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Class Information
Number: 204/298.29
Name: Chemistry: electrical and wave energy > Apparatus > Coating, forming or etching by sputtering > Coating > Moving workpiece or target > Oscillatory movement
Description: Apparatus including means for oscillating the target or workpiece.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7510634 |
Apparatus and methods for deposition and/or etch selectivity |
Mar. 31, 2009 |
| 7229532 |
Sputtering apparatus |
Jun. 12, 2007 |
| 6905578 |
Apparatus and method for multi-target physical-vapor deposition of a multi-layer material structure |
Jun. 14, 2005 |
| 6835289 |
Particle implantation apparatus and particle implantation method |
Dec. 28, 2004 |
| 6800183 |
Sputtering device |
Oct. 5, 2004 |
| 6736946 |
Physical vapor deposition apparatus with modified shutter disk and cover ring |
May. 18, 2004 |
| 6726816 |
Method for forming thin film, spheroid coated with thin film, light bulb using the spheroid and equipment for film formation |
Apr. 27, 2004 |
| 6641702 |
Sputtering device |
Nov. 4, 2003 |
| 6623606 |
Method and apparatus for sputter coating with variable target to substrate spacing |
Sep. 23, 2003 |
| 6579420 |
Apparatus and method for uniformly depositing thin films over substrates |
Jun. 17, 2003 |
| 6485616 |
System and method for coating substrates with improved capacity and uniformity |
Nov. 26, 2002 |
| 6461483 |
Method and apparatus for performing high pressure physical vapor deposition |
Oct. 8, 2002 |
| 6416635 |
Method and apparatus for sputter coating with variable target to substrate spacing |
Jul. 9, 2002 |
| 6402906 |
Sputtering alloy films using a crescent-shaped aperture |
Jun. 11, 2002 |
| 6395156 |
Sputtering chamber with moving table producing orbital motion of target for improved uniformity |
May. 28, 2002 |
| 6355146 |
Sputtering process and apparatus for coating powders |
Mar. 12, 2002 |
| 6350317 |
Linear drive system for use in a plasma processing system |
Feb. 26, 2002 |
| 6328858 |
Multi-layer sputter deposition apparatus |
Dec. 11, 2001 |
| 6309516 |
Method and apparatus for metal allot sputtering |
Oct. 30, 2001 |
| 6303008 |
Rotating film carrier and aperture for precision deposition of sputtered alloy films |
Oct. 16, 2001 |
| 6270633 |
Artificial latticed multi-layer film deposition apparatus |
Aug. 7, 2001 |
| 6238531 |
Method and apparatus to improve the properties of ion beam deposited films in an ion beam sputtering system |
May. 29, 2001 |
| 6235171 |
Vacuum film forming/processing apparatus and method |
May. 22, 2001 |
| 6216631 |
Robotic manipulation system utilizing patterned granular motion |
Apr. 17, 2001 |
| 6210540 |
Method and apparatus for depositing thin films on vertical surfaces |
Apr. 3, 2001 |
| 6193853 |
Magnetron sputtering method and apparatus |
Feb. 27, 2001 |
| 6149785 |
Apparatus for coating powders |
Nov. 21, 2000 |
| 6123814 |
Coating station |
Sep. 26, 2000 |
| 6086727 |
Method and apparatus to improve the properties of ion beam deposited films in an ion beam sputtering system |
Jul. 11, 2000 |
| 6051113 |
Apparatus and method for multi-target physical-vapor deposition of a multi-layer material structure using target indexing |
Apr. 18, 2000 |
| 6036821 |
Enhanced collimated sputtering apparatus and its method of use |
Mar. 14, 2000 |
| 5783055 |
Multi-chamber sputtering apparatus |
Jul. 21, 1998 |
| 5755937 |
Apparatus for applying layers of metal onto a surface |
May. 26, 1998 |
| 5741404 |
Multi-planar angulated sputtering target and method of use for filling openings |
Apr. 21, 1998 |
| 5730847 |
Arc ion plating device and arc ion plating system |
Mar. 24, 1998 |
| 5709785 |
Metallizing machine |
Jan. 20, 1998 |
| 5662785 |
Method for masking a workpiece and a vacuum treatment facility |
Sep. 2, 1997 |
| 5616226 |
Cathode assembly |
Apr. 1, 1997 |
| 5540821 |
Method and apparatus for adjustment of spacing between wafer and PVD target during semiconductor processing |
Jul. 30, 1996 |
| 5520784 |
Ultrasonic enhancement of aluminum step coverage and apparatus |
May. 28, 1996 |
| 5182256 |
Process and apparatus for preparing superconducting thin films |
Jan. 26, 1993 |
| 5180708 |
Process and apparatus for preparing superconducting thin films |
Jan. 19, 1993 |
| 4988424 |
Mask and method for making gradient sputtered coatings |
Jan. 29, 1991 |
| 4904362 |
Bar-shaped magnetron or sputter cathode arrangement |
Feb. 27, 1990 |
| 4851095 |
Magnetron sputtering apparatus and process |
Jul. 25, 1989 |
| 4490227 |
Process for making a curved, conductively coated glass member and the product thereof |
Dec. 25, 1984 |
| 4437966 |
Sputtering cathode apparatus |
Mar. 20, 1984 |
| 4132624 |
Apparatus for producing metal oxide films |
Jan. 2, 1979 |
| 4102768 |
Metal oxide coatings |
Jul. 25, 1978 |
| 4022947 |
Transparent panel having high reflectivity for solar radiation and a method for preparing same |
May. 10, 1977 |
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