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Class Information
Number: 204/298.38
Name: Chemistry: electrical and wave energy > Apparatus > Coating, forming or etching by sputtering > Etching > Microwave excitation
Description: Apparatus including means for generating plasma by excitation from a source of microwaves.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7491908 |
Plasma processing device and ashing method |
Feb. 17, 2009 |
| 7485827 |
Plasma generator |
Feb. 3, 2009 |
| 7432468 |
Plasma processing apparatus and plasma processing method |
Oct. 7, 2008 |
| 7399943 |
Apparatus for metal plasma vapor deposition and re-sputter with source and bias power frequencies applied through the workpiece |
Jul. 15, 2008 |
| 7400096 |
Large area plasma source |
Jul. 15, 2008 |
| 7354504 |
Dielectric profile controlled microwave sterilization system |
Apr. 8, 2008 |
| 7311796 |
Plasma processing apparatus |
Dec. 25, 2007 |
| 7189939 |
Portable microwave plasma discharge unit |
Mar. 13, 2007 |
| 7141756 |
Microwave plasma processing apparatus, plasma ignition method, plasma forming method, and plasma processing method |
Nov. 28, 2006 |
| 7071442 |
Plasma processing apparatus |
Jul. 4, 2006 |
| 6951821 |
Processing system and method for chemically treating a substrate |
Oct. 4, 2005 |
| 6891123 |
Plasma ignition method and apparatus |
May. 10, 2005 |
| 6870123 |
Microwave applicator, plasma processing apparatus having same, and plasma processing method |
Mar. 22, 2005 |
| 6847003 |
Plasma processing apparatus |
Jan. 25, 2005 |
| 6823816 |
Plasma processing system |
Nov. 30, 2004 |
| 6818852 |
Microwave plasma processing device, plasma processing method, and microwave radiating member |
Nov. 16, 2004 |
| 6805779 |
Plasma generation using multi-step ionization |
Oct. 19, 2004 |
| 6753496 |
Plasma processing apparatus |
Jun. 22, 2004 |
| 6696662 |
Methods and apparatus for plasma processing |
Feb. 24, 2004 |
| 6657151 |
Plasma processing device |
Dec. 2, 2003 |
| 6622650 |
Plasma processing apparatus |
Sep. 23, 2003 |
| 6429399 |
Discharge tube for a local etching apparatus and a local etching apparatus using the discharge tube |
Aug. 6, 2002 |
| 6422172 |
Plasma processing apparatus and plasma processing method |
Jul. 23, 2002 |
| 6375860 |
Controlled potential plasma source |
Apr. 23, 2002 |
| 6358361 |
Plasma processor |
Mar. 19, 2002 |
| 6355902 |
Plasma film forming method and plasma film forming apparatus |
Mar. 12, 2002 |
| 6332947 |
Plasma processing apparatus and plasma processing method using the same |
Dec. 25, 2001 |
| 6290807 |
Apparatus and method for microwave plasma process |
Sep. 18, 2001 |
| 6270618 |
Plasma processing apparatus |
Aug. 7, 2001 |
| 6228210 |
Surface wave coupled plasma etching apparatus |
May. 8, 2001 |
| 6198067 |
Plasma processing device for circuit supports |
Mar. 6, 2001 |
| 6189481 |
Microwave plasma processing apparatus |
Feb. 20, 2001 |
| 6172321 |
Method and apparatus for plasma processing apparatus |
Jan. 9, 2001 |
| 6158382 |
Method for forming a deposited film by plasma chemical vapor deposition and apparatus for forming a deposited film by plasma chemical vapor deposition |
Dec. 12, 2000 |
| 6152071 |
High-frequency introducing means, plasma treatment apparatus, and plasma treatment method |
Nov. 28, 2000 |
| 6109208 |
Plasma generating apparatus with multiple microwave introducing means |
Aug. 29, 2000 |
| 6091045 |
Plasma processing apparatus utilizing a microwave window having a thinner inner area |
Jul. 18, 2000 |
| 6076484 |
Apparatus and method for microwave plasma process |
Jun. 20, 2000 |
| 6039834 |
Apparatus and methods for upgraded substrate processing system with microwave plasma source |
Mar. 21, 2000 |
| 6034346 |
Method and apparatus for plasma processing apparatus |
Mar. 7, 2000 |
| 6024826 |
Plasma reactor with heated source of a polymer-hardening precursor material |
Feb. 15, 2000 |
| 5997686 |
Process for setting a working rate distribution in an etching or plasma CVD apparatus |
Dec. 7, 1999 |
| 5985091 |
Microwave plasma processing apparatus and microwave plasma processing method |
Nov. 16, 1999 |
| 5975012 |
Deposition apparatus |
Nov. 2, 1999 |
| 5961851 |
Microwave plasma discharge device |
Oct. 5, 1999 |
| 5961773 |
Plasma processing apparatus and plasma processing method using the same |
Oct. 5, 1999 |
| 5961776 |
Surface processing apparatus |
Oct. 5, 1999 |
| 5954882 |
Plasma reactor |
Sep. 21, 1999 |
| 5951887 |
Plasma processing apparatus and plasma processing method |
Sep. 14, 1999 |
| RE36224 |
Microwave plasma processing process and apparatus |
Jun. 8, 1999 |
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