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Class Information
Number: 204/298.35
Name: Chemistry: electrical and wave energy > Apparatus > Coating, forming or etching by sputtering > Etching > Multi-chamber, load/unload means or moving workpiece
Description: Apparatus including a plurality of distinct chambers or subchambers, means for loading or unloading a workpiece, or means for moving a workpiece.

Patents under this class:
1 2 3 4 5

Patent Number Title Of Patent Date Issued
8623765 Processed object processing apparatus, processed object processing method, pressure control method, processed object transfer method, and transfer apparatus Jan. 7, 2014
8303764 Apparatus and methods for transporting and processing substrates Nov. 6, 2012
8293066 Apparatus and methods for transporting and processing substrates Oct. 23, 2012
8193011 Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using the same Jun. 5, 2012
8137466 Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using the same Mar. 20, 2012
8097084 Vacuum chamber system for semiconductor processing Jan. 17, 2012
8048259 Vacuum processing apparatus Nov. 1, 2011
7901539 Apparatus and methods for transporting and processing substrates Mar. 8, 2011
7875156 Probe storage container, prober apparatus, probe arranging method and manufacturing method of probe storage container Jan. 25, 2011
7862694 Composite coating device and method of forming overcoat on magnetic head using the same Jan. 4, 2011
7811384 Method and apparatus for treating substrates in a rotary installation Oct. 12, 2010
7744730 Rotating pallet in sputtering system Jun. 29, 2010
7699933 Method and device for the plasma treatment of workpieces Apr. 20, 2010
7695598 Coater having substrate cleaning device and coating deposition methods employing such coater Apr. 13, 2010
7431813 Multi-chambered substrate processing equipment having sealing structure between chambers thereof, and method of assembling such equipment Oct. 7, 2008
7413639 Energy and media connection for a coating installation comprising several chambers Aug. 19, 2008
7381969 Load lock control Jun. 3, 2008
7300557 Device for targeted application of deposition material to a substrate Nov. 27, 2007
7285916 Multi chamber plasma process system Oct. 23, 2007
7264741 Coater having substrate cleaning device and coating deposition methods employing such coater Sep. 4, 2007
7214274 Method and apparatus for thermally insulating adjacent temperature controlled processing chambers May. 8, 2007
7039501 Method for determining a position of a robot May. 2, 2006
7032614 Facilities connection box for pre-facilitation of wafer fabrication equipment Apr. 25, 2006
6887358 Installation for processing wafers May. 3, 2005
6858119 Mobile plating system and method Feb. 22, 2005
6858085 Two-compartment chamber for sequential processing Feb. 22, 2005
6852194 Processing apparatus, transferring apparatus and transferring method Feb. 8, 2005
6846380 Substrate processing apparatus and related systems and methods Jan. 25, 2005
6843883 Vacuum processing apparatus and method for producing an object to be processed Jan. 18, 2005
6827788 Substrate processing device and through-chamber Dec. 7, 2004
6827789 Isolation chamber arrangement for serial processing of semiconductor wafers for the electronic industry Dec. 7, 2004
6824617 Input/output valve switching apparatus of semiconductor manufacturing system Nov. 30, 2004
6818108 Chamber for the transport of workpieces in a vacuum atmosphere, a chamber combination and a method for transporting a workpiece Nov. 16, 2004
6818068 Conveyor for treating hollow bodies comprising an advanced pressure distribution circuit Nov. 16, 2004
6808592 High throughput plasma treatment system Oct. 26, 2004
6793766 Apparatus having platforms positioned for precise centering of semiconductor wafers during processing Sep. 21, 2004
6793735 Integrated cobalt silicide process for semiconductor devices Sep. 21, 2004
6790286 Substrate processing apparatus Sep. 14, 2004
6767439 High throughput thin film deposition and substrate handling method and apparatus for optical disk processing Jul. 27, 2004
6740195 Detection of nontransient processing anomalies in vacuum manufacturing process May. 25, 2004
6688375 Vacuum processing system having improved substrate heating and cooling Feb. 10, 2004
6627039 Plasma processing methods and apparatus Sep. 30, 2003
6620288 Substrate treatment apparatus Sep. 16, 2003
6558506 Etching system and etching chamber May. 6, 2003
6549825 Alignment apparatus Apr. 15, 2003
6517691 Substrate processing system Feb. 11, 2003
6517692 Apparatus for flow-line treatment of articles in an artificial medium Feb. 11, 2003
6503379 Mobile plating system and method Jan. 7, 2003
6471920 Apparatus and method for treatment of electrically conductive continuous material Oct. 29, 2002

1 2 3 4 5

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