8, 2009 |
| 7494936 |
Method for electrochemical etching of semiconductor material using positive potential dissolution (PPD) in solutions free from hydrogen fluoride (HF) |
Feb. 24, 2009 |
| 7332068 |
Selective removal of dielectric materials and plating process using same |
Feb. 19, 2008 |
| 7294248 |
Fabrication and activation processes for nanostructure composite field emission cathodes |
Nov. 13, 2007 |
| 7135120 |
Method of manufacturing a spectral filter for green and shorter wavelengths |
Nov. 14, 2006 |
| 7045052 |
Method of manufacturing a spectral filter for green and longer wavelengths |
May. 16, 2006 |
| 6805972 |
Method of forming nanoporous membranes |
Oct. 19, 2004 |
| 6803637 |
Micromechanical component with different doping types so that one type is anodized into porous silicon |
Oct. 12, 2004 |
| 6790340 |
Method and apparatus for radiation assisted electrochemical etching and etched product |
Sep. 14, 2004 |
| 6743406 |
Family of discretely sized silicon nanoparticles and method for producing the same |
Jun. 1, 2004 |
| 6726815 |
Electrochemical etching cell |
Apr. 27, 2004 |
| 6706166 |
Method for improving an electrodeposition process through use of a multi-electrode assembly |
Mar. 16, 2004 |
| 6602397 |
Method for producing a filter |
Aug. 5, 2003 |
| 6585947 |
Method for producing silicon nanoparticles |
Jul. 1, 2003 |
| 6521118 |
Semiconductor etching process and apparatus |
Feb. 18, 2003 |
| 6440295 |
Method for electropolishing metal on semiconductor devices |
Aug. 27, 2002 |
| 6413408 |
Method for the production of a porous layer |
Jul. 2, 2002 |
| 6398940 |
Method for fabricating nanoscale patterns on a surface |
Jun. 4, 2002 |
| 6376285 |
Annealed porous silicon with epitaxial layer for SOI |
Apr. 23, 2002 |
| 6340425 |
Method of manufacturing cold cathode device having porous emitter |
Jan. 22, 2002 |
| 6328876 |
Method for producting a filter |
Dec. 11, 2001 |
| 6261963 |
Reverse electroplating of barrier metal layer to improve electromigration performance in copper interconnect devices |
Jul. 17, 2001 |
| 6193762 |
Surface for use on an implantable device |
Feb. 27, 2001 |
| 6180526 |
Method for improving conformity of a conductive layer in a semiconductor device |
Jan. 30, 2001 |
| 6139758 |
Method of manufacturing a micromachined thermal flowmeter |
Oct. 31, 2000 |
| 6083376 |
Rotating system for electrochemical treatment of semiconductor wafers |
Jul. 4, 2000 |
| 6033548 |
Rotating system and method for electrodepositing materials on semiconductor wafers |
Mar. 7, 2000 |
| 6004450 |
Process for forming a porous silicon member in a crystalline silicon member |
Dec. 21, 1999 |
| 5997713 |
Silicon etching process for making microchannel plates |
Dec. 7, 1999 |
| 5993637 |
Electrode structure, electrolytic etching process and apparatus |
Nov. 30, 1999 |
| 5968336 |
Method for fabricating lithographic stencil masks |
Oct. 19, 1999 |
| 5965005 |
Mask for porous silicon formation |
Oct. 12, 1999 |
| 5935410 |
Process and device for the lighting-supported structuring of porous silicon |
Aug. 10, 1999 |
| 5922029 |
Surface for use on an implantable device and method of production therefor |
Jul. 13, 1999 |
| 5914183 |
Porous semiconductor material |
Jun. 22, 1999 |
| 5893966 |
Method and apparatus for continuous processing of semiconductor wafers |
Apr. 13, 1999 |
| 5863412 |
Etching method and process for producing a semiconductor element using said etching method |
Jan. 26, 1999 |
| 5810994 |
Method for fabricating silicon-on-insulator device wafer |
Sep. 22, 1998 |
| 5798284 |
Process for fabricating array of photovoltaic elements connected in series |
Aug. 25, 1998 |
| 5695569 |
Removal of metal contamination |
Dec. 9, 1997 |
| 5690807 |
Method for producing semiconductor particles |
Nov. 25, 1997 |
| 5681448 |
Electrochemical process and system for etching semiconductor substrates |
Oct. 28, 1997 |
| 5677248 |
Method of etching semiconductor wafers |
Oct. 14, 1997 |
| 5674758 |
Silicon on insulator achieved using electrochemical etching |
Oct. 7, 1997 |
| 5650043 |
Etching method using NH.sub.4 F solution to make surface of silicon smooth in atomic order |
Jul. 22, 1997 |
| 5650042 |
Method for thinning a semiconductor film on an insulating film |
Jul. 22, 1997 |
| 5643803 |
Production method of a semiconductor dynamic sensor |
Jul. 1, 1997 |
| 5580431 |
Composite wire microelectrode and method of making same |
Dec. 3, 1996 |
| 5576249 |
Electrochemically etched multilayer semiconductor structures |
Nov. 19, 1996 |
| 5565084 |
Electropolishing methods for etching substrate in self alignment |
Oct. 15, 1996 |
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