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Class Information
Number: 204/298.36
Name: Chemistry: electrical and wave energy > Apparatus > Coating, forming or etching by sputtering > Etching > Beam or directed flux etching (e.g., ion beam, etc.)
Description: Apparatus including means for sputter etching or ion milling a workpiece utilizing a beam of ions or directed flux generated from a separate ion source.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7626183 |
Methods for modifying features of a workpiece using a gas cluster ion beam |
Dec. 1, 2009 |
| 7504623 |
Device and method for milling of material using ions |
Mar. 17, 2009 |
| 7316764 |
System and method for performing sputter etching using independent ion and electron sources and a substrate biased with an a-symmetric bi-polar DC pulse signal |
Jan. 8, 2008 |
| 7309549 |
Method for quartz bump defect repair with less substrate damage |
Dec. 18, 2007 |
| 7288173 |
Ion beam processing system and ion beam processing method |
Oct. 30, 2007 |
| 7264741 |
Coater having substrate cleaning device and coating deposition methods employing such coater |
Sep. 4, 2007 |
| 7241360 |
Method and apparatus for neutralization of ion beam using AC ion source |
Jul. 10, 2007 |
| 7144484 |
Ion mill shutter system |
Dec. 5, 2006 |
| 7132673 |
Device and method for milling of material using ions |
Nov. 7, 2006 |
| 7056416 |
Atmospheric pressure plasma processing method and apparatus |
Jun. 6, 2006 |
| 6987067 |
Semiconductor copper line cutting method |
Jan. 17, 2006 |
| 6979389 |
Micro-actuation apparatus for head ABS planarity (PTR) control during slider machining |
Dec. 27, 2005 |
| 6933081 |
Method for quartz bump defect repair with less substrate damage |
Aug. 23, 2005 |
| 6929721 |
Ion beam modification of residual stress gradients in thin film polycrystalline silicon membranes |
Aug. 16, 2005 |
| 6922118 |
Micro electrical mechanical system (MEMS) tuning using focused ion beams |
Jul. 26, 2005 |
| 6809066 |
Ion texturing methods and articles |
Oct. 26, 2004 |
| 6805779 |
Plasma generation using multi-step ionization |
Oct. 19, 2004 |
| 6773557 |
System for frequency adjustment of piezoelectric resonators by dual-track ion etching |
Aug. 10, 2004 |
| 6768079 |
Susceptor with built-in plasma generation electrode and manufacturing method therefor |
Jul. 27, 2004 |
| 6761803 |
Large area silicon cone arrays fabrication and cone based nanostructure modification |
Jul. 13, 2004 |
| 6758947 |
Damage-free sculptured coating deposition |
Jul. 6, 2004 |
| 6676989 |
Method and system for improving the effectiveness of medical stents by the application of gas cluster ion beam technology |
Jan. 13, 2004 |
| 6641705 |
Apparatus and method for reducing differential sputter rates |
Nov. 4, 2003 |
| 6565720 |
Substrate removal as a function of sputtered ions |
May. 20, 2003 |
| 6537606 |
System and method for improving thin films by gas cluster ion beam processing |
Mar. 25, 2003 |
| 6521902 |
Process for minimizing electrostatic damage and pole tip recession of magnetoresistive magnetic recording head during pole tip trimming by focused ion beam milling |
Feb. 18, 2003 |
| 6511575 |
Treatment apparatus and method utilizing negative hydrogen ion |
Jan. 28, 2003 |
| 6491800 |
Method and system for improving the effectiveness of artificial hip joints by the application of gas cluster ion beam technology |
Dec. 10, 2002 |
| 6402882 |
Device and method for ion beam etching using space-time detection |
Jun. 11, 2002 |
| 6391215 |
Diamond marking |
May. 21, 2002 |
| 6354438 |
Focused ion beam apparatus for forming thin-film magnetic recording heads |
Mar. 12, 2002 |
| 6331227 |
Enhanced etching/smoothing of dielectric surfaces |
Dec. 18, 2001 |
| 6322672 |
Method and apparatus for milling copper interconnects in a charged particle beam system |
Nov. 27, 2001 |
| 6288357 |
Ion milling planarization of semiconductor workpieces |
Sep. 11, 2001 |
| 6264787 |
Apparatus for fabricating a taper on a recording head slider |
Jul. 24, 2001 |
| 6217724 |
Coated platen design for plasma immersion ion implantation |
Apr. 17, 2001 |
| 6106683 |
Grazing angle plasma polisher (GAPP) |
Aug. 22, 2000 |
| 6105589 |
Oxidative cleaning method and apparatus for electron microscopes using an air plasma as an oxygen radical source |
Aug. 22, 2000 |
| 6089186 |
Vacuum coating forming device |
Jul. 18, 2000 |
| 6089185 |
Thin film forming apparatus |
Jul. 18, 2000 |
| 6051120 |
Thin film forming apparatus |
Apr. 18, 2000 |
| 6045667 |
Process and system for the treatment of substrates using ions from a low-voltage arc discharge |
Apr. 4, 2000 |
| 5976328 |
Pattern forming method using charged particle beam process and charged particle beam processing system |
Nov. 2, 1999 |
| 5948217 |
Method and apparatus for endpointing while milling an integrated circuit |
Sep. 7, 1999 |
| 5922179 |
Apparatus for etching and coating sample specimens for microscopic analysis |
Jul. 13, 1999 |
| 5916424 |
Thin film magnetic recording heads and systems and methods for manufacturing the same |
Jun. 29, 1999 |
| 5811022 |
Inductive plasma reactor |
Sep. 22, 1998 |
| 5744400 |
Apparatus and method for dry milling of non-planar features on a semiconductor surface |
Apr. 28, 1998 |
| 5709784 |
Process and apparatus for workpiece coating |
Jan. 20, 1998 |
| 5707501 |
Filter manufacturing apparatus |
Jan. 13, 1998 |
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